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Treatment liquid and pattern forming method
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Active-light-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Formation Method, Method For Manufacturing Electronic Device, Compound, And Resin
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Composition for forming upper layer film, pattern forming method, resist pattern, and method for manufacturing electronic device
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Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, Resist Film, And Method For Manufacturing Electronic Device
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Pattern forming method, method for manufacturing electronic device, laminate film, and composition for forming upper layer film
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Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
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Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
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Active Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
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Pattern Forming Method And Resist Laminate For Organic Solvent Development
App 20210200098 - NIHASHI; Wataru ; et al. | 2021-07-01 |
Negative Tone Photosensitive Composition For Euv Light, Pattern Forming Method, And Method For Manufacturing Electronic Device
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Photosensitive Composition For Euv Light, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210011377 - SHIRAKAWA; Michihiro ; et al. | 2021-01-14 |
Active-ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Formation Method, And Method For Manufacturing Electronic Device
App 20200401045 - ASAKAWA; Daisuke ; et al. | 2020-12-24 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20200393756 - KATO; Keita ; et al. | 2020-12-17 |
Pattern forming method, method for producing electronic device, and actinic ray-sensitive or radiation-sensitive resin composition for organic solvent development
Grant 10,859,914 - Hatakeyama , et al. December 8, 2 | 2020-12-08 |
Pattern forming method, resist pattern, method for manufacturing electronic device, and composition for forming upper layer film
Grant 10,852,637 - Inoue , et al. December 1, 2 | 2020-12-01 |
Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device
Grant 10,802,399 - Nishio , et al. October 13, 2 | 2020-10-13 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, Mask Blank With Resist Film, Method For Producing Photomask, And Method For Manufacturing Electronic Device
App 20200319551 - Tsuchimura; Tomotaka ; et al. | 2020-10-08 |
Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device
Grant 10761424 - | 2020-09-01 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturin
App 20200192220 - YAGI; Kazunari ; et al. | 2020-06-18 |
Pattern forming method, resist pattern, and process for producing electronic device
Grant 10,578,968 - Yamamoto , et al. | 2020-03-03 |
Photosensitive Composition For Euv Light, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20200050106 - SHIRAKAWA; Michihiro ; et al. | 2020-02-13 |
Treatment Liquid And Pattern Forming Method
App 20190258168 - KAMIMURA; Tetsuya ; et al. | 2019-08-22 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Actinic Ray-sensitive Or Radiation-sensitive Film, Pattern Formi
App 20190171104 - Takada; Akira ; et al. | 2019-06-06 |
Pattern forming method, treating agent, electronic device, and method for manufacturing the same
Grant 10,303,058 - Furutani , et al. | 2019-05-28 |
Active-light-sensitive or radiation-sensitive resin composition, active-light-sensitive or radiation-sensitive film and pattern forming method, each using composition, and method for manufacturing electronic device
Grant 10,261,417 - Goto , et al. | 2019-04-16 |
Pattern forming method, composition for forming protective film, method for manufacturing electronic device, and electronic device
Grant 10,175,578 - Inoue , et al. J | 2019-01-08 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20180364571 - NISHIO; Ryo ; et al. | 2018-12-20 |
Pattern forming method, resist pattern, and method for manufacturing electronic device
