| Patent | Date |
|---|
Exposure apparatus and method, and device manufacturing method
Grant 7,580,115 - Shinonaga August 25, 2 | 2009-08-25 |
Catadioptric projection optical system, exposure apparatus having the same, device fabrication method
Grant 7,317,571 - Kato , et al. January 8, 2 | 2008-01-08 |
Exposure Apparatus And Method, And Device Manufacturing Method
App 20070211236 - SHINONAGA; Hirohiko | 2007-09-13 |
Catadioptric projection optical system, exposure apparatus having the same, device fabrication method
App 20060028715 - Kato; Takashi ; et al. | 2006-02-09 |
Astigmatism-correcting optical system, projection exposure apparatus using the optical system and device manufacturing method
Grant 5,864,433 - Takahashi , et al. January 26, 1 | 1999-01-26 |
Charge latent image recording medium and charge latent image reading out system
Grant 5,227,885 - Takanashi , et al. * July 13, 1 | 1993-07-13 |
Optical scanning system for scanning object with light beam and displaying apparatus
Grant 5,144,471 - Takanashi , et al. September 1, 1 | 1992-09-01 |
Light-to-light conversion element provided with wavelength selecting reflection layer and imaging device provided with the light-to-light conversion element
Grant 5,124,545 - Takanashi , et al. June 23, 1 | 1992-06-23 |
Apparatus for detecting distribution of electric surface potential
Grant 5,065,102 - Takanashi , et al. November 12, 1 | 1991-11-12 |
Photo-to-photo conversion element and its applied system
Grant 5,054,892 - Takanashi , et al. * October 8, 1 | 1991-10-08 |
Light-to-light conversion method and display unit using the same
Grant 5,039,209 - Takanashi , et al. August 13, 1 | 1991-08-13 |
Apparatus for detecting electrostatic surface potential
Grant 5,036,270 - Takanashi , et al. July 30, 1 | 1991-07-30 |
Image information processing method and apparatus thereof
Grant 5,031,047 - Takanashi , et al. July 9, 1 | 1991-07-09 |
Image pickup apparatus
Grant 5,027,216 - Takanashi , et al. June 25, 1 | 1991-06-25 |
Charge latent image recording reproducing system with a uniformly charge detection region providing a reference intensity of a recorded object
Grant 5,006,935 - Takanashi , et al. April 9, 1 | 1991-04-09 |
Image pickup apparatus
Grant 4,956,714 - Takanashi , et al. September 11, 1 | 1990-09-11 |
Image pick-up apparatus using photo-to-photo conversion element
Grant 4,956,713 - Takanashi , et al. September 11, 1 | 1990-09-11 |
Reproducing apparatus for charge latent image recording medium
Grant 4,945,423 - Takanashi , et al. July 31, 1 | 1990-07-31 |
Tri-color separating optical system
Grant 4,933,751 - Shinonaga , et al. June 12, 1 | 1990-06-12 |
Image pickup device having a photoconductive optical modulator element
Grant 4,831,452 - Takanashi , et al. May 16, 1 | 1989-05-16 |
Microscope with auto focus and light adjusting means
Grant 4,725,720 - Sawada , et al. February 16, 1 | 1988-02-16 |
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