Shiraishi; Naomasa

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shiraishi; Naomasa.The latest application filed is for "illumination optical apparatus and projection exposure apparatus".

Company Profile

0.87.50

Shiraishi; Naomasa - Saitama JP
SHIRAISHI; Naomasa - Saitama-shi JP
Shiraishi; Naomasa - Urawa JP
Shiraishi; Naomasa - Saitama-ken JP
Shiraishi; Naomasa - Urawa-shi JP
Shiraishi; Naomasa - Kawasaki JP
Shiraishi, Naomasa - Tokyo JP
Shiraishi; Naomasa - Chiyoda-ku JP
Shiraishi, Naomasa - Kawasaki-shi JP
Shiraishi; Naomasa - Kanagawa JP
Shiraishi; Naomasa - Kanagawa-ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Illumination optical apparatus and projection exposure apparatus Grant 9,760,014 - Shiraishi September 12, 2	2017-09-12
Illumination Optical Apparatus And Projection Exposure Apparatus App 20170227698 - SHIRAISHI; Naomasa	2017-08-10
Illumination optical apparatus and projection exposure apparatus Grant 9,423,698 - Shiraishi August 23, 2	2016-08-23
Illumination optical apparatus and projection exposure apparatus Grant 9,423,697 - Shiraishi August 23, 2	2016-08-23
Illumination optical apparatus and projection exposure apparatus Grant 9,244,359 - Shiraishi January 26, 2	2016-01-26
Illumination optical apparatus and projection exposure apparatus Grant 9,146,476 - Shiraishi September 29, 2	2015-09-29
Illumination optical apparatus and projection exposure apparatus Grant 9,140,992 - Shiraishi September 22, 2	2015-09-22
Illumination optical apparatus and projection exposure apparatus Grant 9,140,993 - Shiraishi September 22, 2	2015-09-22
Illumination Optical Apparatus And Projection Exposure Apparatus App 20150248065 - SHIRAISHI; Naomasa	2015-09-03
Illumination Optical Apparatus And Projection Exposure Apparatus App 20150248066 - SHIRAISHI; Naomasa	2015-09-03
Illumination Optical Apparatus And Projection Exposure Apparatus App 20130250268 - SHIRAISHI; Naomasa	2013-09-26
Illumination Optical Apparatus And Projection Exposure Apparatus App 20130242280 - SHIRAISHI; Naomasa	2013-09-19
Exposure method and electronic device manufacturing method Grant 8,440,375 - Kiuchi , et al. May 14, 2	2013-05-14
Exposure method, method for manufacturing flat panel display substrate, and exposure apparatus Grant 8,431,328 - Shiraishi April 30, 2	2013-04-30
Illumination optical apparatus, projection exposure apparatus, projection optical system, and device manufacturing method Grant 7,884,921 - Noboru , et al. February 8, 2	2011-02-08
Method And Apparatus For Measuring Wavefront, And Exposure Method And Apparatus App 20100302523 - SHIRAISHI; Naomasa	2010-12-02
Projection exposure apparatus with luminous flux distribution Grant 7,656,504 - Shiraishi February 2, 2	2010-02-02
Illumination optical apparatus and projection exposure apparatus App 20090284729 - Shiraishi; Naomasa	2009-11-19
Illumination optical apparatus and projection exposure apparatus App 20090122292 - Shiraishi; Naomasa	2009-05-14
Exposure Method And Apparatus, And Electronic Device Manufacturing Method App 20090068597 - Shiraishi; Naomasa	2009-03-12
Exposure apparatus, exposure method, and electronic device manufacturing method App 20090042115 - Inoue; Hideya ; et al.	2009-02-12
Exposure method and electronic device manufacturing method App 20090042139 - Shiraishi; Naomasa ; et al.	2009-02-12
Exposure Method and Apparatus, and Electronic Device Manufacturing Method App 20090011368 - Ichihara; Yutaka ; et al.	2009-01-08
Exposure method and electronic device manufacturing method App 20080299492 - Kiuchi; Tohru ; et al.	2008-12-04
Exposure Method, Method Of Manufacturing Plate For Flat Panel Display, And Exposure Apparatus App 20080299499 - Shiraishi; Naomasa	2008-12-04
Method for processing pattern data and method for manufacturing electronic device App 20080270970 - Shiraishi; Naomasa	2008-10-30
Display device manufacturing method and display device Grant 7,432,993 - Kameyama , et al. October 7, 2	2008-10-07
