Shoda; Naohiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shoda; Naohiro.The latest application filed is for "methods and apparatus for dielectric deposition".

Company Profile

0.8.4

Shoda; Naohiro - Los Gatos CA
Shoda; Naohiro - Wappinger Falls NY
SHODA, NAOHIRO - WAPPINGERS FALLS NY
Shoda; Naohiro - Manassas VA
Shoda; Naohiro - Gainsville VA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Conformal film deposition for gapfill Grant 9,355,886 - Swaminathan , et al. May 31, 2	2016-05-31
Methods And Apparatus For Dielectric Deposition App 20140302689 - Ashtiani; Kaihan ; et al.	2014-10-09
Gap fill integration Grant 8,728,958 - Ashtiani , et al. May 20, 2	2014-05-20
Conformal Film Deposition For Gapfill App 20140134827 - Swaminathan; Shankar ; et al.	2014-05-15
Novel Gap Fill Integration App 20110151678 - Ashtiani; Kaihan ; et al.	2011-06-23
Semiconductor workpiece processing apparatus and method Grant 6,406,545 - Shoda , et al. June 18, 2	2002-06-18
Semiconductor Workpiece Processing Apparatus And Method App 20010008172 - SHODA, NAOHIRO ; et al.	2001-07-19
Method of manufacturing a shallow trench isolation structure for a semiconductor device Grant 6,150,072 - Shoda , et al. November 21, 2	2000-11-21
Semiconductor wafer temperature measurement and control thereof using gas temperature measurement Grant 5,937,541 - Weigand , et al. August 17, 1	1999-08-17
Method for forming studs and interconnects in a multi-layered semiconductor device Grant 5,689,140 - Shoda November 18, 1	1997-11-18
Method of forming studs and interconnects in a multi-layered semiconductor device Grant 5,529,953 - Shoda June 25, 1	1996-06-25

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