| Patent | Date |
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Method for forming metal film by ALD using beta-diketone metal complex
Grant 8,133,555 - Shinriki , et al. March 13, 2 | 2012-03-13 |
Atomic composition controlled ruthenium alloy film formed by plasma-enhanced atomic layer deposition
Grant 8,084,104 - Shinriki , et al. December 27, 2 | 2011-12-27 |
Ruthenium alloy film for copper interconnects
Grant 7,799,674 - Shinriki , et al. September 21, 2 | 2010-09-21 |
Method for forming metal wiring structure
Grant 7,785,658 - Shinriki , et al. August 31, 2 | 2010-08-31 |
Method For Forming Metal Film By Ald Using Beta-diketone Metal Complex
App 20100092696 - Shinriki; Hiroshi ; et al. | 2010-04-15 |
Atomic Composition Controlled Ruthenium Alloy Film Formed By Plasma-enhanced Atomic Layer Deposition
App 20100055433 - Shinriki; Hiroshi ; et al. | 2010-03-04 |
Method for forming Ta-Ru liner layer for Cu wiring
Grant 7,655,564 - Shinriki , et al. February 2, 2 | 2010-02-02 |
Ruthenium Alloy Film For Copper Interconnects
App 20090209101 - SHINRIKI; Hiroshi ; et al. | 2009-08-20 |
METHOD FOR FORMING Ta-Ru LINER LAYER FOR Cu WIRING
App 20090155997 - SHINRIKI; Hiroshi ; et al. | 2009-06-18 |
Substrate Processing Apparatus And Method, And Gas Nozzle For Improving Purge Efficiency
App 20090133627 - Shinriki; Hiroshi ; et al. | 2009-05-28 |
METHOD FOR FORMING RUTHENIUM COMPLEX FILM USING Beta-DIKETONE-COORDINATED RUTHENIUM PRECURSOR
App 20090087339 - Shinriki; Hiroshi | 2009-04-02 |
Plasma igniting method and substrate processing method
Grant 7,497,964 - Igeta , et al. March 3, 2 | 2009-03-03 |
Substrate processing apparatus and method, high speed rotary valve and cleaning method
Grant 7,481,902 - Shinriki , et al. January 27, 2 | 2009-01-27 |
Method Of Forming Ruthenium Film For Metal Wiring Structure
App 20080318417 - Shinriki; Hiroshi ; et al. | 2008-12-25 |
Ruthenium thin film-formed structure
Grant 7,435,484 - Shinriki , et al. October 14, 2 | 2008-10-14 |
Apparatus and method for forming thin film using upstream and downstream exhaust mechanisms
Grant 7,408,225 - Shinriki , et al. August 5, 2 | 2008-08-05 |
Radical Processing of a Sub-Nanometer Insulation Film
App 20080139000 - IGETA; Masanobu ; et al. | 2008-06-12 |
Apparatus for Forming Thin Film
App 20080134976 - Shinriki; Hiroshi ; et al. | 2008-06-12 |
Method of cleaning substrate-processing device and substrate-processing device
Grant 7,383,841 - Shinriki , et al. June 10, 2 | 2008-06-10 |
Method Of Forming Ru Film And Metal Wiring Structure
App 20080124484 - SHINRIKI; Hiroshi ; et al. | 2008-05-29 |
Method for forming insulating film on substrate, method for manufacturing semiconductor device and substrate-processing apparatus
Grant 7,378,358 - Igeta , et al. May 27, 2 | 2008-05-27 |
Method for forming thin film and apparatus for forming thin film
Grant 7,354,622 - Shinriki , et al. April 8, 2 | 2008-04-08 |
Method Of Forming Ruthenium Film For Metal Wiring Structure
App 20080054472 - SHINRIKI; Hiroshi ; et al. | 2008-03-06 |
Thin Film Formation By Atomic Layer Growth And Chemical Vapor Deposition
App 20070264427 - SHINRIKI; Hiroshi ; et al. | 2007-11-15 |
Thin-film deposition apparatus
Grant 7,273,526 - Shinriki , et al. September 25, 2 | 2007-09-25 |
Method For Manufacturing Semiconductor Device, Substrate Treater, And Substrate Treatment System
App 20070190802 - AOYAMA; SHINTARO ; et al. | 2007-08-16 |
Method for foming metal wiring structure