Grant 10,114,292 - Inoue , et al. October 30, 2 | 2018-10-30 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Actinic Ray-sensitive Or Radiation-sensitive Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20180292751 - ASAKAWA; Daisuke ; et al. | 2018-10-11 |
Pattern Forming Method, Method For Manufacturing Electronic Device, Laminate Film, And Composition For Forming Upper Layer Film
App 20180275518 - INOUE; Naoki ; et al. | 2018-09-27 |
Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device
Grant 10,025,186 - Goto , et al. July 17, 2 | 2018-07-17 |
Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device
Grant 10,018,913 - Goto , et al. July 10, 2 | 2018-07-10 |
Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device
Grant 9,996,003 - Goto , et al. June 12, 2 | 2018-06-12 |
Pattern Forming Method, Laminate, And Resist Composition For Organic Solvent Development
App 20180120706 - SHIRAKAWA; Michihiro ; et al. | 2018-05-03 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, method for manufacturing electronic device, and electronic device
Grant 9,952,509 - Kato , et al. April 24, 2 | 2018-04-24 |
Pattern Forming Method, Resist Pattern, Method For Manufacturing Electronic Device, And Composition For Forming Upper Layer Film
App 20180081277 - INOUE; Naoki ; et al. | 2018-03-22 |
Pattern Forming Method, Resist Pattern, Method For Manufacturing Electronic Device, And Composition For Forming Upper Layer Film
App 20180011406 - HATAKEYAMA; Naoya ; et al. | 2018-01-11 |
Composition For Forming Upper Layer Film, Pattern Forming Method, Resist Pattern, And Method For Manufacturing Electronic Device
App 20170371244 - HATAKEYAMA; Naoya ; et al. | 2017-12-28 |
Pattern Forming Method, Resist Pattern, Method For Manufacturing Electronic Device, And Electronic Device
App 20170349686 - INOUE; Naoki ; et al. | 2017-12-07 |
Composition For Forming Upper Layer Film, Pattern Forming Method Using The Same, And Method For Manufacturing Electronic Device
App 20170351179 - GOTO; Akiyoshi ; et al. | 2017-12-07 |
Pattern Forming Method, Method For Producing Electronic Device, And Actinic Ray-sensitive Or Radiation-sensitive Resin Composition For Organic Solvent Development
App 20170322490 - HATAKEYAMA; Naoya ; et al. | 2017-11-09 |
Pattern formation method, etching method, electronic device manufacturing method, and electronic device
Grant 9,810,981 - Ueba , et al. November 7, 2 | 2017-11-07 |
Active light sensitive or radiation sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device
Grant 9,791,777 - Goto , et al. October 17, 2 | 2017-10-17 |
Pattern Forming Method, Resist Pattern, And Process For Producing Electronic Device
App 20170199461 - YAMAMOTO; Kei ; et al. | 2017-07-13 |
Pattern Forming Method, Resist Pattern, And Method For Manufacturing Electronic Device
App 20170199460 - TANGO; Naohiro ; et al. | 2017-07-13 |
Pattern Forming Method, Resist Pattern, And Method For Manufacturing Electronic Device
App 20170184974 - INOUE; Naoki ; et al. | 2017-06-29 |
Pattern Forming Method, Composition For Forming Upper Layer Film, Resist Pattern, And Method For Manufacturing Electronic Device
App 20170184970 - GOTO; Akiyoshi ; et al. | 2017-06-29 |
Pattern Forming Method, Composition For Forming Protective Film, Method For Manufacturing Electronic Device, And Electronic Device
App 20170176862 - INOUE; Naoki ; et al. | 2017-06-22 |
Active-light-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20170168394 - GOTO; Akiyoshi ; et al. | 2017-06-15 |
Pattern Forming Method And Method For Manufacturing Electronic Device Using Same
App 20170146908 - SHIRAKAWA; Michihiro ; et al. | 2017-05-25 |
Pattern Forming Method And Method For Manufacturing Electronic Device Using Same
App 20170115571 - KATO; Keita ; et al. | 2017-04-27 |
Active-light-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20170115569 - GOTO; Akiyoshi ; et al. | 2017-04-27 |
Active-light-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20170115568 - GOTO; Akiyoshi ; et al. | 2017-04-27 |
Pattern Forming Method, Active Light Sensitive Or Radiation Sensitive Resin Composition, Active Light Sensitive Or Radiation Sensitive Film, Method For Manufacturing Electronic Device, And Electronic Device
