Shiraiwa; Norio
Patent Applications and Registrations
Patent applications and USPTO patent grants for Shiraiwa; Norio.The latest application filed is for "electrostatic chuck and substrate fixing device".
- Shiraiwa; Norio - Nagano-shi JP
- Shiraiwa; Norio - Nagano N/A JP
| Patent | Date |
|---|---|
| Electrostatic Chuck And Substrate Fixing Device App 20220084866 - Shiraiwa; Norio ; et al. | 2022-03-17 |
| Electrostatic chuck and semiconductor/liquid crystal manufacturing equipment Grant 11,037,811 - Shiraiwa June 15, 2 | 2021-06-15 |
| Wafer holding apparatus and baseplate structure Grant 10,847,401 - Shiraiwa , et al. November 24, 2 | 2020-11-24 |
| Substrate fixture and substrate fixing device Grant 10,600,669 - Shiraiwa | 2020-03-24 |
| Electrostatic chuck device Grant 10,304,718 - Shiraiwa | 2019-05-28 |
| Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus Grant 10,147,628 - Shiraiwa , et al. De | 2018-12-04 |
| Substrate Fixture And Substrate Fixing Device App 20180247852 - Shiraiwa; Norio | 2018-08-30 |
| Wafer Holding Apparatus And Baseplate Structure App 20170372934 - SHIRAIWA; Norio ; et al. | 2017-12-28 |
| Tray and wafer holding apparatus Grant 9,837,297 - Tamagawa , et al. December 5, 2 | 2017-12-05 |
| Electrostatic chuck and method for manufacturing the electrostatic chuck Grant 9,660,557 - Shiraiwa , et al. May 23, 2 | 2017-05-23 |
| Electrostatic Chuck Device App 20170069519 - SHIRAIWA; NORIO | 2017-03-09 |
| Electrostatic chuck apparatus Grant 9,252,039 - Shiraiwa , et al. February 2, 2 | 2016-02-02 |
| Electrostatic chuck Grant 9,240,340 - Shiraiwa , et al. January 19, 2 | 2016-01-19 |
| Tray And Wafer Holding Apparatus App 20150371885 - TAMAGAWA; Koki ; et al. | 2015-12-24 |
| Electrostatic Chuck And Semiconductor-liquid Crystal Manufacturing Apparatus App 20150348814 - SHIRAIWA; Norio ; et al. | 2015-12-03 |
| Dielectric layer for electrostatic chuck and electrostatic chuck Grant 9,120,704 - Tsutsumi , et al. September 1, 2 | 2015-09-01 |
| Electrostatic Chuck Apparatus App 20140254061 - SHIRAIWA; Norio ; et al. | 2014-09-11 |
| Substrate temperature adjusting-fixing device Grant 8,724,289 - Shiraiwa , et al. May 13, 2 | 2014-05-13 |
| Dielectric Layer For Electrostatic Chuck And Electrostatic Chuck App 20140103612 - Tsutsumi; Kouta ; et al. | 2014-04-17 |
| Electrostatic Chuck And Method For Manufacturing The Electrostatic Chuck App 20130308244 - SHIRAIWA; Norio ; et al. | 2013-11-21 |
| Electrostatic Chuck App 20130286531 - Shiraiwa; Norio ; et al. | 2013-10-31 |
| Electrostatic Chuck And Semiconductor/liquid Crystal Manufacturing Equipment App 20130048217 - SHIRAIWA; Norio | 2013-02-28 |
| Substrate Temperature Adjusting-fixing Device App 20120287552 - SHIRAIWA; Norio ; et al. | 2012-11-15 |
| Electrostatic chuck and method of manufacturing the same Grant 8,023,246 - Shiraiwa , et al. September 20, 2 | 2011-09-20 |
| Electrostatic chuck Grant 7,483,256 - Shiraiwa , et al. January 27, 2 | 2009-01-27 |
| Electrostatic Chuck And Method Of Manufacturing The Same App 20080278883 - Shiraiwa; Norio ; et al. | 2008-11-13 |
| Electrostatic Chuck App 20080266747 - Shiraiwa; Norio ; et al. | 2008-10-30 |
| Electrostatic Chuck App 20080080118 - Shiraiwa; Norio ; et al. | 2008-04-03 |
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