App 20070082130 - Shinriki; Hiroshi ; et al. | 2007-04-12 |
Method for forming metal wiring structure
App 20070082132 - Shinriki; Hiroshi ; et al. | 2007-04-12 |
Substrate processing method and a computer readable storage medium storing a program for controlling same
Grant 7,129,185 - Aoyama , et al. October 31, 2 | 2006-10-31 |
Method and device for processing substrate, and apparatus for manufacturing semiconductor device
Grant 7,125,799 - Aoyama , et al. October 24, 2 | 2006-10-24 |
Method of removing oxide film on a substrate with hydrogen and fluorine radicals
App 20060207724 - Shinriki; Hiroshi ; et al. | 2006-09-21 |
Plasma igniting method and substrate processing method
App 20060205188 - Igeta; Masanobu ; et al. | 2006-09-14 |
Method of forming dielectric film
Grant 7,105,362 - Takahashi , et al. September 12, 2 | 2006-09-12 |
Method of removing oxide film on a substrate with hydrogen and fluorine radicals
Grant 7,105,101 - Shinriki , et al. September 12, 2 | 2006-09-12 |
Method of cleaning substrate-processing device and substrate-processing device
App 20060175011 - Shinriki; Hiroshi ; et al. | 2006-08-10 |
Substrate treating apparatus and method of substrate treatment
App 20060174833 - Yamazaki; Kazuyoshi ; et al. | 2006-08-10 |
Film forming method, and film modifying method
Grant 7,037,560 - Shinriki , et al. May 2, 2 | 2006-05-02 |
Single-substrate-heat-processing apparatus for performing reformation and crystallization
App 20060081186 - Shinriki; Hiroshi ; et al. | 2006-04-20 |
Substrate processing apparatus and method, and gas nozzle for improving purge efficiency
App 20060032445 - Shinriki; Hiroshi ; et al. | 2006-02-16 |
Method for forming insulating film on substrate, method for manufacturing semiconductor device and substrate-processing apparatus
App 20060009044 - Igeta; Masanobu ; et al. | 2006-01-12 |
Method of forming dielectric film
App 20060008969 - Takahashi; Tsuyoshi ; et al. | 2006-01-12 |
Thin-film deposition apparatus
App 20050229848 - Shinriki, Hiroshi ; et al. | 2005-10-20 |
Fabrication process of a semiconductor device
Grant 6,953,731 - Shinriki , et al. October 11, 2 | 2005-10-11 |
Apparatus and method for forming thin film using upstream and downstream exhaust mechanisms
App 20050208217 - Shinriki, Hiroshi ; et al. | 2005-09-22 |
Radical processing of a sub-nanometer insulation film
Grant 6,927,112 - Igeta , et al. August 9, 2 | 2005-08-09 |
Radical processing of a sub-nanometer insulation film
App 20050170541 - Igeta, Masanobu ; et al. | 2005-08-04 |
Method of etching and etching apparatus
App 20050142885 - Shinriki, Hiroshi | 2005-06-30 |
Substrate processing method and a computer readable storage medium storing a program for controlling same
App 20050079720 - Aoyama, Shintaro ; et al. | 2005-04-14 |
Substrate processing apparatus and substrate processing method, high speed rotary valve, and cleaning method
App 20050074983 - Shinriki, Hiroshi ; et al. | 2005-04-07 |
Method of forming a thin film
Grant 6,866,882 - Shinriki , et al. March 15, 2 | 2005-03-15 |
Method of forming a dielectric film
Grant 6,866,890 - Kiryu , et al. March 15, 2 | 2005-03-15 |
Single-substrate-heat-processing apparatus for performing reformation and crystallization
App 20050016687 - Shinriki, Hiroshi ; et al. | 2005-01-27 |
Method of and apparatus for processing substrates
App 20040251235 - Shinriki, Hiroshi ; et al. | 2004-12-16 |
Method and device for processing substrate, and apparatus for manufacturing semiconductor device
