SHIRASU; Hiroshi

Patent Applications and Registrations

Patent applications and USPTO patent grants for SHIRASU; Hiroshi.The latest application filed is for "movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method ".

Company Profile

4.38.19

SHIRASU; Hiroshi - Yokohama-shi JP
Shirasu; Hiroshi - Yokohama JP
SHIRASU; Hiroshi - Tokyo JP
Shirasu; Hiroshi - Kanagawa-ken JP
Shirasu; Hiroshi - Kanagawa JP
Shirasu; Hiroshi - Kawasaki JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Movable Body Apparatus, Pattern Forming Apparatus And Pattern Forming Method, Device Manufacturing Method, Manufacturing Method App 20200225589 - AOKI; Yasuo ; et al.	2020-07-16
Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method Grant 10,627,725 - Aoki , et al.	2020-04-21
Movable Body Apparatus, Pattern Forming Apparatus And Pattern Forming Method, Device Manufacturing Method, Manufacturing Method App 20190155176 - AOKI; Yasuo ; et al.	2019-05-23
Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method Grant 10,228,625 - Aoki , et al.	2019-03-12
Substrate Bonding Apparatus And Substrate Bonding Method App 20180308770 - SUGAYA; Isao ; et al.	2018-10-25
Substrate bonding apparatus, substrate holding apparatus, substrate bonding method, substrate holding method, multilayered semiconductor device, and multilayered substrate Grant 9,539,800 - Kito , et al. January 10, 2	2017-01-10
Movable Body Apparatus, Pattern Forming Apparatus And Pattern Forming Method, Device Manufacturing Method, Manufacturing Method Of Movable Body Apparatus, And Movable Body Drive Method App 20160259255 - AOKI; Yasuo ; et al.	2016-09-08
Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method Grant 9,366,974 - Aoki , et al. June 14, 2	2016-06-14
Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method Grant 8,704,431 - Shirasu , et al. April 22, 2	2014-04-22
Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing method Grant 8,699,001 - Aoki , et al. April 15, 2	2014-04-15
Substrate Bonding Apparatus, Substrate Holding Apparatus, Substrate Bonding Method, Substrate Holding Method, Multilayered Semiconductor Device, And Multilayered Substrate App 20140072774 - KITO; Yoshiaki ; et al.	2014-03-13
Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method Grant 8,531,093 - Shirasu , et al. September 10, 2	2013-09-10
Discharge Lamp, Light Source Apparatus, Exposure Apparatus, And Exposure Apparatus Manufacturing Method App 20120248960 - SHIRASU; Hiroshi ; et al.	2012-10-04
Vibration control apparatus, vibration control method, exposure apparatus, and device manufacturing method App 20110085152 - Nishino; Hideaki ; et al.	2011-04-14
Object Processing Apparatus, Exposure Apparatus And Exposure Method, And Device Manufacturing Method App 20110042874 - AOKI; Yasuo ; et al.	2011-02-24
Object Moving Apparatus, Object Processing Apparatus, Exposure Apparatus, Object Inspecting Apparatus And Device Manufacturing Method App 20110043784 - AOKI; Yasuo ; et al.	2011-02-24
Intermediate Vacuum Seal Assembly For Sealing A Chamber Housing To A Workpiece App 20100245795 - Hashemi; Fardad A. ; et al.	2010-09-30
Movable Body Apparatus, Pattern Forming Apparatus And Pattern Forming Method, Device Manufacturing Method, Manufacturing Method Of Movable Body Apparatus, And Movable Body Drive Method App 20100018950 - AOKI; Yasuo ; et al.	2010-01-28
Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method App 20080218049 - Shirasu; Hiroshi ; et al.	2008-09-11
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus App 20080192216 - Tanaka; Masashi ; et al.	2008-08-14
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus Grant 7,372,544 - Tanaka , et al. May 13, 2	2008-05-13
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus Grant 7,372,543 - Tanaka , et al. May 13, 2	2008-05-13
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus App 20070216885 - Tanaka; Masashi ; et al.	2007-09-20
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus App 20060238729 - Tanaka; Masashi ; et al.	2006-10-26
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus Grant 7,023,527 - Tanaka , et al. April 4, 2	2006-04-04
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus App 20050012917 - Tanaka, Masashi ; et al.	2005-01-20
Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice Grant 6,811,953 - Hatada , et al. November 2, 2	2004-11-02
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus Grant 6,795,169 - Tanaka , et al. September 21, 2	2004-09-21
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus App 20030137644 - Tanaka, Masashi ; et al.	2003-07-24
Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted Grant 6,556,278 - Tanaka , et al. April 29, 2	2003-04-29
Exposure apparatus and exposure method for transferring pattern onto a substrate Grant 6,351,305 - Tanaka , et al. February 26, 2	2002-02-26
Projection exposure apparatus App 20020021431 - Hamada, Tomohide ; et al.	2002-02-21
Exposure apparatus, method for manufacturing thereof, method for exposing and method for manufacturing microdevice App 20020005940 - Hatada, Hitoshi ; et al.	2002-01-17
Exposure apparatus Grant 6,266,131 - Hamada , et al. July 24, 2	2001-07-24
Exposure apparatus Grant 6,049,372 - Kato , et al. April 11, 2	2000-04-11
Projection exposure apparatus Grant 5,920,378 - Murakami , et al. July 6, 1	1999-07-06
Exposure apparatus Grant 5,798,822 - Miyazaki , et al. August 25, 1	1998-08-25
Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques Grant 5,774,240 - Goto , et al. June 30, 1	1998-06-30
Exposure apparatus with light shielding portion for plotosensitive elements Grant 5,760,881 - Miyazaki , et al. June 2, 1	1998-06-02
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus Grant 5,729,331 - Tanaka , et al. March 17, 1	1998-03-17
Scanning exposure apparatus Grant 5,715,037 - Saiki , et al. February 3, 1	1998-02-03
Exposure apparatus and method Grant 5,657,130 - Shirasu , et al. August 12, 1	1997-08-12
Exposure method and apparatus using holographic techniques Grant 5,504,596 - Goto , et al. April 2, 1	1996-04-02
Illumination optical apparatus Grant 4,939,630 - Kikuchi , et al. July 3, 1	1990-07-03
Aligning apparatus Grant 4,880,308 - Shirasu November 14, 1	1989-11-14
Laser processing apparatus Grant 4,769,523 - Tanimoto , et al. September 6, 1	1988-09-06
Machining apparatus with laser beam Grant 4,710,604 - Shirasu , et al. December 1, 1	1987-12-01
Photoelectric element array with automatic control of the charge storage time Grant 4,340,819 - Ogasawara , et al. July 20, 1	1982-07-20
Apparatus for detecting displacement of optical image Grant 4,339,665 - Utagawa , et al. July 13, 1	1982-07-13
Focus detecting apparatus Grant 4,336,450 - Utagawa , et al. June 22, 1	1982-06-22
Focus detecting device Grant 4,297,571 - Utagawa , et al. October 27, 1	1981-10-27
Light image space frequency component extracting device Grant 4,291,224 - Shirasu , et al. September 22, 1	1981-09-22
Focus detecting apparatus Grant 4,264,810 - Utagawa , et al. April 28, 1	1981-04-28

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