| Patent | Date |
|---|
Methods and apparatus for adjusting surface topography of a substrate support apparatus
Grant 11,450,552 - Shirley September 20, 2 | 2022-09-20 |
Methods And Apparatus For Adjusting Surface Topography Of A Substrate Support Apparatus
App 20210035850 - Shirley; Paul D. | 2021-02-04 |
Methods of lithographically patterning a substrate
Grant 8,859,195 - Hishiro , et al. October 14, 2 | 2014-10-14 |
Methods of Lithographically Patterning a Substrate
App 20130059255 - Hishiro; Yoshiki ; et al. | 2013-03-07 |
Methods of lithographically patterning a substrate
Grant 8,309,297 - Hishiro , et al. November 13, 2 | 2012-11-13 |
Method of reducing photoresist defects during fabrication of a semiconductor device
Grant 8,163,468 - Hishiro , et al. April 24, 2 | 2012-04-24 |
Methods of patterning positive photoresist
Grant 8,124,326 - Shirley , et al. February 28, 2 | 2012-02-28 |
Methods Of Patterning Positive Photoresist
App 20100227282 - Shirley; Paul D. ; et al. | 2010-09-09 |
Systems and methods for manipulating liquid films on semiconductor substrates
Grant 7,737,055 - Shirley , et al. June 15, 2 | 2010-06-15 |
Method Of Reducing Photoresist Defects During Fabrication Of A Semiconductor Device
App 20090226847 - Hishiro; Yoshiki ; et al. | 2009-09-10 |
Methods of Lithographically Patterning a Substrate
App 20090092933 - Hishiro; Yoshiki ; et al. | 2009-04-09 |
Systems And Methods For Manipulating Liquid Films On Semiconductor Substrates
App 20090068848 - Shirley; Paul D. ; et al. | 2009-03-12 |
Systems and methods for manipulating liquid films on semiconductor substrates
Grant 7,470,638 - Shirley , et al. December 30, 2 | 2008-12-30 |
Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
Grant 7,370,659 - Hickman , et al. May 13, 2 | 2008-05-13 |
Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
Grant 7,361,234 - Hickman , et al. April 22, 2 | 2008-04-22 |
Systems and methods for manipulating liquid films on semiconductor substrates
App 20070197050 - Shirley; Paul D. ; et al. | 2007-08-23 |
Method for in situ photoresist thickness characterization
App 20070065575 - Shirley; Paul D. ; et al. | 2007-03-22 |
System for situ photoresist thickness characterizaton
App 20070056513 - Shirley; Paul D. ; et al. | 2007-03-15 |
Method and computer-readable medium for in situ photoresist thickness characterization
App 20070061035 - Shirley; Paul D. ; et al. | 2007-03-15 |
Method for in situ photoresist thickness characterization
App 20070026134 - Shirley; Paul D. ; et al. | 2007-02-01 |
Device and method for forming improved resist layer
App 20060263514 - Shirley; Paul D. | 2006-11-23 |
Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
App 20060201540 - Hickman; Craig A. ; et al. | 2006-09-14 |
Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
App 20060201535 - Hickman; Craig A. ; et al. | 2006-09-14 |
Device and method for forming improved resist layer
App 20050175775 - Shirley, Paul D. | 2005-08-11 |
Method, apparatus, system and computer-readable medium for in situ photoresist thickness characterization
App 20050148203 - Shirley, Paul D. ; et al. | 2005-07-07 |
Method and apparatus for controlling air over a spinning microelectronic substrate
Grant 6,872,254 - Shirley March 29, 2 | 2005-03-29 |
Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
App 20050028314 - Hickman, Craig A. ; et al. | 2005-02-10 |
Method and apparatus for controlling a temperature of a microelectronic substrate
Grant 6,830,619 - Shirley December 14, 2 | 2004-12-14 |
Method and apparatus for controlling air over a spinning microelectronic substrate
App 20030211232 - Shirley, Paul D. | 2003-11-13 |
Methods of photo-processing photoresist
Grant 6,645,703 - Hatab , et al. November 11, 2 | 2003-11-11 |
Method for controlling a temperature of a microelectronic substrate
Grant 6,548,111 - Shirley April 15, 2 | 2003-04-15 |
Substrate spinning apparatus
App 20020148404 - Gordon, Brian F. ; et al. | 2002-10-17 |
Reticle Forming Methods
App 20020136960 - HATAB, ZIAD R. ; et al. | 2002-09-26 |
Method and apparatus for controlling a temperature of a microelectronic substrate
App 20020002944 - Shirley, Paul D. | 2002-01-10 |
Apparatus for controlling a temperature of a microelectronics substrate
Grant 6,322,626 - Shirley November 27, 2 | 2001-11-27 |
Methods of photo-processing photoresist
App 20010038955 - Hatab, Ziad R. ; et al. | 2001-11-08 |
Substrate coating apparatus and semiconductor processing method of improving uniformity of liquid deposition
App 20010023137 - Gordon, Brian F. ; et al. | 2001-09-20 |
Method and apparatus for controlling air over a spinning microelectronic substrate
App 20010020443 - Shirley, Paul D. | 2001-09-13 |
Substrate Coating Apparatus And Semiconductor Processing Method Of Improving Uniformity Of Liquid Deposition
App 20010002339 - GORDON, BRIAN F. ; et al. | 2001-05-31 |
Vibration-enhanced spin-on film techniques for semiconductor device processing
Grant 5,925,410 - Akram , et al. July 20, 1 | 1999-07-20 |
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