Shiota; Yuuki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shiota; Yuuki.The latest application filed is for "halftone type phase shift mask blank and phase shift mask thereof".

Company Profile

0.5.5

Shiota; Yuuki - Tokyo JP
Shiota; Yuuki - Akishima JP
Shiota; Yuuki - Akishima-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Halftone type phase shift mask blank and phase shift mask thereof Grant 7,862,963 - Shiota , et al. January 4, 2	2011-01-04
Halftone Type Phase Shift Mask Blank And Phase Shift Mask Thereof App 20100040961 - Shiota; Yuuki ; et al.	2010-02-18
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same Grant 7,632,612 - Shiota , et al. December 15, 2	2009-12-15
Halftone type phase shift mask blank and phase shift mask thereof Grant 7,592,106 - Shiota , et al. September 22, 2	2009-09-22
Halftone Type Phase Shift Mask Blank And Phase Shift Mask Thereof App 20070092808 - Shiota; Yuuki ; et al.	2007-04-26
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same App 20070082278 - Shiota; Yuuki ; et al.	2007-04-12
Halftone type phase shift mask blank and phase shift mask thereof Grant 7,169,513 - Shiota , et al. January 30, 2	2007-01-30
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same Grant 7,115,341 - Shiota , et al. October 3, 2	2006-10-03
Halftone type phase shift mask blank and phase shift mask thereof App 20030180630 - Shiota, Yuuki ; et al.	2003-09-25
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same App 20030180631 - Shiota, Yuuki ; et al.	2003-09-25

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