App 20170059995 - FURUTANI; Hajime ; et al. | 2017-03-02 |
Active-light-sensitive Or Radiation-sensitive Resin Composition, Active-light-sensitive Or Radiation-sensitive Film And Pattern Forming Method, Each Using Composition, And Method For Manufacturing Electronic Device
App 20170038685 - GOTO; Akiyoshi ; et al. | 2017-02-09 |
Method of forming pattern, actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, process for manufacturing electronic device and electronic device
Grant 9,551,931 - Ito , et al. January 24, 2 | 2017-01-24 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device
Grant 9,523,913 - Kato , et al. December 20, 2 | 2016-12-20 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, electronic device and compound
Grant 9,523,912 - Kataoka , et al. December 20, 2 | 2016-12-20 |
Active Light Sensitive Or Radiation Sensitive Resin Composition, Pattern Forming Method, Method For Manufacturing Electronic Device, And Electronic Device
App 20160347897 - GOTO; Akiyoshi ; et al. | 2016-12-01 |
Active Light Sensitive Or Radiation Sensitive Resin Composition, Pattern Forming Method, Method For Manufacturing Electronic Device, And Electronic Device
App 20160349613 - GOTO; Akiyoshi ; et al. | 2016-12-01 |
Pattern Formation Method, Etching Method, Electronic Device Manufacturing Method, And Electronic Device
App 20160342083 - UEBA; Ryosuke ; et al. | 2016-11-24 |
Pattern Forming Method, Treating Agent, Electronic Device, And Method For Manufacturing The Same
App 20160327866 - FURUTANI; Hajime ; et al. | 2016-11-10 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device and electronic device
Grant 9,482,947 - Yamaguchi , et al. November 1, 2 | 2016-11-01 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Method For Manufacturing Electronic Device, And Electronic Device
App 20160313645 - KATO; Keita ; et al. | 2016-10-27 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device and electronic device
Grant 9,423,689 - Yamaguchi , et al. August 23, 2 | 2016-08-23 |
Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device
Grant 9,417,528 - Shirakawa , et al. August 16, 2 | 2016-08-16 |
Active Lightray-sensitive Or Radiation-sensitive Resin Composition And Pattern Forming Method
App 20160223905 - OU; Keiyu ; et al. | 2016-08-04 |
Pattern Formation Method, Electronic-device Production Method, And Processing Agent
App 20160195814 - ENOMOTO; Yuichiro ; et al. | 2016-07-07 |
Pattern forming method, actinic-ray-sensitive or radiation-sensitive resin composition, and resist film
Grant 9,316,910 - Kataoka , et al. April 19, 2 | 2016-04-19 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Manufacturing Method Of Electronic Device, Electronic Device And Compound
App 20160070167 - KATAOKA; Shohei ; et al. | 2016-03-10 |
Pattern-forming Method, Electronic Device And Method For Producing Same, And Developing Fluid
App 20160048082 - KOJIMA; Masafumi ; et al. | 2016-02-18 |
Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device
Grant 9,250,532 - Kato , et al. February 2, 2 | 2016-02-02 |
Method Of Forming Pattern, Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film, Process For Manufacturing Electronic Device And Electronic Device
App 20160004157 - ITO; Junichi ; et al. | 2016-01-07 |
Pattern Forming Method, Compound Used Therein, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Manufacturing Method Of Electronic Device, And Electronic Device
App 20150331314 - YAMAGUCHI; Shuhei ; et al. | 2015-11-19 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Method For Forming Pattern, Resist Film, Method For Manufacturing Electronic Device, And Electronic Device
App 20150253662 - KATO; Keita ; et al. | 2015-09-10 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device
Grant 9,128,376 - Kato , et al. September 8, 2 | 2015-09-08 |
Pattern Forming Method, Multi-layered Resist Pattern, Multi-layered Film For Organic Solvent Development, Resist Composition, Method For Manufacturing Electronic Device, And Electronic Device
App 20150248056 - SHIRAKAWA; Michihiro ; et al. | 2015-09-03 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for preparing electronic device, and electronic device
Grant 9,120,288 - Takahashi , et al. September 1, 2 | 2015-09-01 |
Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device
Grant 9,075,310 - Shirakawa , et al. July 7, 2 | 2015-07-07 |
Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method using the same, polymerizable compound and polymer compound obtained by polymerizing the polymerizable compound
Grant 9,046,773 - Yamaguchi , et al. June 2, 2 | 2015-06-02 |
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using same
Grant 9,046,766 - Kato , et al. June 2, 2 | 2015-06-02 |
Method Of Forming Pattern And Actinic-ray- Or Radiation-sensitive Resin Composition For Use In The Method
App 20150111157 - KATO; Keita ; et al. | 2015-04-23 |
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same
Grant 8,846,290 - Tango , et al. September 30, 2 | 2014-09-30 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Method For Manufacturing Electronic Device, And Electronic Device
App 20140248556 - KATO; Keita ; et al. | 2014-09-04 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Actinic Ray-sensitive Or Radiation-sensitive Film, Manufacturing Method Of Electronic Device, And Electronic Device
App 20140234762 - YAMAGUCHI; Shuhei ; et al. | 2014-08-21 |
Pattern Forming Method, Multi-layered Resist Pattern, Multi-layered Film For Organic Solvent Development, Resist Composition, Method For Manufacturing Electronic Device, And Electronic Device
App 20140234761 - SHIRAKAWA; Michihiro ; et al. | 2014-08-21 |
Pattern Forming Method, Multi-layered Resist Pattern, Multi-layered Film For Organic Solvent Development, Manufacturing Method Of Electronic Device, And Electronic Device
App 20140227637 - KATO; Keita ; et al. | 2014-08-14 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Manufacturing Method Of Electronic Device And Electronic Device
App 20140141360 - YAMAGUCHI; Shuhei ; et al. | 2014-05-22 |
Pattern Forming Method, Multi-layered Resist Pattern, Multi-layered Film For Organic Solvent Development, Resist Composition, Method For Manufacturing Electronic Device, And Electronic Device
App 20140113223 - KATO; Keita ; et al. | 2014-04-24 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Method For Manufacturing Electronic Device, And Electronic Device
App 20140087310 - KATO; Keita ; et al. | 2014-03-27 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Manufacturing Method Of Electronic Device And Electronic Device
App 20140045117 - YAMAGUCHI; Shuhei ; et al. | 2014-02-13 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Resist Film
App 20140011134 - TAKAHASHI; Hidenori ; et al. | 2014-01-09 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Method For Preparing Electronic Device, And Electronic Device
App 20130078432 - TAKAHASHI; Hidenori ; et al. | 2013-03-28 |
Actinic-ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film Using The Same, Pattern Forming Method, Electronic Device Manufacturing Method, And Electronic Device, Each Using The Same
App 20130078433 - IWATO; Kaoru ; et al. | 2013-03-28 |
Pattern Forming Method, Actinic-ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film
App 20120219913 - KATAOKA; Shohei ; et al. | 2012-08-30 |
Photosensitive Composition And Pattern Forming Method Using Same
App 20120219910 - Shibuya; Akinori ; et al. | 2012-08-30 |
Actinic-ray- Or Radiation-sensitive Resin Composition And Method Of Forming A Pattern Using The Same
App 20120171618 - IIZUKA; Yusuke ; et al. | 2012-07-05 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film And Pattern Forming Method Using The Same
App 20120129100 - Shibuya; Akinori ; et al. | 2012-05-24 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Pattern Forming Method Using The Same
App 20120015302 - Tango; Naohiro ; et al. | 2012-01-19 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Pattern Forming Method Using Same
App 20100009288 - Kato; Takayuki ; et al. | 2010-01-14 |
Photosensitive Composition And Pattern Forming Method Using Same
App 20090325102 - SHIBUYA; Akinori ; et al. | 2009-12-31 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method Using The Same, Polymerizable Compound And Polymer Compound Obtained By Polymerizing The Polymerizable Compound
App 20090246695 - YAMAGUCHI; Shuhei ; et al. | 2009-10-01 |
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