Shu; Emily Yixie

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shu; Emily Yixie.The latest application filed is for "euv light source and exposure apparatus".

Company Profile

0.7.7

Shu; Emily Yixie - Shanghai CN
Shu; Emily Yixie - Niskayuna NY
Shu; Emily Yixie - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
EUV light source and exposure apparatus Grant 9,706,632 - Wu , et al. July 11, 2	2017-07-11
Euv Light Source And Exposure Apparatus App 20160113100 - WU; QIANG ; et al.	2016-04-21
EUVL light source system and method Grant 9,049,774 - Shu June 2, 2	2015-06-02
Euvl Light Source System And Method App 20150034845 - SHU; EMILY YIXIE	2015-02-05
Fiber optic sensors for gas turbine control Grant 6,978,074 - Shu , et al. December 20, 2	2005-12-20
Fiber Optic Sensors For Gas Turbine Control App 20050180699 - Shu, Emily Yixie ; et al.	2005-08-18
Fusion attachment of rigid pellicles and/or frames Grant 6,842,228 - Shu January 11, 2	2005-01-11
Fusion attachment of rigid pellicles and/or frames Grant 6,842,227 - Shu January 11, 2	2005-01-11
Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array Grant 6,834,549 - Shu , et al. December 28, 2	2004-12-28
Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array App 20040194556 - Shu, Emily Yixie ; et al.	2004-10-07
Fusion attachment of rigid pellicles and/or frames App 20040175962 - Shu, Emily Yixie	2004-09-09
Fusion attachment of rigid pellicles and/or frames App 20040175632 - Shu, Emily Yixie	2004-09-09
Fiber optic sensors for gas turbine control Grant 6,599,028 - Shu , et al. July 29, 2	2003-07-29
Apparatus and method for measuring and selectively adjusting a clearance App 20010013582 - Johnson, Christopher Donald ; et al.	2001-08-16

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