Shiozawa; Takahisa
Patent Applications and Registrations
Patent applications and USPTO patent grants for Shiozawa; Takahisa.The latest application filed is for "exposure apparatus".
- Shiozawa; Takahisa - Tochigi-ken JP
- Shiozawa; Takahisa - Kawachi-gun JP
- Shiozawa; Takahisa - Tochigi JP
- Shiozawa, Takahisa - Utsunomiya-shi JP
- Shiozawa; Takahisa - Utsunomiya JP
- Shiozawa; Takahisa - Kawasaki JP
- Shiozawa; Takahisa - Yokohama JP
| Patent | Date |
|---|---|
| Illumination optical system and exposure apparatus Grant 7,760,330 - Shiozawa , et al. July 20, 2 | 2010-07-20 |
| Exposure apparatus and exposure method Grant 7,671,967 - Miyaharu , et al. March 2, 2 | 2010-03-02 |
| Exposure apparatus Grant 7,468,781 - Shiozawa December 23, 2 | 2008-12-23 |
| Exposure Apparatus App 20080218719 - SHIOZAWA; Takahisa | 2008-09-11 |
| Illumination Optical System And Exposure Apparatus App 20080143993 - Shiozawa; Takahisa ; et al. | 2008-06-19 |
| Illumination optical system and exposure apparatus Grant 7,345,741 - Shiozawa , et al. March 18, 2 | 2008-03-18 |
| Exposure apparatus Grant 7,286,206 - Shiozawa October 23, 2 | 2007-10-23 |
| Exposure Apparatus App 20070053033 - SHIOZAWA; Takahisa | 2007-03-08 |
| Exposure apparatus Grant 7,142,283 - Shiozawa November 28, 2 | 2006-11-28 |
| Measuring apparatus and exposure apparatus having the same App 20060238736 - Miyaharu; Takafumi ; et al. | 2006-10-26 |
| Illumination optical system and exposure apparatus App 20050270608 - Shiozawa, Takahisa ; et al. | 2005-12-08 |
| Illumination optical system, exposure method and apparatus using the same Grant 6,897,944 - Shiozawa May 24, 2 | 2005-05-24 |
| Exposure apparatus App 20040246456 - Shiozawa, Takahisa | 2004-12-09 |
| Exposure method and apparatus for detecting an exposure amount and for calculating a correction value based on the detected exposure amount Grant 6,757,050 - Shiozawa June 29, 2 | 2004-06-29 |
| Illumination optical system, exposure method and apparatus using the same App 20040022068 - Shiozawa, Takahisa | 2004-02-05 |
| Exposure apparatus and device manufacturing method Grant 6,636,295 - Shiozawa October 21, 2 | 2003-10-21 |
| Exposure apparatus and device manufacturing method App 20010052968 - Shiozawa, Takahisa | 2001-12-20 |
| Projection exposure apparatus having illumination device with ring-like or spot-like light source Grant 5,726,740 - Shiozawa , et al. March 10, 1 | 1998-03-10 |
| Exposure apparatus and device manufacturing method for projecting light from a secondary light source onto a mask or pattern Grant 5,684,567 - Shiozawa November 4, 1 | 1997-11-04 |
| Scanning exposure apparatus Grant 5,621,499 - Shiozawa April 15, 1 | 1997-04-15 |
| Exposure apparatus and microdevice manufacturing method using the same Grant 5,491,534 - Shiozawa February 13, 1 | 1996-02-13 |
| Exposure apparatus Grant 5,475,491 - Shiozawa December 12, 1 | 1995-12-12 |
| Illumination device Grant 5,459,547 - Shiozawa October 17, 1 | 1995-10-17 |
| Illumination device for projection exposure apparatus Grant 5,345,292 - Shiozawa , et al. September 6, 1 | 1994-09-06 |
| Exposure apparatus with a function for controlling alignment by use of latent images Grant 5,140,366 - Shiozawa , et al. August 18, 1 | 1992-08-18 |
| Exposure method and apparatus Grant 5,121,160 - Sano , et al. June 9, 1 | 1992-06-09 |
| Illuminating device Grant 4,974,919 - Muraki , et al. December 4, 1 | 1990-12-04 |
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