| Patent | Date |
|---|
Reflective Mask Blank, Reflective Mask, And Method For Manufacturing Reflective Mask And Semiconductor Device
App 20220229357 - NAKAGAWA; Masanori ; et al. | 2022-07-21 |
Reflective Mask Blank, Reflective Mask, And Method For Manufacturing Reflective Mask And Semiconductor Device
App 20220206379 - NAKAGAWA; Masanori ; et al. | 2022-06-30 |
Substrate With A Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Semiconductor Device
App 20220146925 - Hamamoto; Kazuhiro ; et al. | 2022-05-12 |
Reflective Mask Blank, Reflective Mask, Method For Producing Same, And Method For Producing Semiconductor Device
App 20220121102 - SHOKI; Tsutomu ; et al. | 2022-04-21 |
Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device
Grant 11,281,090 - Hamamoto , et al. March 22, 2 | 2022-03-22 |
Substrate with multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method
Grant 11,262,647 - Hamamoto , et al. March 1, 2 | 2022-03-01 |
Reflective mask blank, reflective mask, method of manufacturing same, and method of manufacturing semiconductor device
Grant 11,249,385 - Ikebe , et al. February 15, 2 | 2022-02-15 |
Reflective mask blank, method of manufacturing reflective mask and method of manufacturing semiconductor device
Grant 11,187,972 - Ikebe , et al. November 30, 2 | 2021-11-30 |
Method for manufacturing reflective mask blank, and method for manufacturing reflective mask
Grant 11,131,921 - Shoki , et al. September 28, 2 | 2021-09-28 |
Method For Manufacturing Reflective Mask Blank, Reflective Mask Blank, Method For Manufacturing Reflective Mask, Reflective Mask, And Method For Manufacturing Semiconductor Device
App 20210294202 - SHOKI; Tsutomu ; et al. | 2021-09-23 |
Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Semiconductor Device
App 20210255536 - IKEBE; Yohei ; et al. | 2021-08-19 |
Reflective Mask Blank, Reflective Mask, And Methods For Producing Reflective Mask And Semiconductor Device
App 20210223681 - IKEBE; Yohei ; et al. | 2021-07-22 |
Reflective Mask Blank, Reflective Mask, Production Method Therefor, And Semiconductor Device Production Method
App 20210208498 - IKEBE; Yohei ; et al. | 2021-07-08 |
Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor device
Grant 11,048,159 - Shoki , et al. June 29, 2 | 2021-06-29 |
Reflective mask blank, reflective mask and method of manufacturing semiconductor device
Grant 11,003,068 - Ikebe , et al. May 11, 2 | 2021-05-11 |
Substrate with an electrically conductive film, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device
Grant 10,996,554 - Kobayashi , et al. May 4, 2 | 2021-05-04 |
Substrate With Conductive Film, Substrate With Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, And Method For Manufacturing Semiconductor Device
App 20210103209 - NAKAGAWA; Masanori ; et al. | 2021-04-08 |
Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device
Grant 10,921,705 - Ikebe , et al. February 16, 2 | 2021-02-16 |
Substrate Equipped With Multi-layer Reflection Film, Reflection-type Mask Blank, Reflection-type Mask, And Semiconductor Device Manufacturing Process
App 20200310239 - HAMAMOTO; Kazuhiro ; et al. | 2020-10-01 |
Substrate With Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, And Semiconductor Device Manufacturing Method
App 20200249558 - Kind Code | 2020-08-06 |
Substrate With An Electrically Conductive Film, Substrate With A Multilayer Reflective Film, Reflective Mask Blank, Reflective M
App 20200192213 - KOBAYASHI; Takumi ; et al. | 2020-06-18 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
Grant 10,620,527 - Hamamoto , et al. | 2020-04-14 |
Substrate with electrically conductive film, substrate with multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device
Grant 10,606,166 - Kobayashi , et al. | 2020-03-31 |
Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Semiconductor Device
App 20190384158 - IKEBE; Yohei ; et al. | 2019-12-19 |
Substrate With Conductive Film, Substrate With Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask And Method For
