Patent | Date |
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Transmission X-ray analyzer and transmission X-ray analysis method Grant 8,912,503 - Matoba December 16, 2 | 2014-12-16 |
X-ray analyzer and X-ray analysis method Grant 8,891,729 - Matoba , et al. November 18, 2 | 2014-11-18 |
Displacement detection mechanism and scanning probe microscope using the same Grant 8,869,311 - Hirose October 21, 2 | 2014-10-21 |
Focused ion beam apparatus Grant 8,822,945 - Nishinaka , et al. September 2, 2 | 2014-09-02 |
X-ray analyzer and mapping method for an X-ray analysis Grant 8,705,698 - Matsumura , et al. April 22, 2 | 2014-04-22 |
Cross section processing method and method of manufacturing cross section observation sample Grant 8,703,247 - Suzuki , et al. April 22, 2 | 2014-04-22 |
Electron microscope and specimen analyzing method Grant 8,664,598 - Hasuda , et al. March 4, 2 | 2014-03-04 |
Composite charged particle beam apparatus and sample processing and observing method Grant 8,642,958 - Takahashi , et al. February 4, 2 | 2014-02-04 |
Method of measuring vibration characteristics of cantilever Grant 8,615,811 - Shigeno , et al. December 24, 2 | 2013-12-24 |
X-ray fluorescence analyzer and X-ray fluorescence analysis method Grant 8,611,493 - Hasegawa , et al. December 17, 2 | 2013-12-17 |
Softening point measuring apparatus and thermal conductivity measuring apparatus Grant 8,608,373 - Ando , et al. December 17, 2 | 2013-12-17 |
X-ray transmission inspection apparatus and x-ray transmission inspection method Grant 8,596,866 - Matoba December 3, 2 | 2013-12-03 |
Cantilever for scanning probe microscope and scanning probe microscope equipped with it Grant 8,601,608 - Maruyama , et al. December 3, 2 | 2013-12-03 |
Friction force microscope Grant 8,601,609 - Yasutake , et al. December 3, 2 | 2013-12-03 |
Focused ion beam system and sample processing method using the same Grant 8,581,206 - Man , et al. November 12, 2 | 2013-11-12 |
Method of determining a spring constant of a cantilever and scanning probe microscope using the method Grant 8,584,261 - Watanabe , et al. November 12, 2 | 2013-11-12 |
Method and apparatus for cross-section processing and observation Grant 8,542,275 - Kiyohara , et al. September 24, 2 | 2013-09-24 |
Focused ion beam apparatus Grant 8,513,602 - Ogawa , et al. August 20, 2 | 2013-08-20 |
Charged particle beam apparatus Grant 8,513,627 - Maruo August 20, 2 | 2013-08-20 |
Probe aligning method for probe microscope and probe microscope operated by the same Grant 8,495,759 - Wakiyama , et al. July 23, 2 | 2013-07-23 |
Method And Apparatus For Preparing Lamella App 20130175446 - NAKATANI; Ikuko | 2013-07-11 |
Probe Shape Evaluation Method For A Scanning Probe Microscope App 20130180019 - WATANABE; Masafumi ;   et al. | 2013-07-11 |
Defect repair apparatus and method for EUV mask using a hydrogen ion beam Grant 8,460,842 - Ogawa , et al. June 11, 2 | 2013-06-11 |
X-ray inspection device and X-ray inspection method Grant 8,422,630 - Matoba April 16, 2 | 2013-04-16 |
X-ray analysis apparatus and X-ray analysis method Grant 8,408,789 - Takahara April 2, 2 | 2013-04-02 |
Focused ion beam apparatus Grant 8,389,953 - Ogawa , et al. March 5, 2 | 2013-03-05 |
Thermal analysis apparatus Grant 8,359,180 - Yamada January 22, 2 | 2013-01-22 |
Differential scanning calorimeter Grant 8,342,744 - Nishimura , et al. January 1, 2 | 2013-01-01 |
Section processing method and its apparatus Grant 8,306,264 - Fujii , et al. November 6, 2 | 2012-11-06 |
Micro cross-section processing method Grant 8,304,721 - Iwasaki , et al. November 6, 2 | 2012-11-06 |
Composite focused ion beam device, process observation method using the same, and processing method Grant 8,274,063 - Kaito , et al. September 25, 2 | 2012-09-25 |
