| Patent | Date |
|---|
Methods And Systems For Adaptive Pedestrian Inertial Navigation
App 20220042801 - WANG; Yusheng ; et al. | 2022-02-10 |
Fused Quartz Dual Shell Resonator And Method Of Fabrication
App 20200309527 - SHKEL; Andrei M. ; et al. | 2020-10-01 |
Fully balanced micro-machined inertial sensor
Grant 10,247,554 - Senkal , et al. | 2019-04-02 |
Axi-symmetric small-footprint gyroscope with interchangeable whole-angle and rate operation
Grant 10,180,323 - Senkal , et al. Ja | 2019-01-15 |
Utilization of mechanical quadrature in silicon MEMS vibratory gyroscope to increase and expand the long term in-run bias stability
Grant 10,036,652 - Zotov , et al. July 31, 2 | 2018-07-31 |
Method of fabricating micro-glassblown gyroscopes
Grant 9,702,728 - Shkel , et al. July 11, 2 | 2017-07-11 |
Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation
Grant 9,696,340 - Trusov , et al. July 4, 2 | 2017-07-04 |
Method Of Fabricating Micro-glassblown Gyroscopes
App 20170016742 - Shkel; Andrei M. ; et al. | 2017-01-19 |
Multi-Axis Chip-Scale MEMS Inertial Measurement Unit (IMU) Based on Frequency Modulation
App 20160169935 - Trusov; Alexander A. ; et al. | 2016-06-16 |
Method for batch fabrication of three-dimensional shells
Grant 9,296,133 - Shkel , et al. March 29, 2 | 2016-03-29 |
Fully Balanced Micro-machined Inertial Sensor
App 20160084654 - Senkal; Doruk ; et al. | 2016-03-24 |
Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation
Grant 9,274,136 - Trusov , et al. March 1, 2 | 2016-03-01 |
Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures
Grant 9,217,756 - Simon , et al. December 22, 2 | 2015-12-22 |
Axi-Symmetric Small-Footprint Gyroscope with Interchangeable Whole-Angle and Rate Operation
App 20150354959 - Senkal; Doruk ; et al. | 2015-12-10 |
Microfabrication of high quality three dimensional structures using wafer-level glassblowing of fused quartz and ultra low expansion glasses
Grant 9,139,417 - Trusov , et al. September 22, 2 | 2015-09-22 |
Lever Mechanisms For Anti-phase Mode Isolation In Mems Tuning-fork Structures
App 20140260615 - Simon; Brenton R. ; et al. | 2014-09-18 |
Multi-Axis Chip-Scale MEMS Inertial Measurement Unit (IMU) Based on Frequency Modulation
App 20140208823 - Trusov; Alexander A. ; et al. | 2014-07-31 |
Microfabrication of High Quality Three Dimensional Structures Using Wafer-Level Glassblowing of Fused Quartz and Ultra Low Expansion Glasses
App 20140021561 - Trusov; Alexander A. ; et al. | 2014-01-23 |
Three-dimensional wafer-scale batch-micromachined sensor and method of fabrication for the same
Grant 8,567,247 - Shkel , et al. October 29, 2 | 2013-10-29 |
Three-Dimensional Wafer-Scale Batch-Micromachined Sensor and Method of Fabrication for the Same
App 20130214461 - Shkel; Andrei M. ; et al. | 2013-08-22 |
Three dimensional folded MEMS technology for multi-axis sensor systems
Grant 8,368,154 - Trusov , et al. February 5, 2 | 2013-02-05 |
Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection
Grant 8,322,213 - Trusov , et al. December 4, 2 | 2012-12-04 |
Self-inflated micro-glass blowing
Grant 8,151,600 - Eklund , et al. April 10, 2 | 2012-04-10 |
Three Dimensional Folded Mems Technology For Multi-axis Sensor Systems
App 20120032286 - Trusov; Alexander ; et al. | 2012-02-09 |
Apparatus and method using capacitive detection with inherent self-calibration
Grant 8,094,841 - Trusov , et al. January 10, 2 | 2012-01-10 |
Three-dimensional Wafer-scale Batch-micromachined Sensor And Method Of Fabrication For The Same
App 20110239763 - Shkel; Andrei M. ; et al. | 2011-10-06 |
Single-mask fabrication process for linear and angular piezoresistive accelerometers