App 20190369483 - IKEBE; Yohei ; et al. | 2019-12-05 |
Reflective Mask Blank, Reflective Mask, Method Of Manufacturing Same, And Method Of Manufacturing Semiconductor Device
App 20190361338 - IKEBE; Yohei ; et al. | 2019-11-28 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask Blank, Transmissive Ma
App 20190361337 - HAMAMOTO; Kazuhiro ; et al. | 2019-11-28 |
Reflective mask blank, reflective mask, method for manufacturing reflective mask blank, and method for manufacturing semiconductor device
Grant 10,481,484 - Ikebe , et al. Nov | 2019-11-19 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
Grant 10,429,728 - Hamamoto , et al. O | 2019-10-01 |
Reflective Mask Blank, Method Of Manufacturing Reflective Mask And Method Of Manufacturing Semiconductor Device
App 20190265585 - IKEBE; Yohei ; et al. | 2019-08-29 |
Reflective mask blank, method for manufacturing same, reflective mask, method for manufacturing same, and method for manufacturing semiconductor device
Grant 10,347,485 - Shoki , et al. July 9, 2 | 2019-07-09 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method
Grant 10,295,900 - Orihara , et al. | 2019-05-21 |
Method For Manufacturing Reflective Mask Blank, Reflective Mask Blank, Method For Manufacturing Reflective Mask, Reflective Mask, And Method For Manufacturing Semiconductor Device
App 20190079382 - SHOKI; Tsutomu ; et al. | 2019-03-14 |
Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device
Grant 10,191,365 - Hamamoto , et al. Ja | 2019-01-29 |
Mask Blank Substrate, Substrate With Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Semiconductor Device
App 20180356719 - IKEBE; Yohei ; et al. | 2018-12-13 |
Method For Manufacturing Reflective Mask Blank, And Method For Manufacturing Reflective Mask
App 20180348628 - SHOKI; Tsutomu ; et al. | 2018-12-06 |
Multilayer reflective film formed substrate, reflective mask blank, mask blank, methods of manufacturing the same, reflective mask, and mask
Grant 10,126,641 - Shoki , et al. November 13, 2 | 2018-11-13 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask, And Semiconductor Device Fabrication Method
App 20180275507 - ORIHARA; Toshihiko ; et al. | 2018-09-27 |
Method for manufacturing reflective mask blank, and method for manufacturing reflective mask
Grant 10,067,419 - Shoki , et al. September 4, 2 | 2018-09-04 |
Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device
Grant 10,025,176 - Hamamoto , et al. July 17, 2 | 2018-07-17 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method
Grant 10,001,699 - Orihara , et al. June 19, 2 | 2018-06-19 |
Substrate With Electrically Conductive Film, Substrate With Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, And Method Of Manufacturing Semiconductor Device
App 20180149962 - KOBAYASHI; Takumi ; et al. | 2018-05-31 |
Reflective Mask Blank, Reflective Mask, Method For Manufacturing Reflective Mask Blank, And Method For Manufacturing Semiconductor Device
App 20180120692 - IKEBE; Yohei ; et al. | 2018-05-03 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask Blank, Transmissive Mask, Reflective Mask, And Semiconductor Device Fabrication Method
App 20180081264 - HAMAMOTO; Kazuhiro ; et al. | 2018-03-22 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
Grant 9,897,909 - Hamamoto , et al. February 20, 2 | 2018-02-20 |
Reflective mask blank, reflective mask, and method for manufacturing semiconductor device
Grant 9,864,267 - Ikebe , et al. January 9, 2 | 2018-01-09 |
Reflective Mask Blank, Method Of Manufacturing Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Semiconductor Device
App 20170329215 - HAMAMOTO; KAZUHIRO ; et al. | 2017-11-16 |
Reflective Mask Blank, Method For Manufacturing Same, Reflective Mask, Method For Manufacturing Same, And Method For Manufacturing Semiconductor Device
App 20170263444 - SHOKI; Tsutomu ; et al. | 2017-09-14 |
Reflective mask blank, method of manufacturing same, reflective mask and method of manufacturing semiconductor device