Sample processing and observing method Grant 8,274,049 - Tanaka , et al. September 25, 2 | 2012-09-25 |
Composite focused ion beam device, and processing observation method and processing method using the same Grant 8,269,194 - Kaito , et al. September 18, 2 | 2012-09-18 |
Charged particle beam apparatus and sample processing method Grant 8,269,188 - Ogawa September 18, 2 | 2012-09-18 |
Photomask defect correcting method and device Grant 8,257,887 - Takaoka September 4, 2 | 2012-09-04 |
Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever Grant 8,214,915 - Shigeno , et al. July 3, 2 | 2012-07-03 |
Sample preparing device and sample posture shifting method Grant 8,198,603 - Takahashi , et al. June 12, 2 | 2012-06-12 |
Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope Grant 8,191,168 - Man , et al. May 29, 2 | 2012-05-29 |
Self displacement sensing cantilever and scanning probe microscope Grant 8,161,568 - Iyoki , et al. April 17, 2 | 2012-04-17 |
Charged particle beam apparatus and method adjusting axis of aperture Grant 8,124,932 - Ogawa , et al. February 28, 2 | 2012-02-28 |
Piezoelectric actuator provided with a displacement meter, piezoelectric element, and positioning device Grant 8,115,367 - Iyoki February 14, 2 | 2012-02-14 |
Conductivity measuring apparatus and conductivity measuring method Grant 8,111,079 - Yasutake , et al. February 7, 2 | 2012-02-07 |
X-ray analysis apparatus and X-ray analysis method Grant 8,068,583 - Matoba , et al. November 29, 2 | 2011-11-29 |
Circular cylinder type piezoelectric actuator and piezoelectric element and scanning probe microscope using those Grant 8,058,780 - Iyoki November 15, 2 | 2011-11-15 |
Approach method for probe and sample in scanning probe microscope Grant 8,024,816 - Iyoki , et al. September 20, 2 | 2011-09-20 |
Scanning probe microscope Grant 7,997,124 - Shikakura , et al. August 16, 2 | 2011-08-16 |
X-ray analyzer and X-ray analysis method Grant 8,000,439 - Matoba August 16, 2 | 2011-08-16 |
Composite charged particle beam apparatus, method of processing a sample and method of preparing a sample for a transmission electron microscope using the same Grant 7,973,280 - Takahashi , et al. July 5, 2 | 2011-07-05 |
X-ray analyzer and X-ray analysis method Grant 7,970,101 - Sakai , et al. June 28, 2 | 2011-06-28 |
Method of fabricating grabbing face of sample grabbing portion Grant 7,951,303 - Munekane May 31, 2 | 2011-05-31 |
Sensor for observations in liquid environments and observation apparatus for use in liquid environments Grant 7,945,965 - Watanabe , et al. May 17, 2 | 2011-05-17 |
Apparatus structure and scanning probe microscope including apparatus structure Grant 7,945,964 - Wakiyama , et al. May 17, 2 | 2011-05-17 |
Method for fabricating EUVL mask Grant 7,927,769 - Hagiwara , et al. April 19, 2 | 2011-04-19 |
Method of measuring length of measurement object article in micro-structure Grant 7,923,267 - Munekane , et al. April 12, 2 | 2011-04-12 |
X-ray analyzer Grant 7,910,888 - Tanaka , et al. March 22, 2 | 2011-03-22 |
Differential scanning calorimeter Grant 7,802,916 - Teramoto September 28, 2 | 2010-09-28 |
Method of observing and method of working diamond stylus for working of atomic force microscope Grant 7,804,067 - Takaoka September 28, 2 | 2010-09-28 |
Charged-particle beam apparatus Grant 7,804,066 - Ogawa , et al. September 28, 2 | 2010-09-28 |
Superconducting radiometry apparatus Grant 7,789,557 - Tanaka , et al. September 7, 2 | 2010-09-07 |
Optical displacement-detecting mechanism and probe microscope using the same Grant 7,787,133 - Iyoki , et al. August 31, 2 | 2010-08-31 |
Thermal analyzer Grant 7,781,703 - Nagasawa August 24, 2 | 2010-08-24 |
