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Patent applications and USPTO patent grants for SHOROKHOV; Aleksandr.The latest application filed is for "particle inspection device based on spatial modulation method and particle inspection method using the particle inspection device".
Patent | Date |
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Particle Inspection Device Based On Spatial Modulation Method And Particle Inspection Method Using The Particle Inspection Device App 20220120662 - BAE; Sangwoo ;   et al. | 2022-04-21 |
Substrate Inspection System And Method Of Manufacturing Semiconductor Device Using Substrate Inspection System App 20210305106 - JEANG; EUNHEE ;   et al. | 2021-09-30 |
Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same Grant 10,816,480 - Jeang , et al. October 27, 2 | 2020-10-27 |
Method Of Detecting A Defect On A Substrate, Apparatus For Performing The Same And Method Of Manufacturing Semiconductor Device App 20200088649 - JEANG; Eun-Hee ;   et al. | 2020-03-19 |
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