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Substrate processing apparatus, substrate processing system, and substrate processing method
Grant 11,450,544 - Kobata , et al. September 20, 2 | 2022-09-20 |
Polishing Method, Polishing Monitoring Method And Polishing Monitoring Apparatus For Workpiece
App 20220176513 - Watanabe; Yuki ; et al. | 2022-06-09 |
Optical Film-thickness Measuring Apparatus And Polishing Apparatus
App 20220105601 - Kinoshita; Masaki ; et al. | 2022-04-07 |
Polishing Method, Polishing Apparatus, And Computer-readable Storage Medium Storing Program
App 20210402550 - Shiokawa; Yoichi ; et al. | 2021-12-30 |
Substrate Polishing Apparatus, Substrate Polishing Method, And Apparatus For Regulating Temperature Of Polishing Surface Of Polishing Pad Used In Polishing Apparatus
App 20210229235 - SONE; Tadakazu ; et al. | 2021-07-29 |
Polishing Method And Polishing Apparatus
App 20210170544 - Yagi; Keita ; et al. | 2021-06-10 |
Substrate Polishing Apparatus, Method Of Creating Thickness Map, And Method Of Polishing A Substrate
App 20210101250 - Watanabe; Katsuhide ; et al. | 2021-04-08 |
Substrate Processing Apparatus, Substrate Processing System, And Substrate Processing Method
App 20200243364 - Kobata; Itsuki ; et al. | 2020-07-30 |
Method Of Cleaning A Substrate
App 20200176281 - MAEDA; Koji ; et al. | 2020-06-04 |
Substrate processing apparatus, substrate processing system, and substrate processing method
Grant 10,665,487 - Kobata , et al. | 2020-05-26 |
Head height adjustment device and substrate processing apparatus provided with head height adjustment device
Grant 10,556,314 - Sakugawa , et al. Feb | 2020-02-11 |
Polishing method and polishing apparatus
Grant 10,399,203 - Kobayashi , et al. Sep | 2019-09-03 |
Substrate Polishing Apparatus, Substrate Polishing Method, And Apparatus For Regulating Temperature Of Polishing Surface Of Poli
App 20190168354 - SONE; Tadakazu ; et al. | 2019-06-06 |
Polishing Apparatus And Polishing Method
App 20190022820 - KIMBA; Toshifumi ; et al. | 2019-01-24 |
Polishing method
Grant 10,056,277 - Kobayashi , et al. August 21, 2 | 2018-08-21 |
Substrate Processing Apparatus, Substrate Processing System And Substrate Processing Method
App 20180211849 - KOBATA; Itsuki ; et al. | 2018-07-26 |
Polishing apparatus and polished-state monitoring method
Grant 9,999,955 - Kobayashi , et al. June 19, 2 | 2018-06-19 |
Head Height Adjustment Device And Substrate Processing Apparatus Provided With Head Height Adjustment Device
App 20180001438 - SAKUGAWA; Suguru ; et al. | 2018-01-04 |
Substrate Processing Apparatus
App 20170352573 - WEN; Zhongxin ; et al. | 2017-12-07 |
Polishing Method And Polishing Apparatus
App 20170190020 - KOBAYASHI; Yoichi ; et al. | 2017-07-06 |
Polishing Method
App 20170148655 - KOBAYASHI; Yoichi ; et al. | 2017-05-25 |
Substrate Processing Apparatus, Substrate Processing System. And Substrate Processing Method
App 20170047237 - KOBATA; Itsuki ; et al. | 2017-02-16 |
Polishing device and polishing method
Grant 9,550,269 - Shiokawa , et al. January 24, 2 | 2017-01-24 |
Polishing Apparatus And Polishing Method
App 20150266159 - SHIOKAWA; Yoichi ; et al. | 2015-09-24 |
Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus
Grant 8,965,555 - Fukuda , et al. February 24, 2 | 2015-02-24 |
Polishing Apparatus And Polished-state Monitoring Method
App 20150017887 - KOBAYASHI; Yoichi ; et al. | 2015-01-15 |
Substrate Polishing Apparatus, Substrate Polishing Method, And Apparatus For Regulating Temperature Of Polishing Surface Of Polishing Pad Used In Polishing Apparatus
App 20140364040 - SONE; Tadakazu ; et al. | 2014-12-11 |
Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatus
Grant 8,845,391 - Sone , et al. September 30, 2 | 2014-09-30 |
Substrate Cleaning Apparatus And Polishing Apparatus
App 20140190633 - Maeda; Koji ; et al. | 2014-07-10 |
Dressing Method, Method Of Determining Dressing Conditions, Program For Determining Dressing Conditions, And Polishing Apparatus
App 20140120808 - FUKUDA; Akira ; et al. | 2014-05-01 |
Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus
Grant 8,655,478 - Fukuda , et al. February 18, 2 | 2014-02-18 |
Polishing apparatus and polishing method
Grant 8,360,817 - Ishii , et al. January 29, 2 | 2013-01-29 |
Substrate Polishing Apparatus, Substrate Polishing Method, And Apparatus For Regulating Temperature Of Polishing Surface Of Polishing Pad Used In Polishing Apparatus
App 20110159782 - SONE; Tadakazu ; et al. | 2011-06-30 |
Polishing Apparatus And Polishing Method
App 20100255756 - ISHII; Yu ; et al. | 2010-10-07 |
Dressing Method, Method Of Determining Dressing Conditions, Program For Determining Dressing Conditions, And Polishing Apparatus
App 20100081361 - Fukuda; Akira ; et al. | 2010-04-01 |
Tray for preparing a dentiform model used for an operation on a dental technic
Grant 4,059,902 - Shiokawa November 29, 1 | 1977-11-29 |
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