Sample operation apparatus Grant 7,770,474 - Yasutake , et al. August 10, 2 | 2010-08-10 |
Focused ion beam apparatus Grant 7,755,065 - Nakagawa , et al. July 13, 2 | 2010-07-13 |
Working method by focused ion beam and focused ion beam working apparatus Grant 7,750,318 - Kozakai July 6, 2 | 2010-07-06 |
Thermal analysis equipment Grant 7,748,894 - Nakatani July 6, 2 | 2010-07-06 |
Thermal analysis apparatus Grant 7,744,273 - Nagasawa , et al. June 29, 2 | 2010-06-29 |
Nanobio device of imitative anatomy structure Grant 7,736,893 - Munekane , et al. June 15, 2 | 2010-06-15 |
Composite charged-particle beam system Grant 7,718,981 - Takahashi , et al. May 18, 2 | 2010-05-18 |
Method of making lamina specimen Grant 7,700,367 - Fujii April 20, 2 | 2010-04-20 |
X-ray tube and X-ray analyzing apparatus Grant 7,680,248 - Matoba March 16, 2 | 2010-03-16 |
Thermal analysis system and method of drying the same Grant 7,641,384 - Nakatani , et al. January 5, 2 | 2010-01-05 |
X-ray tube and X-ray analysis apparatus Grant 7,634,054 - Matoba , et al. December 15, 2 | 2009-12-15 |
Fluorescent X-ray analysis apparatus Grant 7,634,053 - Matoba December 15, 2 | 2009-12-15 |
X-ray tube and X-ray analysis apparatus Grant 7,627,088 - Matoba , et al. December 1, 2 | 2009-12-01 |
X-ray analysis apparatus and X-ray analysis method Grant 7,623,627 - Matoba November 24, 2 | 2009-11-24 |
Scanning probe microscope displacement detecting mechanism and scanning probe microscope using same Grant 7,614,287 - Iyoki , et al. November 10, 2 | 2009-11-10 |
Vibration-type cantilever holder and scanning probe microscope Grant 7,605,368 - Shigeno , et al. October 20, 2 | 2009-10-20 |
Heat flow flux type differential scanning calorimeter Grant 7,588,366 - Kinoshita September 15, 2 | 2009-09-15 |
Scanning type probe microscope Grant 7,588,605 - Ookubo September 15, 2 | 2009-09-15 |
Superconducting X-ray detector and X-ray analysis apparatus using the same Grant 7,589,323 - Tanaka , et al. September 15, 2 | 2009-09-15 |
X-ray analysis apparatus and X-ray analysis method Grant 7,587,025 - Fukai , et al. September 8, 2 | 2009-09-08 |
Method of correcting opaque defect of photomask using atomic force microscope fine processing device Grant 7,571,639 - Doi , et al. August 11, 2 | 2009-08-11 |
Wafer holder and sample producing apparatus using it Grant 7,573,047 - Suzuki August 11, 2 | 2009-08-11 |
Atom probe apparatus and method for working sample preliminary for the same Grant 7,550,723 - Kaito June 23, 2 | 2009-06-23 |
Focused ion beam apparatus and sample section forming and thin-piece sample preparing methods Grant 7,531,796 - Tashiro , et al. May 12, 2 | 2009-05-12 |
Processing apparatus using focused charged particle beam Grant 7,518,125 - Yamamoto , et al. April 14, 2 | 2009-04-14 |
Method and apparatus of measuring thin film sample and method and apparatus of fabricating thin film sample Grant 7,518,109 - Ikku , et al. April 14, 2 | 2009-04-14 |
Working method utilizing irradiation of charged particle beam onto sample through passage in gas blowing nozzle Grant 7,511,289 - Kaito March 31, 2 | 2009-03-31 |
Method of approaching probe and apparatus for realizing the same Grant 7,511,269 - Munekane March 31, 2 | 2009-03-31 |
X-ray analysis apparatus Grant 7,508,907 - Sasayama March 24, 2 | 2009-03-24 |
Probe microscope system suitable for observing sample of long body Grant 7,507,957 - Fujihira , et al. March 24, 2 | 2009-03-24 |
Thermal analysis apparatus Grant 7,500,779 - Takeuchi , et al. March 10, 2 | 2009-03-10 |
Method for manufacturing a split probe Grant 7,494,575 - Sadayama , et al. February 24, 2 | 2009-02-24 |
