Patent | Date |
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Chemical amplification resist composition, and mold preparation method and resist film using the same Grant 9,090,722 - Fujimori , et al. July 28, 2 | 2015-07-28 |
Negative resist composition and pattern forming method using the same Grant 9,034,560 - Shirakawa , et al. May 19, 2 | 2015-05-19 |
Actinic ray-sensitive or radiation-sensitive resin composition and method of forming pattern with the composition Grant 8,900,791 - Tsuchimura , et al. December 2, 2 | 2014-12-02 |
Negative Resist Composition And Pattern Forming Method Using The Same App 20140227642 - SHIRAKAWA; Koji ;   et al. | 2014-08-14 |
Negative resist pattern forming method, developer and negative chemical-amplification resist composition used therefor, and resist pattern Grant 8,637,222 - Tsuchihashi , et al. January 28, 2 | 2014-01-28 |
Organic solvent development or multiple development pattern-forming method using electron beams or EUV rays Grant 8,546,063 - Tsubaki , et al. October 1, 2 | 2013-10-01 |
Actinic-ray- Or Radiation-sensitive Resin Composition And Method Of Forming Pattern Using The Composition App 20120094235 - Tsuchihashi; Toru ;   et al. | 2012-04-19 |
Chemical Amplification Resist Composition, And Mold Preparation Method And Resist Film Using The Same App 20120006788 - Fujimori; Toru ;   et al. | 2012-01-12 |
Actinic-ray- Or Radiation-sensitive Resin Composition And Method Of Forming Pattern Using The Composition App 20120003585 - Tsubaki; Hideaki ;   et al. | 2012-01-05 |
Positive resist composition Grant 8,080,362 - Shirakawa , et al. December 20, 2 | 2011-12-20 |
Organic Solvent Development Or Multiple Development Pattern-forming Method Using Electron Beams Or Euv Rays App 20110300485 - Tsubaki; Hideaki ;   et al. | 2011-12-08 |
Negative Resist Pattern Forming Method, Developer And Negative Chemical-amplification Resist Composition Used Therefor, And Resist Pattern App 20110287234 - Tsuchihashi; Toru ;   et al. | 2011-11-24 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Method Of Forming Pattern With The Composition App 20110171577 - TSUCHIMURA; Tomotaka ;   et al. | 2011-07-14 |
Eyelash Curler App 20100224207 - Otsuka; Koji ;   et al. | 2010-09-09 |
Negative resist composition Grant 7,432,034 - Yasunami , et al. October 7, 2 | 2008-10-07 |
Negative Resist Composition And Pattern Forming Method Using The Same App 20080241745 - Shirakawa; Koji ;   et al. | 2008-10-02 |
Positive Resist Composition App 20080096130 - Shirakawa; Koji ;   et al. | 2008-04-24 |
Positive resist composition Grant 7,361,446 - Shirakawa , et al. April 22, 2 | 2008-04-22 |
Positive resist composition and process for forming pattern using the same Grant 7,332,258 - Yasunami , et al. February 19, 2 | 2008-02-19 |
Positive working resist composition Grant 7,326,513 - Yasunami , et al. February 5, 2 | 2008-02-05 |
Positive resist composition and pattern forming method using the same App 20050277060 - Shirakawa, Koji ;   et al. | 2005-12-15 |
Negative-working resist composition for electron beams or x-rays Grant 6,887,647 - Yasunami , et al. May 3, 2 | 2005-05-03 |
Positive resist composition and process for forming pattern using the same App 20050064327 - Yasunami, Shoichiro ;   et al. | 2005-03-24 |
Positive resist composition App 20040197702 - Shirakawa, Koji ;   et al. | 2004-10-07 |
Positive working resist composition App 20040175654 - Yasunami, Shoichiro ;   et al. | 2004-09-09 |
Negative resist composition Grant 6,773,862 - Shirakawa , et al. August 10, 2 | 2004-08-10 |
Negative resist composition Grant 6,746,813 - Yasunami , et al. June 8, 2 | 2004-06-08 |
Positive resist composition to be irradiated with one of an electron beam and X-ray Grant 6,727,040 - Sasaki , et al. April 27, 2 | 2004-04-27 |
Resist composition App 20040053160 - Takahashi, Hyou ;   et al. | 2004-03-18 |
Negative resist composition App 20040033441 - Yasunami, Shoichiro ;   et al. | 2004-02-19 |
Negative-working resist composition Grant 6,673,512 - Uenishi , et al. January 6, 2 | 2004-01-06 |
Negative resist composition App 20030203305 - Yasunami, Shoichiro ;   et al. | 2003-10-30 |
Negative resist composition App 20030124456 - Shirakawa, Koji ;   et al. | 2003-07-03 |
Negative-working resist composition for electron beams or X-rays App 20020192592 - Yasunami, Shoichiro ;   et al. | 2002-12-19 |
Positive resist composition to be irradiated with one of an electron beam and X-ray App 20020136980 - Sasaki, Tomoya ;   et al. | 2002-09-26 |
Positive Resist Composition App 20020015916 - UENISHI, KAZUYA ;   et al. | 2002-02-07 |
Positive photoresist composition Grant 5,629,128 - Shirakawa , et al. May 13, 1 | 1997-05-13 |