| Patent | Date |
|---|
Methods And Apparatus For Processing A Substrate
App 20220130642 - KAWASAKI; Katsumasa ; et al. | 2022-04-28 |
Electrostatic chuck assembly having a dielectric filler
Grant 10,930,540 - Ramaswamy , et al. February 23, 2 | 2021-02-23 |
Apparatus For Reduction Or Prevention Of Arcing In A Substrate Support
App 20200411355 - NOORBAKHSH; Hamid ; et al. | 2020-12-31 |
Feedforward temperature control for plasma processing apparatus
Grant 10,854,425 - Mahadeswaraswamy , et al. December 1, 2 | 2020-12-01 |
Radio frequency (RF) pulsing impedance tuning with multiplier mode
Grant 10,854,427 - Kawasaki , et al. December 1, 2 | 2020-12-01 |
Method and apparatus for de-chucking a workpiece using a swing voltage sequence
Grant 10,784,132 - Wang , et al. Sept | 2020-09-22 |
Showerhead with reduced backside plasma ignition
Grant 10,745,807 - Wang , et al. A | 2020-08-18 |
Radio Frequency (rf) Pulsing Impedance Tuning With Multiplier Mode
App 20200075290 - KAWASAKI; KATSUMASA ; et al. | 2020-03-05 |
Electrostatic Chuck Assembly Having A Dielectric Filler
App 20200066566 - Ramaswamy; Kartik ; et al. | 2020-02-27 |
Substrate Carrier Using A Proportional Thermal Fluid Delivery System
App 20200051839 - Criminale; Phillip ; et al. | 2020-02-13 |
Electrostatic chuck assembly having a dielectric filler
Grant 10,504,765 - Ramaswamy , et al. Dec | 2019-12-10 |
Substrate carrier using a proportional thermal fluid delivery system
Grant 10,490,429 - Criminale , et al. Nov | 2019-11-26 |
Showerhead With Reduced Backside Plasma Ignition
App 20190271082 - WANG; Haitao ; et al. | 2019-09-05 |
Showerhead with reduced backside plasma ignition
Grant 10,378,108 - Wang , et al. A | 2019-08-13 |
Method And Apparatus For De-chucking A Workpiece Using A Swing Voltage Sequence
App 20190189481 - Wang; Haitao ; et al. | 2019-06-20 |
Method and apparatus for de-chucking a workpiece using a swing voltage sequence
Grant 10,242,893 - Wang , et al. | 2019-03-26 |
Method And Apparatus For De-chucking A Workpiece Using A Swing Voltage Sequence
App 20180366359 - Wang; Haitao ; et al. | 2018-12-20 |
Electrostatic Chuck Assembly Having A Dielectric Filler
App 20180308736 - Ramaswamy; Kartik ; et al. | 2018-10-25 |
Recursive Pumping For Symmetrical Gas Exhaust To Control Critical Dimension Uniformity In Plasma Reactors
App 20180142354 - SHOJI; Sergio Fukuda ; et al. | 2018-05-24 |
Recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors
Grant 9,909,213 - Shoji , et al. March 6, 2 | 2018-03-06 |
RF power delivery with approximated saw tooth wave pulsing
Grant 9,788,405 - Kawasaki , et al. October 10, 2 | 2017-10-10 |
Showerhead With Reduced Backside Plasma Ignition
App 20170101713 - WANG; Haitao ; et al. | 2017-04-13 |
Rf Power Delivery With Approximated Saw Tooth Wave Pulsing
App 20170099722 - KAWASAKI; KATSUMASA ; et al. | 2017-04-06 |
Feedforward Temperature Control For Plasma Processing Apparatus
App 20160155612 - MAHADESWARASWAMY; Chetan ; et al. | 2016-06-02 |
Substrate Carrier Using A Proportional Thermal Fluid Delivery System
App 20160148822 - Criminale; Phillip ; et al. | 2016-05-26 |
Feedforward temperature control for plasma processing apparatus
Grant 9,338,871 - Mahadeswaraswamy , et al. May 10, 2 | 2016-05-10 |
Methods for etching materials using synchronized RF pulses
Grant 9,269,587 - Shimizu , et al. February 23, 2 | 2016-02-23 |
Methods For Etching Materials Using Synchronized Rf Pulses
App 20150072530 - KIM; Jong Mun ; et al. | 2015-03-12 |
Synchronized radio frequency pulsing for plasma etching
Grant 8,962,488 - Liao , et al. February 24, 2 | 2015-02-24 |
Recursive Pumping For Symmetrical Gas Exhaust To Control Critical Dimension Uniformity In Plasma Reactors
App 20150041061 - SHOJI; Sergio Fukuda ; et al. | 2015-02-12 |
Etch Process Having Adaptive Control With Etch Depth Of Pressure And Power
App 20140342570 - Doan; Kenny Linh ; et al. | 2014-11-20 |
Automated Algorithm For Tuning Of Feedforward Control Parameters In Plasma Processing System
App 20140224767 - MERRY; Walter R. ; et al. | 2014-08-14 |
Synchronized Radio Frequency Pulsing For Plasma Etching
App 20130213935 - LIAO; BRYAN ; et al. | 2013-08-22 |
Synchronized radio frequency pulsing for plasma etching
Grant 8,404,598 - Liao , et al. March 26, 2 | 2013-03-26 |
Feedforward Temperature Control For Plasma Processing Apparatus
App 20110186545 - MAHADESWARASWAMY; Chetan ; et al. | 2011-08-04 |
Synchronized Radio Frequency Pulsing For Plasma Etching
App 20110031216 - LIAO; BRYAN ; et al. | 2011-02-10 |
Method and apparatus for operating an electrostatic chuck in a semiconductor substrate processing system
Grant 6,898,065 - Mays , et al. May 24, 2 | 2005-05-24 |
Method for performing real time arcing detection
App 20040031699 - Shoji, Sergio Fukuda | 2004-02-19 |
Method and apparatus for operating an electrostatic chuck in a semiconductor substrate processing system
App 20040016405 - Mays, Brad ; et al. | 2004-01-29 |
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