Probe for a scanning magnetic force microscope, method for producing the same, and method for forming ferromagnetic alloy film on carbon nanotubes Grant 7,495,215 - Akinaga , et al. February 24, 2 | 2009-02-24 |
Charged particle beam irradiation method and charged particle beam apparatus Grant 7,488,961 - Muramatsu , et al. February 10, 2 | 2009-02-10 |
Charged particle beam scan and irradiation method, charged particle beam apparatus, workpiece observation method and workpiece processing method Grant 7,485,880 - Kozakai , et al. February 3, 2 | 2009-02-03 |
Method for fabricating nanometer-scale structure Grant 7,476,418 - Yasutake , et al. January 13, 2 | 2009-01-13 |
Method of determining processing position in charged particle beam apparatus, and infrared microscope used in the method Grant 7,459,699 - Kiyohara , et al. December 2, 2 | 2008-12-02 |
Differential scanning calorimeter Grant 7,455,449 - Nishimura November 25, 2 | 2008-11-25 |
Charged particle beam apparatus Grant 7,442,942 - Takahashi , et al. October 28, 2 | 2008-10-28 |
Surface information measuring apparatus and surface information measuring method Grant 7,441,445 - Yamamoto October 28, 2 | 2008-10-28 |
Working method using scanning probe Grant 7,442,925 - Yasutake , et al. October 28, 2 | 2008-10-28 |
Piezoelectric actuator and scanning probe microscope using the same Grant 7,427,744 - Watanabe September 23, 2 | 2008-09-23 |
Fluorescent X-ray analysis apparatus Grant 7,428,293 - Fukai , et al. September 23, 2 | 2008-09-23 |
Fluorescent x-ray analysis apparatus Grant 7,424,093 - Fukai , et al. September 9, 2 | 2008-09-09 |
Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus Grant 7,423,266 - Tashiro , et al. September 9, 2 | 2008-09-09 |
Scanning probe microscope Grant 7,404,313 - Watanabe July 29, 2 | 2008-07-29 |
Probe for a scanning microscope Grant 7,398,678 - Nakayama , et al. July 15, 2 | 2008-07-15 |
Processing probe Grant 7,378,654 - Wakiyama , et al. May 27, 2 | 2008-05-27 |
Scanning probe microscope and scanning method Grant 7,373,806 - Kitajima , et al. May 20, 2 | 2008-05-20 |
Cantilever holder and scanning probe microscope Grant 7,375,322 - Kitajima , et al. May 20, 2 | 2008-05-20 |
Photomask defect correction method employing a combined device of a focused electron beam device and an atomic force microscope Grant 7,375,352 - Takaoka , et al. May 20, 2 | 2008-05-20 |
Manipulator needle portion repairing method Grant 7,356,900 - Munekane April 15, 2 | 2008-04-15 |
Sample support prepared by semiconductor silicon process technique Grant 7,345,289 - Iwasaki , et al. March 18, 2 | 2008-03-18 |
Surface characteristic analysis apparatus Grant 7,337,656 - Shirakawabe , et al. March 4, 2 | 2008-03-04 |
Method and apparatus for manufacturing ultra fine three-dimensional structure Grant 7,326,445 - Kaito February 5, 2 | 2008-02-05 |
Ion beam device and ion beam processing method, and holder member Grant 7,297,944 - Kodama , et al. November 20, 2 | 2007-11-20 |
Fine-adjustment mechanism for scanning probe microscopy Grant 7,288,762 - Iyoki , et al. October 30, 2 | 2007-10-30 |
Optical axis adjusting mechanism for X-ray lens, X-ray analytical instrument, and method of adjusting optical axis of X-ray lens Grant 7,289,597 - Sasayama , et al. October 30, 2 | 2007-10-30 |
Scratch repairing processing method and scanning probe microscope (SPM) used therefor Grant 7,285,792 - Watanabe , et al. October 23, 2 | 2007-10-23 |
Scanning probe microscope Grant 7,284,415 - Shikakura , et al. October 23, 2 | 2007-10-23 |
Method of manufacturing light-propagating probe for near-field microscope Grant 7,282,157 - Chiba , et al. October 16, 2 | 2007-10-16 |
Method of processing vertical cross-section using atomic force microscope Grant 7,278,299 - Takaoka , et al. October 9, 2 | 2007-10-09 |
