Shirley; Russel
Patent Applications and Registrations
Patent applications and USPTO patent grants for Shirley; Russel.The latest application filed is for "mask identification database server".
- Shirley; Russel - Pflugerville TX
| Patent | Date |
|---|---|
| Mask identification database server Grant 7,162,326 - Shirley , et al. January 9, 2 | 2007-01-09 |
| Management of move requests from a factory system to an automated material handling system Grant 6,985,794 - Conboy , et al. January 10, 2 | 2006-01-10 |
| Wafer rotation in wafer handling devices Grant 6,699,004 - Conboy , et al. March 2, 2 | 2004-03-02 |
| Wafer rotation randomization in cluster tool processing Grant 6,662,070 - Conboy , et al. December 9, 2 | 2003-12-09 |
| Management of move requests from a factory system to an automated material handling system Grant 6,662,076 - Conboy , et al. December 9, 2 | 2003-12-09 |
| Integrated wafer stocker and sorter with integrity verification system Grant 6,431,814 - Christensen , et al. August 13, 2 | 2002-08-13 |
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