Exposure method, method for manufacturing flat panel display substrate, and exposure apparatus App 20080206685 - Shiraishi; Naomasa	2008-08-28
Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices Grant 7,319,508 - Omura , et al. January 15, 2	2008-01-15
Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices Grant 7,301,605 - Omura , et al. November 27, 2	2007-11-27
Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices App 20070268474 - Omura; Yasuhiro ; et al.	2007-11-22
Illumination optical apparatus, projection exposure apparatus, projection optical system, and device manufacturing method App 20070242363 - Noboru; Michio ; et al.	2007-10-18
Display device manufacturing method and display device App 20060256250 - Kameyama; Masaomi ; et al.	2006-11-16
Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus Grant 7,109,508 - Shiraishi September 19, 2	2006-09-19
Illumination optical apparatus and projection exposure apparatus App 20060203214 - Shiraishi; Naomasa	2006-09-14
Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus Grant 7,053,390 - Shiraishi May 30, 2	2006-05-30
Exposure apparatus and exposure method Grant 7,050,149 - Owa , et al. May 23, 2	2006-05-23
Optical unit, exposure apparatus, and device manufacturing method Grant 7,050,148 - Shiraishi May 23, 2	2006-05-23
Projection exposure apparatus and method Grant 6,967,710 - Shiraishi November 22, 2	2005-11-22
Exposure apparatus and exposure method App 20050157278 - Owa, Soichi ; et al.	2005-07-21
Projection optical system and an exposure apparatus with the projection optical system App 20050122499 - Omura, Yasuhiro ; et al.	2005-06-09
Projection exposure apparatus and method Grant 6,897,942 - Shiraishi May 24, 2	2005-05-24
Projection exposure apparatus and method Grant 6,885,433 - Shiraishi April 26, 2	2005-04-26
Optical unit, exposure apparatus, and device manufacturing method App 20050068512 - Shiraishi, Naomasa	2005-03-31
Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus App 20050051742 - Shiraishi, Naomasa	2005-03-10
Projection exposure apparatus Grant 6,864,959 - Shiraishi , et al. March 8, 2	2005-03-08
Exposure method, exposure apparatus and its making method, device manufacturing method, and device Grant 6,850,313 - Ishikawa , et al. February 1, 2	2005-02-01
Optical system and exposure apparatus provided with the optical system Grant 6,844,915 - Owa , et al. January 18, 2	2005-01-18
Exposure apparatus and exposure method, and device manufacturing method Grant 6,842,221 - Shiraishi January 11, 2	2005-01-11
Projection optical system and an exposure apparatus with the projection optical system Grant 6,831,731 - Omura , et al. December 14, 2	2004-12-14
Exposure method, exposure apparatus and device manufacturing method App 20040248043 - Shiraishi, Naomasa	2004-12-09
Projection exposure apparatus and method App 20040233410 - Shiraishi, Naomasa	2004-11-25
Projection exposure apparatus and method App 20040233411 - Shiraishi, Naomasa	2004-11-25
Projection exposure apparatus and method App 20040227919 - Shiraishi, Naomasa	2004-11-18
Exposure apparatus, exposure method and device production method Grant 6,798,495 - Nagasaka , et al. September 28, 2	2004-09-28
Optical system and exposure apparatus having the optical system Grant 6,775,063 - Shiraishi August 10, 2	2004-08-10
Exposure method and apparatus, and method of fabricating a device Grant 6,731,371 - Shiraishi May 4, 2	2004-05-04
Projection exposure method with luminous flux distribution App 20040080733 - Shiraishi, Naomasa	2004-04-29
Photomask and exposure method Grant 6,727,025 - Shiraishi April 27, 2	2004-04-27
Projection exposure apparatus and method Grant 6,710,855 - Shiraishi March 23, 2	2004-03-23
Projection exposure apparatus Grant 6,710,854 - Shiraishi , et al. March 23, 2	2004-03-23
Exposure method and apparatus Grant 6,707,529 - Aoki , et al. March 16, 2	2004-03-16
Projection exposure method and apparatus that produces an intensity distribution on a plane substantially conjugate to a projection optical system pupil plane Grant 6,704,092 - Shiraishi March 9, 2	2004-03-09