Ion beam device and ion beam processing method Grant 7,276,691 - Kodama , et al. October 2, 2 | 2007-10-02 |
Differential scanning calorimeter with a second heater Grant 7,275,862 - Nishimura , et al. October 2, 2 | 2007-10-02 |
Method and system for fabricating three-dimensional microstructure Grant 7,267,731 - Iwasaki September 11, 2 | 2007-09-11 |
Processing method using probe of scanning probe microscope Grant 7,259,372 - Takaoka , et al. August 21, 2 | 2007-08-21 |
Method and apparatus of evaluating layer matching deviation based on CAD information Grant 7,257,785 - Matsuoka August 14, 2 | 2007-08-14 |
Scanning probe microscope and measuring method by means of the same Grant 7,251,987 - Watanabe , et al. August 7, 2 | 2007-08-07 |
Superconducting X-ray detection apparatus and superconducting X-ray analyzer using the apparatus Grant 7,241,997 - Odawara , et al. July 10, 2 | 2007-07-10 |
Probe for near-field microscope, the method for manufacturing the probe and scanning probe microscope using the probe Grant 7,241,987 - Saito , et al. July 10, 2 | 2007-07-10 |
Gas blowing nozzle of charged particle beam apparatus and charged particle beam apparatus as well as working method Grant 7,235,783 - Kaito June 26, 2 | 2007-06-26 |
Cooling mechanism, cooling apparatus having cooling mechanism, and thermal analyzer equipped with cooling apparatus Grant 7,234,861 - Nishimura June 26, 2 | 2007-06-26 |
Method of removing particle of photomask using atomic force microscope Grant 7,232,995 - Takaoka , et al. June 19, 2 | 2007-06-19 |
Electrical property evaluation apparatus Grant 7,187,166 - Sugano March 6, 2 | 2007-03-06 |
Image noise removing method in FIB/SEM complex apparatus Grant 7,173,261 - Ogawa , et al. February 6, 2 | 2007-02-06 |
Photomask correction method using composite charged particle beam, and device used in the correction method Grant 7,172,839 - Sugiyama , et al. February 6, 2 | 2007-02-06 |
Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder Grant 7,170,054 - Iyoki , et al. January 30, 2 | 2007-01-30 |
Composite system of scanning electron microscope and focused ion beam Grant 7,154,106 - Oi , et al. December 26, 2 | 2006-12-26 |
Scanning probe device and processing method by scanning probe Grant 7,107,826 - Watanabe , et al. September 19, 2 | 2006-09-19 |
Thermal analyzer with gas mixing chamber Grant 7,104,680 - Nakamura September 12, 2 | 2006-09-12 |
Method for extracting objective image Grant 7,103,209 - Aita September 5, 2 | 2006-09-05 |
Scanning probe microscopy system and method of measurement by the same Grant 7,098,453 - Ando , et al. August 29, 2 | 2006-08-29 |
TEM sample equipped with an identifying function, focused ion beam device for processing TEM sample, and transmission electron microscope Grant 7,095,024 - Adachi , et al. August 22, 2 | 2006-08-22 |
Micro-sample pick-up apparatus and micro-sample pick-up method Grant 7,067,823 - Iwasaki , et al. June 27, 2 | 2006-06-27 |
Scanning probe microscope Grant 7,066,015 - Honma June 27, 2 | 2006-06-27 |
X-ray analyzer for analyzing plastics Grant 7,062,014 - Hasegawa June 13, 2 | 2006-06-13 |
EPL mask processing method and device thereof Grant 7,060,397 - Yamamoto , et al. June 13, 2 | 2006-06-13 |
Pattern measuring method and measuring system using display microscope image Grant 7,054,506 - Ikku May 30, 2 | 2006-05-30 |
Scanning probe microscope Grant 7,026,607 - Kitajima , et al. April 11, 2 | 2006-04-11 |
Radiation detector Grant 7,022,996 - Matoba , et al. April 4, 2 | 2006-04-04 |
Network system for controlling independent access to stored data among local area networks Grant 7,020,152 - Doi , et al. March 28, 2 | 2006-03-28 |
Electron beam processing method Grant 7,018,683 - Takaoka , et al. March 28, 2 | 2006-03-28 |