Grant 7,939,355 - Eklund , et al. May 10, 2 | 2011-05-10 |
Micromachined Tuning Fork Gyroscopes With Ultra-high Sensitivity And Shock Rejection
App 20100313657 - Trusov; Alexander A. ; et al. | 2010-12-16 |
Method and apparatus for wafer-level micro-glass-blowing
Grant 7,694,531 - Eklund , et al. April 13, 2 | 2010-04-13 |
Self-inflated Micro-glass Blowing
App 20080280124 - Eklund; Erik Jesper ; et al. | 2008-11-13 |
Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object
Grant 7,421,898 - Acar , et al. September 9, 2 | 2008-09-09 |
Apparatus And Method Using Capacitive Detection With Inherent Self-calibration
App 20080170742 - Trusov; Alexander A. ; et al. | 2008-07-17 |
Nonresonant micromachined gyroscopes with structural mode-decoupling
Grant 7,377,167 - Acar , et al. May 27, 2 | 2008-05-27 |
Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator
Grant 7,284,430 - Acar , et al. October 23, 2 | 2007-10-23 |
Post-release capacitance enhancement in micromachined devices and a method of performing the same
Grant 7,279,761 - Acar , et al. October 9, 2 | 2007-10-09 |
Assembly process for out-of-plane MEMS and three-axis sensors
App 20070087474 - Eklund; E. Jesper ; et al. | 2007-04-19 |
Method and apparatus for wafer-level micro-glass-blowing
App 20070071922 - Eklund; E. Jesper ; et al. | 2007-03-29 |
Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator
App 20070034005 - Acar; Cenk ; et al. | 2007-02-15 |
Distributed-mass micromachined gyroscopes operated with drive-mode bandwidth enhancement
Grant 7,100,446 - Acar , et al. September 5, 2 | 2006-09-05 |
Method of simultaneously and directly generating an angular position and angular velocity measurement in a micromachined gyroscope
Grant 7,040,164 - Painter , et al. May 9, 2 | 2006-05-09 |
Post-release capacitance enhancement in micromachined devices and a method of performing the same
App 20060054983 - Acar; Cenk ; et al. | 2006-03-16 |
Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object
App 20060032308 - Acar; Cenk ; et al. | 2006-02-16 |
Nonresonant micromachined gyroscopes with structural mode-decoupling
App 20050199061 - Acar, Cenk ; et al. | 2005-09-15 |
Multi stage control architecture for error suppression in micromachined gyroscopes
Grant 6,934,660 - Painter , et al. August 23, 2 | 2005-08-23 |
Dynamically amplified micromachined vibratory angle measuring gyroscopes, micromachined inertial sensors and method of operation for the same
Grant 6,928,874 - Painter , et al. August 16, 2 | 2005-08-16 |
Method of simultaneously and directly generating an angular position and angular velocity measurement in a micromachined gyroscope
App 20050150296 - Painter, Chris ; et al. | 2005-07-14 |
Non-resonant four degrees-of-freedom micromachined gyroscope
Grant 6,845,669 - Acar , et al. January 25, 2 | 2005-01-25 |
Multi stage control architecture for error suppression in micromachined gyroscopes
App 20040199347 - Painter, Christopher C. ; et al. | 2004-10-07 |
Non-resonant four degrees-of-freedom micromachined gyroscope
App 20040149035 - Acar, Cenk ; et al. | 2004-08-05 |
Dynamically amplified micromachined vibratory angle measuring gyroscopes, micromachined inertial sensors and method of operation for the same
App 20040123661 - Painter, Christopher C. ; et al. | 2004-07-01 |
Surface micromachining using a thick release process
Grant 6,531,332 - Shkel , et al. March 11, 2 | 2003-03-11 |
Micro-machined angle-measuring gyroscope
Grant 6,481,285 - Shkel , et al. November 19, 2 | 2002-11-19 |
Monolithic 2D optical switch and method of fabrication
Grant 6,430,333 - Little , et al. August 6, 2 | 2002-08-06 |
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