Temperature control method and exposure apparatus thereby Grant 6,700,641 - Shiraishi March 2, 2	2004-03-02
Photomask producing method and apparatus and device manufacturing method Grant 6,677,088 - Magome , et al. January 13, 2	2004-01-13
Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus Grant 6,677,601 - Shiraishi January 13, 2	2004-01-13
Projection exposure methods using difracted light with increased intensity portions spaced from the optical axis Grant 6,665,050 - Shiraishi December 16, 2	2003-12-16
Photomask, aberration correction plate, exposure apparatus, and process of production of microdevice Grant 6,653,024 - Shiraishi , et al. November 25, 2	2003-11-25
Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus App 20030201404 - Shiraishi, Naomasa	2003-10-30
Optical unit, exposure apparatus, and device manufacturing method App 20030202165 - Shiraishi, Naomasa	2003-10-30
Exposure apparatus, exposure method, and device manufacturing method App 20030197848 - Shiraishi, Naomasa	2003-10-23
Exposure method, exposure apparatus and its making method, device manufacturing method, and device App 20030197849 - Ishikawa, Jun ; et al.	2003-10-23
Exposure method and apparatus having a decreased light intensity distribution Grant 6,636,293 - Shiraishi October 21, 2	2003-10-21
Photomask and projection exposure apparatus Grant 6,627,365 - Shiraishi September 30, 2	2003-09-30
Exposure apparatus, exposure method and device production method App 20030156268 - Nagasaka, Hiroyuki ; et al.	2003-08-21
Projection optical system and an exposure apparatus with the projection optical system App 20030058421 - Omura, Yasuhiro ; et al.	2003-03-27
Adjusting method for position detecting apparatus Grant 6,538,740 - Shiraishi , et al. March 25, 2	2003-03-25
Projection exposure apparatus and method App 20030043356 - Shiraishi, Naomasa	2003-03-06
Optical system and exposure apparatus provided with the optical system App 20030025894 - Owa, Soichi ; et al.	2003-02-06
Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices App 20030011755 - Omura, Yasuhiro ; et al.	2003-01-16
Optical system and exposure apparatus equipped with the optical system App 20030011893 - Shiraishi, Naomasa ; et al.	2003-01-16
Optical system and exposure apparatus having the optical system App 20030011896 - Shiraishi, Naomasa	2003-01-16
Projection exposure method and apparatus App 20020196416 - Shiraishi, Naomasa	2002-12-26
Photomask producing method and apparatus and device manufacturing method App 20020187406 - Magome, Nobutaka ; et al.	2002-12-12
Projection exposure apparatus App 20020140919 - Shiraishi, Naomasa ; et al.	2002-10-03
Projection exposure method and apparatus App 20020101572 - Shiraishi, Naomasa	2002-08-01
Projection exposure method and apparatus Grant 6,404,482 - Shiraishi June 11, 2	2002-06-11
Projection exposure apparatus Grant 6,392,740 - Shiraishi , et al. May 21, 2	2002-05-21
Projection exposure apparatus App 20020048008 - Shiraishi, Naomasa ; et al.	2002-04-25
Projection exposure method and apparatus App 20020033936 - Shiraishi, Naomasa	2002-03-21
Mark for position detection and mark detecting method and apparatus Grant 6,356,343 - Shiraishi , et al. March 12, 2	2002-03-12
Temperature control method and exposure apparatus thereby App 20020027645 - Shiraishi, Naomasa	2002-03-07
Position detection mark and position detection method App 20020025588 - Shiraishi, Naomasa	2002-02-28
Projection exposure apparatus App 20020008863 - Taniguchi, Tetsuo ; et al.	2002-01-24
Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus App 20010030299 - Shiraishi, Naomasa	2001-10-18
Mark detection method, optical system and mark position detector Grant 6,285,455 - Shiraishi September 4, 2	2001-09-04
Photo mask and exposure method using same Grant 6,284,416 - Shiraishi , et al. September 4, 2	2001-09-04
Projection exposure apparatus Grant 6,252,647 - Shiraishi June 26, 2	2001-06-26
Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus Grant 6,242,754 - Shiraishi June 5, 2	2001-06-05
Projection exposure method and apparatus Grant 6,211,944 - Shiraishi April 3, 2	2001-04-03
Projection exposure apparatus having a filter arranged in its projection optical system and method for protecting circuit patterns Grant 6,118,516 - Irie , et al. September 12, 2	2000-09-12
Position detecting apparatus and method for projection exposure apparatus Grant 6,108,089 - Shiraishi August 22, 2	2000-08-22
Projection exposure apparatus and method Grant 6,100,961 - Shiraishi , et al. August 8, 2	2000-08-08
Position detecting method and apparatus, and exposure method and apparatus Grant 6,101,267 - Shiraishi August 8, 2	2000-08-08
Projection exposure apparatus and method involving variation and correction of light intensity distributions, detection and control of imaging characteristics, and control of exposure Grant 6,078,380 - Taniguchi , et al. June 20, 2	2000-06-20
Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus Grant 6,034,378 - Shiraishi March 7, 2	2000-03-07
Illumination optical apparatus using different number of light sources under different exposure modes, method of operating and method of manufacturing thereof Grant 5,991,009 - Nishi , et al. November 23, 1	1999-11-23
Method and apparatus for measuring depth of a depression in a pattern by light interference from crossed light beams Grant 5,982,489 - Shiraishi November 9, 1	1999-11-09
Mark for position detection, and mark detecting method and apparatus Grant 5,966,201 - Shiraishi , et al. October 12, 1	1999-10-12
Position detection mark and position detection method Grant 5,861,320 - Shiraishi January 19, 1	1999-01-19
Illumination optical apparatus and method having a wavefront splitter and an optical integrator Grant 5,815,248 - Nishi , et al. September 29, 1	1998-09-29
Position-detection method and apparatus with a grating mark Grant 5,801,390 - Shiraishi September 1, 1	1998-09-01
Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques Grant 5,774,240 - Goto , et al. June 30, 1	1998-06-30
Projection exposure apparatus Grant 5,719,704 - Shiraishi , et al. February 17, 1	1998-02-17
Exposure method and apparatus therefor Grant 5,715,089 - Shiraishi February 3, 1	1998-02-03
Apparatus for detecting a mark pattern on a substrate Grant 5,706,091 - Shiraishi January 6, 1	1998-01-06
Projection-exposing apparatus with deflecting grating member Grant 5,703,675 - Hirukawa , et al. December 30, 1	1997-12-30
Projection exposure apparatus Grant 5,677,757 - Taniguchi , et al. October 14, 1	1997-10-14
Method and apparatus for increasing the resolution power of projection lithography exposure system Grant 5,638,211 - Shiraishi June 10, 1	1997-06-10
Method and apparatus for projection exposure Grant 5,621,500 - Shiraishi April 15, 1	1997-04-15
Projection exposure apparatus Grant 5,610,684 - Shiraishi March 11, 1	1997-03-11
Method and apparatus for inspecting a phase-shifted mask Grant 5,576,829 - Shiraishi , et al. November 19, 1	1996-11-19
Projection exposure apparatus Grant 5,552,856 - Shiraishi , et al. September 3, 1	1996-09-03
Exposure method and apparatus using holographic techniques Grant 5,504,596 - Goto , et al. April 2, 1	1996-04-02
Projection exposure apparatus Grant 5,483,311 - Sakakibara , et al. January 9, 1	1996-01-09
Apparatus and method for projection exposure Grant 5,448,336 - Shiraishi September 5, 1	1995-09-05
Projection exposure apparatus Grant 5,379,090 - Shiraishi January 3, 1	1995-01-03
Projection type light exposure apparatus and light exposure method Grant 5,357,311 - Shiraishi October 18, 1	1994-10-18
Projection type exposure apparatus and method of exposure Grant 5,335,044 - Shiraishi August 2, 1	1994-08-02
Exposing method Grant 5,333,035 - Shiraishi July 26, 1	1994-07-26
Device for positioning circular semiconductor wafers Grant 5,194,743 - Aoyama , et al. March 16, 1	1993-03-16
Projection exposure apparatus Grant 5,117,255 - Shiraishi , et al. May 26, 1	1992-05-26