Thin specimen producing method and apparatus Grant 7,002,150 - Iwasaki , et al. February 21, 2 | 2006-02-21 |
Radiation detector Grant 6,974,952 - Morooka , et al. December 13, 2 | 2005-12-13 |
Method of manufacturing the multi-tip probe, a multi-tip probe, and surface characteristic analysis apparatus Grant 6,953,519 - Shirakawabe , et al. October 11, 2 | 2005-10-11 |
Viscoelasticity measuring instrument Grant 6,948,356 - Okubo , et al. September 27, 2 | 2005-09-27 |
Electron beam apparatus Grant 6,949,745 - Yonezawa September 27, 2 | 2005-09-27 |
Scanning probe microscope and operation method Grant 6,941,798 - Yamaoka , et al. September 13, 2 | 2005-09-13 |
Specimen analyzing method Grant 6,934,920 - Fujii , et al. August 23, 2 | 2005-08-23 |
Heated self-detecting type cantilever for atomic force microscope Grant 6,932,504 - Takahashi , et al. August 23, 2 | 2005-08-23 |
Scanning microscope with brightness control Grant 6,924,481 - Ikku , et al. August 2, 2 | 2005-08-02 |
Derived data display adjustment system Grant 6,911,979 - Nakatani June 28, 2 | 2005-06-28 |
Scanning probe microscope Grant 6,904,791 - Honma June 14, 2 | 2005-06-14 |
Calorimeter Grant 6,907,359 - Tanaka , et al. June 14, 2 | 2005-06-14 |
Analysis apparatus and analysis method Grant 6,901,349 - Nagasawa May 31, 2 | 2005-05-31 |
Electromagnetic field superimposed lens and electron beam device using this electromagnetic field superimposed lens Grant 6,897,450 - Yonezawa May 24, 2 | 2005-05-24 |
Method for repairing a phase shift mask and a focused ion beam apparatus for carrying out method Grant 6,891,171 - Hagiwara , et al. May 10, 2 | 2005-05-10 |
Apparatus and method for measuring thickness and composition of multi-layered sample Grant 6,885,727 - Tamura April 26, 2 | 2005-04-26 |
Apparatus for processing and observing a sample Grant 6,870,161 - Adachi , et al. March 22, 2 | 2005-03-22 |
Light probe microscope including picture signal processing means Grant 6,867,407 - Muramatsu March 15, 2 | 2005-03-15 |
Probe for scanning probe microscope Grant 6,864,481 - Kaito , et al. March 8, 2 | 2005-03-08 |
Charged particle microscope Grant 6,855,940 - Mutou February 15, 2 | 2005-02-15 |
Scanning charged particle microscope Grant 6,852,973 - Suzuki , et al. February 8, 2 | 2005-02-08 |
Fluorescent X-ray analysis apparatus Grant 6,850,593 - Tamura February 1, 2 | 2005-02-01 |
Ion beam apparatus, ion beam processing method and sample holder member Grant 6,838,685 - Kodama , et al. January 4, 2 | 2005-01-04 |
Fine stencil structure correction device Grant 6,825,468 - Oi , et al. November 30, 2 | 2004-11-30 |
Cooling apparatus and squid microscope using same Grant 6,810,679 - Odawara November 2, 2 | 2004-11-02 |
X-ray fluorescence thickness measurement device Grant 6,810,106 - Sato October 26, 2 | 2004-10-26 |
Combined x-ray analysis apparatus Grant 6,798,863 - Sato September 28, 2 | 2004-09-28 |
Scanning atom probe Grant 6,797,952 - Kaito , et al. September 28, 2 | 2004-09-28 |
User friendly analysis system Grant 6,799,135 - Sone September 28, 2 | 2004-09-28 |
Charged particle processing for forming pattern boundaries at a uniform thickness Grant 6,780,551 - Hagiwara , et al. August 24, 2 | 2004-08-24 |
Beam shaped film pattern formation method Grant 6,740,368 - Kaito May 25, 2 | 2004-05-25 |
Electron beam apparatus Grant 6,740,888 - Sato , et al. May 25, 2 | 2004-05-25 |
Probe scanning device Grant 6,734,426 - Matsuzaki , et al. May 11, 2 | 2004-05-11 |
Calorimeter Grant 6,726,356 - Tanaka , et al. April 27, 2 | 2004-04-27 |
Thermogravimetry apparatus Grant 6,709,153 - Nakatani , et al. March 23, 2 | 2004-03-23 |
ICP analyzer Grant 6,709,632 - Nakagawa , et al. March 23, 2 | 2004-03-23 |