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Patent applications and USPTO patent grants for Shiu; Lin-Hung.The latest application filed is for "lithography method with surface modification layer".
Patent | Date |
---|---|
Lithography method with surface modification layer Grant 10,101,659 - Chen , et al. October 16, 2 | 2018-10-16 |
Lithography Method with Surface Modification Layer App 20180047561 - Chen; Shu-Fang ;   et al. | 2018-02-15 |
Hood for immersion lithography Grant 7,675,604 - Chen , et al. March 9, 2 | 2010-03-09 |
Exposure scan and step direction optimization Grant 7,666,576 - Liang , et al. February 23, 2 | 2010-02-23 |
Immersion Lithography Defect Reduction With Top Coater Removal App 20080020324 - SHIU; Lin-Hung ;   et al. | 2008-01-24 |
Exposure Scan And Step Direction Optimization App 20070285639 - LIANG; Fu-Jye ;   et al. | 2007-12-13 |
Hood For Immersion Lithography App 20070258060 - CHEN; Li-Jui ;   et al. | 2007-11-08 |
Vertical nanotube transistor and process for fabricating the same App 20040004235 - Lee, Chun-Tao ;   et al. | 2004-01-08 |
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