App 20040241991 - Aoyama, Shintaro ; et al. | 2004-12-02 |
Device and method for processing substrate
Grant 6,806,211 - Shinriki , et al. October 19, 2 | 2004-10-19 |
Film deposition apparatus and method
Grant 6,800,139 - Shinriki , et al. October 5, 2 | 2004-10-05 |
Metal oxide film formation method and apparatus
Grant 6,756,235 - Liu , et al. June 29, 2 | 2004-06-29 |
Method for film formation of gate insulator, apparatus for film formation of gate insulator, and cluster tool
App 20040053472 - Kiryu, Hideki ; et al. | 2004-03-18 |
Device And Method For Processing Substrate
App 20040026037 - Shinriki, Hiroshi ; et al. | 2004-02-12 |
Method for manufacturing semiconductor device, substrate treater, and substrate treatment system
App 20040023513 - Aoyama, Shintaro ; et al. | 2004-02-05 |
Method of forming a dielectric film
App 20040005408 - Kiryu, Hideki ; et al. | 2004-01-08 |
Fabrication process of a semiconductor device
App 20030236001 - Shinriki, Hiroshi ; et al. | 2003-12-25 |
Method for forming thin film and appatus for forming thin film
App 20030170388 - Shinriki, Hiroshi ; et al. | 2003-09-11 |
Radical processing of a sub-nanometer insulation film
App 20030170945 - Igeta, Masanobu ; et al. | 2003-09-11 |
Thin film forming method
Grant 6,485,564 - Liu , et al. November 26, 2 | 2002-11-26 |
Metal organic chemical vapor deposition method and apparatus
Grant 6,482,266 - Matsumoto , et al. November 19, 2 | 2002-11-19 |
Thin film forming apparatus
App 20020166507 - Shinriki, Hiroshi ; et al. | 2002-11-14 |
Processing apparatus and processing method
Grant 6,467,491 - Sugiura , et al. October 22, 2 | 2002-10-22 |
Single-substrate-processing CVD method of forming film containing metal element
Grant 6,428,850 - Shinriki , et al. August 6, 2 | 2002-08-06 |
Single-substrate-heat-processing apparatus and method for performing reformation and crystallization
App 20010018267 - Shinriki, Hiroshi ; et al. | 2001-08-30 |
Single-substrate-heat-processing method for performing reformation and crystallization
Grant 6,232,248 - Shinriki , et al. May 15, 2 | 2001-05-15 |
Film forming apparatus and method, and film modifying apparatus and method
Grant 6,143,081 - Shinriki , et al. November 7, 2 | 2000-11-07 |
Single-substrate-processing CVD apparatus and method
Grant 6,126,753 - Shinriki , et al. October 3, 2 | 2000-10-03 |
Method of forming wiring structure for semiconductor device
Grant 6,001,729 - Shinriki , et al. December 14, 1 | 1999-12-14 |
Metal interconnection and method for making
Grant 5,973,402 - Shinriki , et al. October 26, 1 | 1999-10-26 |
Semiconductor device with contact structure and method of manufacturing the same
Grant 5,834,846 - Shinriki , et al. November 10, 1 | 1998-11-10 |
Method for making metal interconnection with chlorine plasma etch
Grant 5,627,102 - Shinriki , et al. May 6, 1 | 1997-05-06 |
Process for manufacturing semiconductor devices
Grant 5,336,638 - Suzuki , et al. August 9, 1 | 1994-08-09 |
Method of manufacturing a semiconductor device
Grant 5,292,673 - Shinriki , et al. March 8, 1 | 1994-03-08 |
Process for producing a semiconductor device
Grant 5,079,191 - Shinriki , et al. January 7, 1 | 1992-01-07 |
Semiconductor capacitor device with dual dielectric
Grant 4,937,650 - Shinriki , et al. June 26, 1 | 1990-06-26 |
Semiconductor device
Grant 4,891,684 - Nishioka , et al. January 2, 1 | 1990-01-02 |
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