Grant 9,726,969 - Hamamoto , et al. August 8, 2 | 2017-08-08 |
Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device
Grant 9,720,315 - Hamamoto , et al. August 1, 2 | 2017-08-01 |
Mask Blank Substrate, Substrate With Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, Method Of Manufacturing Mask Blank Substrate, Method Of Manufacturing Substrate With Reflective Film And Method Of Manufacturing Semiconductor Device
App 20170131629 - HAMAMOTO; Kazuhiro ; et al. | 2017-05-11 |
Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device
Grant 9,581,895 - Hamamoto , et al. February 28, 2 | 2017-02-28 |
Reflective Mask Blank, Reflective Mask, And Method For Manufacturing Semiconductor Device
App 20170038673 - IKEBE; Yohei ; et al. | 2017-02-09 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask Blank, Transmissive Mask, Reflective Mask, And Semiconductor Device Fabrication Method
App 20170023853 - HAMAMOTO; Kazuhiro ; et al. | 2017-01-26 |
Multilayer Reflective Film Formed Substrate, Reflective Mask Blank, Mask Blank, Methods Of Manufacturing The Same, Reflective Mask, And Mask
App 20170010525 - SHOKI; Tsutomu ; et al. | 2017-01-12 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask, And Semiconductor Device Fabrication Method
App 20170010527 - ORIHARA; Toshihiko ; et al. | 2017-01-12 |
Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device
Grant 9,535,318 - Hamamoto , et al. January 3, 2 | 2017-01-03 |
Method of manufacturing substrate with a multilayer reflective film, method of manufacturing a reflective mask blank, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing a semiconductor device
Grant 9,507,254 - Orihara , et al. November 29, 2 | 2016-11-29 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method
Grant 9,494,851 - Orihara , et al. November 15, 2 | 2016-11-15 |
Mask blank glass substrate, multilayer reflective film coated substrate, mask blank, mask, and methods of manufacturing the same
Grant 9,488,904 - Orihara , et al. November 8, 2 | 2016-11-08 |
Reflective Mask Blank And Method For Manufacturing Same, Method For Manufacturing Reflective Mask, And Method For Manufacturing Semiconductor Device
App 20160282711 - HAMAMOTO; Kazuhiro ; et al. | 2016-09-29 |
Multilayer reflective film formed substrate, reflective mask blank, mask blank, methods of manufacturing the same, reflective mask, and mask
Grant 9,423,685 - Shoki , et al. August 23, 2 | 2016-08-23 |
Reflective Mask Blank, Method Of Manufacturing Same, Reflective Mask And Method Of Manufacturing Semiconductor Device
App 20160238925 - HAMAMOTO; Kazuhiro ; et al. | 2016-08-18 |
Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device
Grant 9,377,679 - Hamamoto , et al. June 28, 2 | 2016-06-28 |
Reflective Mask Blank, Method Of Manufacturing Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Semiconductor Device
App 20160161837 - HAMAMOTO; Kazuhiro ; et al. | 2016-06-09 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
Grant 9,348,217 - Hamamoto , et al. May 24, 2 | 2016-05-24 |
Method for producing substrate with multilayer reflective film, method for producing reflective mask blank and method for producing reflective mask
Grant 9,323,141 - Shoki , et al. April 26, 2 | 2016-04-26 |
Method For Producing Substrate With Multilayer Reflective Film, Method For Producing Reflective Mask Blank And Method For Producing Reflective Mask
App 20160077423 - SHOKI; Tsutomu ; et al. | 2016-03-17 |
Mask Blank Glass Substrate, Multilayer Reflective Film Coated Substrate, Mask Blank, Mask, And Methods Of Manufacturing The Same
App 20160041462 - ORIHARA; Toshihiko ; et al. | 2016-02-11 |
Method For Manufacturing Reflective Mask Blank, And Method For Manufacturing Reflective Mask
App 20160004153 - SHOKI; Tsutomu ; et al. | 2016-01-07 |
Method for producing substrate with multilayer reflective film, method for producing reflective mask blank and method for producing reflective mask
Grant 9,229,316 - Shoki , et al. January 5, 2 | 2016-01-05 |
