SHMURUN; Inna

Patent Applications and Registrations

Patent applications and USPTO patent grants for SHMURUN; Inna.The latest application filed is for "method and apparatus for cleaning a cvd chamber".

Company Profile

0.13.16

SHMURUN; Inna - Foster City CA
Shmurun; Inna - San Mateo CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method And Apparatus For Cleaning A Cvd Chamber App 20170121813 - ZHAO; Maosheng ; et al.	2017-05-04
Method And Apparatus For Cleaning A Cvd Chamber App 20140158048 - ZHAO; Maosheng ; et al.	2014-06-12
Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections Grant 8,597,011 - Kaszuba , et al. December 3, 2	2013-12-03
Apparatus And Method For Exposing A Substrate To Uv Radiation Using A Reflector Having Both Elliptical And Parabolic Reflective Sections App 20120003398 - Kaszuba; Andrzei ; et al.	2012-01-05
Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections Grant 7,909,595 - Kaszuba , et al. March 22, 2	2011-03-22
Method And Apparatus For Cleaning A Cvd Chamber App 20100095891 - Zhao; Maosheng ; et al.	2010-04-22
Method and apparatus for cleaning a CVD chamber Grant 7,654,224 - Zhao , et al. February 2, 2	2010-02-02
Heated gas box for PECVD applications Grant 7,628,863 - Sen , et al. December 8, 2	2009-12-08
Method And Apparatus For Cleaning A Cvd Chamber App 20090145360 - Zhao; Maosheng ; et al.	2009-06-11
Method and apparatus for cleaning a CVD chamber Grant 7,500,445 - Zhao , et al. March 10, 2	2009-03-10
Computer-readable medium that contains software for executing a method for cleaning a CVD chamber Grant 7,465,357 - Zhao , et al. December 16, 2	2008-12-16
Method for cleaning a CVD chamber Grant 7,464,717 - Zhao , et al. December 16, 2	2008-12-16
Apparatus And Method For Exposing A Substrate To Uv Radiation Using A Reflector Having Both Elliptical And Parabolic Reflective Sections App 20070228618 - Kaszuba; Andrzei ; et al.	2007-10-04
Heated gas box for PECVD applications App 20070107660 - Sen; Soovo ; et al.	2007-05-17
Method And Apparatus For Cleaning A Cvd Chamber App 20060231205 - Zhao; Maosheng ; et al.	2006-10-19
Method And Apparatus For Cleaning A Cvd Chamber App 20060225767 - Zhao; Maosheng ; et al.	2006-10-12
Heated gas box for PECVD applications App 20060027165 - Sen; Soovo ; et al.	2006-02-09
Heated gas distribution plate for a processing chamber Grant 6,946,033 - Tsuei , et al. September 20, 2	2005-09-20
Method and apparatus for cleaning a CVD chamber App 20040144490 - Zhao, Maosheng ; et al.	2004-07-29
Blocker plate bypass design to improve clean rate at the edge of the chamber App 20040118519 - Sen, Soovo ; et al.	2004-06-24
Heated gas distribution plate for a processing chamber App 20040050492 - Tsuei, Lun ; et al.	2004-03-18
Methods for operating a chemical vapor deposition chamber using a heated gas distribution plate App 20040052969 - Lee, Ju-Hyung ; et al.	2004-03-18
Heater/lift assembly for high temperature processing chamber Grant 6,645,303 - Frankel , et al. November 11, 2	2003-11-11
Low profile thick film heaters in multi-slot bake chamber Grant 6,506,994 - Wang , et al. January 14, 2	2003-01-14
Low Profile Thick Film Heaters In Multi-slot Bake Chamber App 20020190051 - Wang, Yen-Kun Victor ; et al.	2002-12-19
Apparatus for distributing gases in a chemical vapor deposition system Grant 6,495,233 - Shmurun , et al. December 17, 2	2002-12-17
Heater/lift assembly for high temperature processing chamber App 20010054387 - Frankel, Jonathan ; et al.	2001-12-27
Lid assembly for high temperature processing chamber Grant 6,019,848 - Frankel , et al. February 1, 2	2000-02-01

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