Shufflebotham; Paul Kevin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shufflebotham; Paul Kevin.The latest application filed is for "method and apparatus for abatement of reaction products from a vacuum processing chamber".

Company Profile

0.12.3

Shufflebotham; Paul Kevin - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for abatement of reaction products from a vacuum processing chamber Grant 8,664,560 - Shufflebotham , et al. March 4, 2	2014-03-04
Method and apparatus for abatement of reaction products from a vacuum processing chamber App 20050155854 - Shufflebotham, Paul Kevin ; et al.	2005-07-21
Method and apparatus for abatement of reaction products from a vacuum processing chamber Grant 6,888,040 - Shufflebotham , et al. May 3, 2	2005-05-03
Method of depositing a silicon containing layer on a semiconductor substrate Grant 6,626,185 - Demos , et al. September 30, 2	2003-09-30
Inductively coupled plasma CVD App 20010019903 - Shufflebotham, Paul Kevin ; et al.	2001-09-06
In-situ Chamber Cleaning Method For Substrate Processing Chamber Using High Density Inductively Coupled Fluorine Plasma App 20010008138 - DEMOS, ALEX ; et al.	2001-07-19
Inductively coupled plasma CVD Grant 6,184,158 - Shufflebotham , et al. February 6, 2	2001-02-06
Method of high density plasma CVD gap-filling Grant 6,106,678 - Shufflebotham , et al. August 22, 2	2000-08-22
Two-element plasma resistant lightpipe assembly Grant 6,086,246 - Shufflebotham , et al. July 11, 2	2000-07-11
Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors Grant 5,847,918 - Shufflebotham , et al. December 8, 1	1998-12-08
Low voltage electrostatic clamp for substrates such as dielectric substrates Grant 5,838,529 - Shufflebotham , et al. November 17, 1	1998-11-17
Electrostatic clamp with lip seal for clamping substrates Grant 5,805,408 - Maraschin , et al. September 8, 1	1998-09-08
Method of polycrystalline silicon hydrogenation Grant 5,711,998 - Shufflebotham January 27, 1	1998-01-27
Shape memory alloy lift pins for semiconductor processing equipment Grant 5,669,977 - Shufflebotham , et al. September 23, 1	1997-09-23

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