Shklover; Vitaliy

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shklover; Vitaliy.The latest application filed is for "method for in-situ dynamic protection of a surface and optical assembly".

Company Profile

8.12.16

Shklover; Vitaliy - Heidenheim DE
Shklover; Vitaliy - Koenigsbronn DE
Shklover; Vitaliy - Konigsbronn DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Mirror, in particular for a microlithographic projection exposure system Grant 11,366,395 - Hild , et al. June 21, 2	2022-06-21
Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus Grant 11,328,831 - Grasse , et al. May 10, 2	2022-05-10
Method For In-situ Dynamic Protection Of A Surface And Optical Assembly App 20210341848 - SHKLOVER; Vitaliy ; et al.	2021-11-04
Method For In Situ Protection Of An Aluminum Layer And Optical Arrangement For The Vuv Wavelength Range App 20210293998 - SHKLOVER; Vitaliy	2021-09-23
Method For Forming Nanostructures On A Surface And Optical Element App 20210293996 - SHKLOVER; Vitaliy ; et al.	2021-09-23
Method for repairing reflective optical elements for EUV lithography Grant 11,099,484 - Meier , et al. August 24, 2	2021-08-24
Optical element, and method for correcting the wavefront effect of an optical element Grant 11,029,515 - Hild , et al. June 8, 2	2021-06-08
Mirror, In Particular For A Microlithographic Projection Exposure System App 20210055662 - HILD; Kerstin ; et al.	2021-02-25
Optical Element, And Method For Correcting The Wavefront Effect Of An Optical Element App 20200393673 - HILD; Kerstin ; et al.	2020-12-17
Reflective optical element for EUV lithography Grant 10,649,340 - Ehm , et al.	2020-05-12
Optical element Grant 10,642,167 - Shklover , et al.	2020-05-05
Optical grating and optical assembly for same Grant 10,578,783 - Brueck , et al.	2020-03-03
Method For Repairing Reflective Otpical Elements For Euv Lithography App 20190302628 - MEIER; Robert ; et al.	2019-10-03
Reflective Optical Element For Euv Lithography App 20190171108 - EHM; Dirk Heinrich ; et al.	2019-06-06
Optical Grating And Optical Assembly For Same App 20190137668 - BRUECK; Sebastian ; et al.	2019-05-09
Method For Treating A Reflective Optical Element For The Euv Wavelength Range, Method For Producing Same, And Treating Apparatus App 20190035512 - Grasse; Christian ; et al.	2019-01-31
Optical Element App 20180196362 - Shklover; Vitaliy ; et al.	2018-07-12
Optical element Grant 9,933,711 - Shklover , et al. April 3, 2	2018-04-03
Reflective optical element for grazing incidence in the EUV wavelength range Grant 9,703,209 - Shklover July 11, 2	2017-07-11
Reflective Optical Element For Grazing Incidence In The Euv Wavelength Range App 20150009480 - Shklover; Vitaliy	2015-01-08
Optical Element App 20140211181 - Shklover; Vitaliy ; et al.	2014-07-31
Optical system and method for shaping a profile of a laser beam Grant 7,944,615 - Shklover , et al. May 17, 2	2011-05-17
Optical devices and related systems and methods Grant 7,629,572 - Shklover , et al. December 8, 2	2009-12-08
Optical System And Method For Shaping A Profile Of Alaser Beam App 20090244712 - Shklover; Vitaliy ; et al.	2009-10-01
Optical System and Method for Shaping a Profile of a Laser Beam App 20090002833 - Shklover; Vitaliy ; et al.	2009-01-01
Systems and methods for generating laser light shaped as a line beam Grant 7,471,455 - Das , et al. December 30, 2	2008-12-30
Optical devices and related systems and methods App 20080272275 - Shklover; Vitaliy ; et al.	2008-11-06
Systems and methods for generating laser light shaped as a line beam App 20070097511 - Das; Palash P. ; et al.	2007-05-03

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