Mask blank glass substrate, multilayer reflective film coated substrate, mask blank, mask, and methods of manufacturing the same
Grant 9,195,131 - Orihara , et al. November 24, 2 | 2015-11-24 |
Mask Blank Substrate, Substrate With Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, Method Of Manufacturing Mask Blank Substrate, Method Of Manufacturing Substrate With Reflective Film And Method Of Manufacturing Semiconductor Device
App 20150331312 - HAMAMOTO; Kazuhiro ; et al. | 2015-11-19 |
Reflective Mask Blank And Method For Manufacturing Same, Method For Manufacturing Reflective Mask, And Method For Manufacturing Semiconductor Device
App 20150301441 - HAMAMOTO; Kazuhiro ; et al. | 2015-10-22 |
Method Of Manufacturing Substrate With A Multilayer Reflective Film, Method Of Manufacturing A Reflective Mask Blank, Substrate With A Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask And Method Of Manufacturing A Semiconductor Device
App 20150205196 - Orihara; Toshihiko ; et al. | 2015-07-23 |
Method For Producing Substrate With Multilayer Reflective Film, Method For Producing Reflective Mask Blank And Method For Producing Reflective Mask
App 20150079501 - Shoki; Tsutomu ; et al. | 2015-03-19 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask, And Semiconductor Device Fabrication Method
App 20150017574 - Orihara; Toshihiko ; et al. | 2015-01-15 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask Blank, Transmissive Mask, Reflective Mask, And Semiconductor Device Fabrication Method
App 20140329174 - Hamamoto; Kazuhiro ; et al. | 2014-11-06 |
Multilayer Reflective Film Formed Substrate, Reflective Mask Blank, Mask Blank, Methods Of Manufacturing The Same, Reflective Mask, And Mask
App 20140302429 - Shoki; Tsutomu ; et al. | 2014-10-09 |
Method Of Cleaning Substrate
App 20140230848 - YAMAUCHI; Kazuto ; et al. | 2014-08-21 |
Method of cleaning substrate
Grant 8,748,062 - Yamauchi , et al. June 10, 2 | 2014-06-10 |
Multilayer reflective film coated substrate for a reflective mask, reflective mask blank, and methods of manufacturing the same
Grant 8,512,918 - Shoki August 20, 2 | 2013-08-20 |
Mask Blank Glass Substrate, Multilayer Reflective Film Coated Substrate, Mask Blank, Mask, And Methods Of Manufacturing The Same
App 20130078555 - ORIHARA; Toshihiko ; et al. | 2013-03-28 |
Multilayer reflective film coated substrate, reflective mask blank, and method of manufacturing a reflective mask
Grant 8,399,160 - Shoki March 19, 2 | 2013-03-19 |
Reflective mask, reflective mask blank and method of manufacturing reflective mask
Grant 8,372,564 - Shoki February 12, 2 | 2013-02-12 |
Reflective mask blank, reflective mask, and method of manufacturing the same
Grant 8,367,279 - Shoki February 5, 2 | 2013-02-05 |
Method Of Cleaning Substrate
App 20120276474 - YAMAUCHI; Kazuto ; et al. | 2012-11-01 |
Multilayer Reflective Film Coated Substrate For A Reflective Mask, Reflective Mask Blank, And Methods Of Manufacturing The Same
App 20120019916 - Shoki; Tsutomu | 2012-01-26 |
Multilayer Reflective Film Coated Substrate, Reflective Mask Blank, And Method Of Manufacturing A Reflective Mask
App 20110217634 - Shoki; Tsutomu | 2011-09-08 |
Reflective mask blank, reflective mask and methods of producing the mask blank and the mask
Grant 7,981,573 - Ishibashi , et al. July 19, 2 | 2011-07-19 |
Reflective mask blank for exposure, reflective mask for exposure, method of producing a semiconductor device, and substrate provided with multilayer reflective film
Grant 7,910,264 - Shoki March 22, 2 | 2011-03-22 |
Reflective Mask, Reflective Mask Blank And Method Of Manufacturing Reflective Mask
App 20110059391 - Shoki; Tsutomu | 2011-03-10 |
Reflective Mask Blank, Reflective Mask, And Method Of Manufacturing The Same
App 20110027703 - Shoki; Tsutomu | 2011-02-03 |
Reflective mask blank, reflective mask, and method of manufacturing semiconductor device
Grant 7,700,245 - Hosoya , et al. April 20, 2 | 2010-04-20 |
