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Measurement tool monitoring using fleet measurement precision and tool matching precision analysis Grant 8,467,993 - Archie , et al. June 18, 2 | 2013-06-18 |
Specimen handling apparatus Grant 8,347,741 - Hatzistergos , et al. January 8, 2 | 2013-01-08 |
Alignment of wafers for 3D integration Grant 8,299,584 - Shneyder , et al. October 30, 2 | 2012-10-30 |
Specimen Handling Apparatus App 20110290039 - Hatzistergos; Michael ;   et al. | 2011-12-01 |
Alignment Of Wafers For 3d Integration App 20110215442 - Shneyder; Dmitriy ;   et al. | 2011-09-08 |
Measurement Tool Monitoring Using Fleet Measurement Precision and Tool Matching Precision Analysis App 20110172958 - Archie; Charles ;   et al. | 2011-07-14 |
Real Time WIP Optimizer App 20110166683 - Vazquez; Vincent ;   et al. | 2011-07-07 |
Reducing contamination in immersion lithography Grant 7,869,002 - Shneyder , et al. January 11, 2 | 2011-01-11 |
Immersion lithography contamination gettering layer Grant 7,807,335 - Corliss , et al. October 5, 2 | 2010-10-05 |
Apparatus and method for reducing contamination in immersion lithography Grant 7,787,101 - Bezama , et al. August 31, 2 | 2010-08-31 |
Reducing contamination in immersion lithography Grant 7,782,445 - Shneyder , et al. August 24, 2 | 2010-08-24 |
Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solvent Grant 7,645,694 - Colburn , et al. January 12, 2 | 2010-01-12 |
Scanning probe apparatus with in-situ measurement probe tip cleaning capability Grant 7,569,112 - Zhou , et al. August 4, 2 | 2009-08-04 |
Determining root cause for alarm in processing system Grant 7,535,349 - Shneyder , et al. May 19, 2 | 2009-05-19 |
Reducing Contamination In Immersion Lithography App 20080284993 - Shneyder; Dmitriy ;   et al. | 2008-11-20 |
Reducing Contamination In Immersion Lithography App 20080284994 - Shneyder; Dmitriy ;   et al. | 2008-11-20 |
Apparatus and method for reducing contamination in immersion lithography Grant 7,446,859 - Shneyder , et al. November 4, 2 | 2008-11-04 |
DEVELOPMENT OR REMOVAL OF BLOCK COPOLYMER OR PMMA-b-S-BASED RESIST USING POLAR SUPERCRITICAL SOLVENT App 20080248655 - Colburn; Matthew E. ;   et al. | 2008-10-09 |
Scanning Probe Apparatus With In-situ Measurement Probe Tip Cleaning Capability App 20080223118 - Zhou; Lin ;   et al. | 2008-09-18 |
Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solvent Grant 7,407,554 - Colburn , et al. August 5, 2 | 2008-08-05 |
Determining Root Cause For Alarm In Processing System App 20080140225 - Shneyder; Dmitriy ;   et al. | 2008-06-12 |
Apparatus And Method For Reducing Contamination In Immersion Lithography App 20070188731 - Bezama; Raschid J. ;   et al. | 2007-08-16 |
Apparatus And Method For Reducing Contamination In Immersion Lithography App 20070177124 - Shneyder; Dmitriy ;   et al. | 2007-08-02 |
Immersion lithography contamination gettering layer App 20060275706 - Corliss; Daniel A. ;   et al. | 2006-12-07 |
DEVELOPMENT OR REMOVAL OF BLOCK COPOLYMER OR PMMA-b-S-BASED RESIST USING POLAR SUPERCRITICAL SOLVENT App 20060228653 - Colburn; Matthew E. ;   et al. | 2006-10-12 |