Shur; Dmitry
Patent Applications and Registrations
Patent applications and USPTO patent grants for Shur; Dmitry.The latest application filed is for "charged particle detection system".
- Shur; Dmitry - Holon IL
| Patent | Date |
|---|---|
| Charged particle detection system Grant 11,322,333 - Shur , et al. May 3, 2 | 2022-05-03 |
| Charged Particle Detection System App 20210280387 - SHUR; Dmitry ; et al. | 2021-09-09 |
| Charged particle detection system Grant 11,031,210 - Shur , et al. June 8, 2 | 2021-06-08 |
| Particle detection assembly, system and method Grant 10,910,193 - Cheifetz , et al. February 2, 2 | 2021-02-02 |
| Charged Particle Detection System App 20200312609 - SHUR; Dmitry ; et al. | 2020-10-01 |
| Particle Detection Assembly, System And Method App 20190259571 - CHEIFETZ; ELI ; et al. | 2019-08-22 |
| Method and apparatus for lithographic mask production Grant 9,442,369 - Shur , et al. September 13, 2 | 2016-09-13 |
| System and method of SEM overlay metrology Grant 9,214,317 - Shur December 15, 2 | 2015-12-15 |
| System and Method of SEM Overlay Metrology App 20140353498 - Shur; Dmitry | 2014-12-04 |
| System and method for material analysis of a microscopic element Grant 8,546,756 - Shur , et al. October 1, 2 | 2013-10-01 |
| System And Method For Material Analysys Of A Microscopic Element App 20110024622 - Shur; Dmitry | 2011-02-03 |
| High current electron beam inspection Grant 7,602,197 - Kadyshevitch , et al. October 13, 2 | 2009-10-13 |
| Contact opening metrology Grant 7,476,875 - Kadyshevitch , et al. January 13, 2 | 2009-01-13 |
| Specimen current mapper Grant 7,473,911 - Kadyshevitch , et al. January 6, 2 | 2009-01-06 |
| Contact opening metrology Grant 7,381,978 - Kadyshevitch , et al. June 3, 2 | 2008-06-03 |
| Contact Opening Metrology App 20070257191 - Kadyshevitch; Alexander ; et al. | 2007-11-08 |
| Contact opening metrology Grant 7,279,689 - Kadyshevitch , et al. October 9, 2 | 2007-10-09 |
| High current electron beam inspection App 20070057687 - Kadyshevitch; Alexander ; et al. | 2007-03-15 |
| Contact opening metrology App 20060113471 - Kadyshevitch; Alexander ; et al. | 2006-06-01 |
| Contact opening metrology Grant 7,038,224 - Kadyshevitch , et al. May 2, 2 | 2006-05-02 |
| Contact opening metrology App 20050173657 - Kadyshevitch, Alexander ; et al. | 2005-08-11 |
| Specimen current mapper App 20040084622 - Kadyshevitch, Alexander ; et al. | 2004-05-06 |
| Contact opening metrology App 20040021076 - Kadyshevitch, Alexander ; et al. | 2004-02-05 |
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