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Production method for semiconductor substrate and production method for field effect transistor and semiconductor substrate and field effect transistor Grant 7,056,789 - Shiono , et al. June 6, 2 | 2006-06-06 |
Method for producing semiconductor substrate and method for fabricating field effect transistor and semiconductor substrate and field effect transistor App 20060022200 - Shiono; Ichiro ;   et al. | 2006-02-02 |
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Production method for semiconductor substrate and production method for field effect transistor and semiconductor substrate and field effect transistor App 20040245552 - Shiono, Ichiro ;   et al. | 2004-12-09 |
Semiconductor substrate, field effect transistor, method of forming SiGe layer and method of forming strained Si layer using same, and method of manufacturing field effect transistor Grant 6,525,338 - Mizushima , et al. February 25, 2 | 2003-02-25 |
Semiconductor substrate, field effect transistor, method of forming SiGe layer and method of forming strained Si layer using same, and method of manufacturing field effect transistor App 20020017642 - Mizushima, Kazuki ;   et al. | 2002-02-14 |