Shirahata; Kaori

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shirahata; Kaori.The latest application filed is for "charged particle detector and charged particle beam device using the same".

Company Profile

1.7.5

Shirahata; Kaori - Tokyo JP
Shirahata; Kaori - Mitaka JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Charged particle detector and charged particle beam device using the same Grant 10,361,063 - Shirasaki , et al.	2019-07-23
Charged Particle Detector and Charged Particle Beam Device Using the Same App 20180261425 - SHIRASAKI; Yasuhiro ; et al.	2018-09-13
Scanning electron microscope and method for controlling same Grant 10,014,160 - Shirahata , et al. July 3, 2	2018-07-03
Scanning Electron Microscope And Method For Controlling Same App 20170186583 - SHIRAHATA; Kaori ; et al.	2017-06-29
Pattern critical dimension measurement equipment and method for measuring pattern critical dimension Grant 9,520,266 - Shirahata , et al. December 13, 2	2016-12-13
Pattern Critical Dimension Measurement Equipment And Method For Measuring Pattern Critical Dimension App 20150041648 - Shirahata; Kaori ; et al.	2015-02-12
Scanning electron microscope and inspection method using same Grant 8,637,820 - Sohda , et al. January 28, 2	2014-01-28
Charged beam device Grant 8,478,021 - Shirahata , et al. July 2, 2	2013-07-02
Scanning Electron Microscope And Inspection Method Using Same App 20120286158 - Sohda; Yasunari ; et al.	2012-11-15
Charged Beam Device App 20110274341 - Shirahata; Kaori ; et al.	2011-11-10

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