Shyu; Deh-Ming

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shyu; Deh-Ming.The latest application filed is for "thickness measuring system and method for a bonding layer".

Company Profile

0.15.15

Shyu; Deh-Ming - Miaoli County TW
SHYU; Deh-Ming - Zhubei City TW
Shyu; Deh Ming - Jhunan Township Miaoli County TW
Shyu; Deh-Ming - MiaoLi TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and system for measuring a stacking overlay error by focusing on one of upper and lower layer overlay marks using a differential interference contrast microscope Grant 9,182,681 - Shyu , et al. November 10, 2	2015-11-10
Thickness Measuring System And Method For A Bonding Layer App 20140333936 - CHANG; Po-Yi ; et al.	2014-11-13
Measurement systems and measurement methods Grant 8,830,458 - Shyu , et al. September 9, 2	2014-09-09
Method And System For Measuring A Stacking Overlay Error App 20140118721 - Shyu; Deh-Ming ; et al.	2014-05-01
Measurement Systems And Measurement Methods App 20140085640 - Shyu; Deh-Ming ; et al.	2014-03-27
Method for measuring via bottom profile Grant 8,537,213 - Shyu , et al. September 17, 2	2013-09-17
Method for designing two-dimensional array overlay targets and method and system for measuring overlay errors using the same Grant 8,321,821 - Ku , et al. November 27, 2	2012-11-27
Scatterfield microscopical measuring method and apparatus Grant 8,319,971 - Shyu , et al. November 27, 2	2012-11-27
Method for designing two-dimensional array overlay target sets and method and system for measuring overlay errors using the same Grant 8,250,497 - Hsu , et al. August 21, 2	2012-08-21
Method For Measuring Via Bottom Profile App 20120147171 - Shyu; Deh-Ming ; et al.	2012-06-14
System and method for via structure measurement Grant 8,139,233 - Ku , et al. March 20, 2	2012-03-20
System And Method For Via Structure Measurement App 20110172974 - KU; Yi Sha ; et al.	2011-07-14
Method For Designing Two-dimensional Array Overlay Target Sets And Method And System For Measuring Overlay Errors Using The Same App 20110154272 - Hsu; Wei Te ; et al.	2011-06-23
Measurement Device And Method Of Double-sided Optical Films App 20110149063 - DONG; SHU-PING ; et al.	2011-06-23
Method For Designing Two-dimensional Array Overlay Targets And Method And System For Measuring Overlay Errors Using The Same App 20110131538 - KU; Yi Sha ; et al.	2011-06-02
Method and apparatus for scatterfield microscopical measurement Grant 7,872,741 - Chou , et al. January 18, 2	2011-01-18
Reflective scatterometer Grant 7,864,324 - Shyu , et al. January 4, 2	2011-01-04
Method for designing gratings Grant 7,800,824 - Wang , et al. September 21, 2	2010-09-21
Reflective Scatterometer App 20100053627 - SHYU; Deh-Ming ; et al.	2010-03-04
Structure and method for overlay measurement Grant 7,652,776 - Shyu , et al. January 26, 2	2010-01-26
Scatterfield Microscopical Measuring Method And Apparatus App 20100007881 - Shyu; Deh-Ming ; et al.	2010-01-14
Structure and method for overlay measurement App 20090116035 - Shyu; Deh-Ming ; et al.	2009-05-07
Method and apparatus for scatterfield microscopical measurement App 20090079969 - Chou; Sen-Yih ; et al.	2009-03-26
Method for correlating the line width roughness of gratings and method for measurement Grant 7,430,052 - Shyu , et al. September 30, 2	2008-09-30
Method For Correlating The Line Width Roughness Of Gratings And Method For Measurement App 20080144050 - Shyu; Deh Ming ; et al.	2008-06-19
Method for inspecting a grating biochip Grant 7,355,713 - Shyu , et al. April 8, 2	2008-04-08
Method For Designing Gratings App 20080013176 - Wang; Shih Chun ; et al.	2008-01-17
Method for Inspecting a Grating Biochip App 20070156349 - Shyu; Deh Ming ; et al.	2007-07-05
Dual-lens hybrid diffractive/refractive imaging system Grant 6,724,532 - Fu , et al. April 20, 2	2004-04-20

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