Patent | Date |
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System and method for non-destructive decontamination of sensitive electronics using soft x-ray radiation Grant 8,280,004 - DeSalvo , et al. October 2, 2 | 2012-10-02 |
System and method for non-destructive decontamination of sensitive electronics using soft x-ray radiation App 20120148025 - DeSalvo; John R. ;   et al. | 2012-06-14 |
Pixel array arrangement for a soft x-ray source Grant 7,660,392 - DeSalvo , et al. February 9, 2 | 2010-02-09 |
System and method for non-destructive decontamination of sensitive electronics using soft X-ray radiation Grant 7,580,506 - DeSalvo , et al. August 25, 2 | 2009-08-25 |
Pixel array arrangement for a soft x-ray source App 20090136001 - DeSalvo; John R. ;   et al. | 2009-05-28 |
System and method for non-destructive decontamination of sensitive electronics using soft X-ray radiation App 20080181364 - DeSalvo; John R. ;   et al. | 2008-07-31 |
Liquid-jet/liquid droplet initiated plasma discharge for generating useful plasma radiation Grant 6,998,785 - Silfvast , et al. February 14, 2 | 2006-02-14 |
Method and apparatus for debris mitigation for an electrical discharge source Grant 6,989,629 - Klebanoff , et al. January 24, 2 | 2006-01-24 |
Method and apparatus for debris mitigation for an electrical discharge source Grant 6,888,297 - Klebanoff , et al. May 3, 2 | 2005-05-03 |
Method and apparatus for debris mitigation for an electrical discharge source App 20040119394 - Klebanoff, Leonard E. ;   et al. | 2004-06-24 |
Adjustable bore capillary discharge Grant 6,576,917 - Silfvast June 10, 2 | 2003-06-10 |
Capillary discharge extreme ultraviolet lamp source for EUV microlithography and other related applications Grant 6,031,241 - Silfvast , et al. February 29, 2 | 2000-02-29 |
Configurations, materials and wavelengths for EUV lithium plasma discharge lamps Grant 5,963,616 - Silfvast , et al. October 5, 1 | 1999-10-05 |
Efficient narrow spectral width soft-X-ray discharge sources Grant 5,499,282 - Silfvast March 12, 1 | 1996-03-12 |
Inner-shell d-electron photoionization apparatus Grant 4,592,064 - Silfvast May 27, 1 | 1986-05-27 |
Low voltage operation of arc discharge devices Grant 4,504,955 - Macklin , et al. March 12, 1 | 1985-03-12 |
Foil electrode SPER light source Grant 4,441,189 - Macklin , et al. April 3, 1 | 1984-04-03 |
SPER Device for material working Grant 4,411,733 - Macklin , et al. October 25, 1 | 1983-10-25 |
External control of recombination rate for electron-ion recombination lasers Grant 4,388,720 - Silfvast , et al. June 14, 1 | 1983-06-14 |
Segmented plasma excitation-recombination laser Grant 4,336,506 - Silfvast , et al. June 22, 1 | 1982-06-22 |
Implantation of vaporized material on melted substrates Grant 4,281,030 - Silfvast July 28, 1 | 1981-07-28 |
Ion Lasers Employing Gas Mixtures Grant 3,585,524 - Silfvast June 15, 1 | 1971-06-15 |