Reflective Mask Blank For Exposure, Reflective Mask For Exposure, Method Of Producing A Semiconductor Device, And Substrate Provided With Multilayer Reflective Film
App 20090017387 - SHOKI; Tsutomu | 2009-01-15 |
Reflective Mask Blank, Reflective Mask and Methods of Producing the Mask Blank and the Mask
App 20080248409 - Ishibashi; Shinichi ; et al. | 2008-10-09 |
Reflection type mask blank and reflection type mask and production methods for them
Grant 7,390,596 - Ishibashi , et al. June 24, 2 | 2008-06-24 |
Method of producing a reflection mask blank, method of producing a reflection mask, and method of producing a semiconductor device
Grant 7,314,688 - Shoki January 1, 2 | 2008-01-01 |
Reflective mask blank, reflective mask, and method of manufacturing semiconductor device
App 20070275308 - Hosoya; Morio ; et al. | 2007-11-29 |
Method of producing a reflective mask and method of producing a semiconductor device
Grant 7,294,438 - Shoki November 13, 2 | 2007-11-13 |
X-ray mask blank and x-ray mask
Grant 7,261,980 - Shoki August 28, 2 | 2007-08-28 |
Method of manufacturing a reflection type mask blank and method of manufacturing a reflection type mask
Grant 7,056,627 - Shoki , et al. June 6, 2 | 2006-06-06 |
Reflective-type mask blank for exposure, method of producing the same, and reflective-type mask for exposure
Grant 6,960,412 - Shoki November 1, 2 | 2005-11-01 |
Substrate with a multilayer reflection film, reflection type mask blank for exposure, reflection type mask for exposure and methods of manufacturing them
App 20050238922 - Kinoshita, Takeru ; et al. | 2005-10-27 |
Reflection type mask blank and reflection type mask and production methods for them
App 20050208389 - Ishibashi, Shinichi ; et al. | 2005-09-22 |
Method of manufacturing a reflection type mask blank and method of manufacturing a reflection type mask
App 20050100797 - Shoki, Tsutomu ; et al. | 2005-05-12 |
Method of producing a reflection type mask blank, method of producing a reflection type mask, and method of producing a semiconductor device
App 20040224526 - Shoki, Tsutomu | 2004-11-11 |
Method of producing a reflective mask and method of producing a semiconductor device
App 20040196579 - Shoki, Tsutomu | 2004-10-07 |
Reflective-type mask blank for exposure, method of producing the same, and reflective-type mask for exposure
Grant 6,797,368 - Shoki September 28, 2 | 2004-09-28 |
Reflection type mask blank for EUV exposure and reflection type mask for EUV exposure as well as method of producing the mask
Grant 6,749,973 - Shoki , et al. June 15, 2 | 2004-06-15 |
Substrate with multilayer film, reflection type mask blank for exposure, reflection type mask for exposure and production method thereof as well as production method of semiconductor device
Grant 6,737,201 - Shoki , et al. May 18, 2 | 2004-05-18 |
Reflective-type mask blank for exposure, method of producing the same, and reflective-type mask for exposure
App 20030162104 - Shoki, Tsutomu | 2003-08-28 |
Reflective-type mask blank for exposure, method of producing the same, and reflective-type mask for exposure
App 20030162005 - Shoki, Tsutomu | 2003-08-28 |
Reflection type mask blank for EUV exposure and reflection type mask for EUV exposure as well as method of producing the mask
App 20020110743 - Shoki, Tsutomu ; et al. | 2002-08-15 |
Substrate with multilayer film, reflection type mask blank for exposure, reflection type mask for exposure and production method thereof as well as production method of semiconductor device
App 20020076625 - Shoki, Tsutomu ; et al. | 2002-06-20 |
X-ray mask blank, x-ray mask, and pattern transfer method
Grant 6,128,363 - Shoki , et al. October 3, 2 | 2000-10-03 |
X-ray membrane for x-ray mask, x-ray mask blank, x-ray mask, manufacturing method thereof and method of polishing silicon carbide film
Grant 6,127,068 - Shoki , et al. October 3, 2 | 2000-10-03 |
X-ray mask blank and method of manufacturing the same
Grant 5,958,627 - Shoki September 28, 1 | 1999-09-28 |
| 