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Method For Manufacturing Epitaxial Wafer, Silicon-based Substrate For Epitaxial Growth, And Epitaxial Wafer
App 20210358738 - TSUCHIYA; Keitarou ; et al. | 2021-11-18 |
Semiconductor device substrate, semiconductor device, and method for manufacturing semiconductor device substrate
Grant 10,833,184 - Sato , et al. November 10, 2 | 2020-11-10 |
Semiconductor base having a composition graded buffer layer stack
Grant 10,586,701 - Shikauchi , et al. | 2020-03-10 |
Substrate for semiconductor device, semiconductor device, and method for manufacturing semiconductor device
Grant 10,553,674 - Sato , et al. Fe | 2020-02-04 |
Semiconductor base substance having a boron containing buffer layer, semiconductor device including the same, and methods for manufacturing the semiconductor base substance and the semiconductor device
Grant 10,529,842 - Shikauchi , et al. J | 2020-01-07 |
Semiconductor Device Substrate, Semiconductor Device, And Method For Manufacturing Semiconductor Device Substrate
App 20190214492 - SATO; Ken ; et al. | 2019-07-11 |
Method of manufacturing epitaxial wafer and silicon-based substrate for epitaxial growth
Grant 10,319,587 - Hagimoto , et al. | 2019-06-11 |
Semiconductor Base And Semiconductor Device
App 20190051515 - SHIKAUCHI; Hiroshi ; et al. | 2019-02-14 |
Epitaxial substrate for electronic devices, electronic device, method for producing the epitaxial substrate for electronic devices, and method for producing the electronic device
Grant 10,115,589 - Hagimoto , et al. October 30, 2 | 2018-10-30 |
Semiconductor Base Substance, Semiconductor Device, Method For Manufacturing Semiconductor Base Substance, And Method For Manufacturing Semiconductor Device
App 20180269316 - SHIKAUCHI; Hiroshi ; et al. | 2018-09-20 |
Method for manufacturing semiconductor substrate, method for manufacturing semiconductor device, semiconductor substrate, and semiconductor device
Grant 10,068,985 - Sato , et al. September 4, 2 | 2018-09-04 |
Method For Producing Semiconductor Epitaxial Wafer And Semiconductor Epitaxial Wafer
App 20180245240 - HAGIMOTO; Kazunori ; et al. | 2018-08-30 |
Substrate For Semiconductor Device, Semiconductor Device, And Method For Manufacturing Semiconductor Device
App 20180204908 - SATO; Ken ; et al. | 2018-07-19 |
Silicon-based substrate, semiconductor device, and method for manufacturing semiconductor device
Grant 9,966,259 - Shikauchi , et al. May 8, 2 | 2018-05-08 |
Method for producing semiconductor epitaxial wafer and semiconductor epitaxial wafer
Grant 9,938,638 - Hagimoto , et al. April 10, 2 | 2018-04-10 |
Semiconductor substrate and semiconductor device
Grant 9,876,101 - Sato , et al. January 23, 2 | 2018-01-23 |
Epitaxial Substrate For Electronic Devices, Electronic Device, Method For Producing The Epitaxial Substrate For Electronic Devices, And Method For Producing The Electronic Device
App 20170352537 - HAGIMOTO; Kazunori ; et al. | 2017-12-07 |
Epitaxial Wafer, Semiconductor Device, Method For Producing Epitaxial Wafer, And Method For Producing Semiconductor Device
App 20170323960 - SATO; Ken ; et al. | 2017-11-09 |
Silicon-based Substrate, Semiconductor Device, And Method For Manufacturing Semiconductor Device
App 20170236711 - SHIKAUCHI; Hiroshi ; et al. | 2017-08-17 |
Silicon-based substrate having first and second portions
Grant 9,673,052 - Shikauchi , et al. June 6, 2 | 2017-06-06 |
Semiconductor Substrate And Semiconductor Device
App 20170133217 - SATO; Ken ; et al. | 2017-05-11 |
Method For Manufacturing Semiconductor Substrate, Method For Manufacturing Semiconductor Device, Semiconductor Substrate, And Semiconductor Device
App 20170117385 - SATO; Ken ; et al. | 2017-04-27 |
Method For Producing Semiconductor Epitaxial Wafer And Semiconductor Epitaxial Wafer
App 20170029977 - HAGIMOTO; Kazunori ; et al. | 2017-02-02 |
Semiconductor Substrate And Semiconductor Device
App 20170033209 - SATO; Ken ; et al. | 2017-02-02 |
Method Of Manufacturing Epitaxial Wafer And Silicon-based Substrate For Epitaxial Growth
App 20160365239 - HAGIMOTO; Kazunori ; et al. | 2016-12-15 |
Semiconductor substrate, semiconductor device and method of manufacturing the semiconductor device
Grant 9,520,286 - Shikauchi , et al. December 13, 2 | 2016-12-13 |
Semiconductor device
Grant 9,401,420 - Shikauchi , et al. July 26, 2 | 2016-07-26 |
Silicon-based Substrate, Semiconductor Device, And Method For Manufacturing Semiconductor Device
App 20160126099 - SHIKAUCHI; Hiroshi ; et al. | 2016-05-05 |
Semiconductor Device
App 20160118486 - SHIKAUCHI; Hiroshi ; et al. | 2016-04-28 |
Semiconductor Substrate, Semiconductor Device And Method Of Manufacturing The Semiconductor Device
App 20160111273 - SHIKAUCHI; Hiroshi ; et al. | 2016-04-21 |
Method for manufacturing nitride semiconductor device
Grant 9,281,187 - Sato , et al. March 8, 2 | 2016-03-08 |
Method For Manufacturing Nitride Semiconductor Device
App 20150126018 - Sato; Ken ; et al. | 2015-05-07 |
Epitaxial Substrate, Semiconductor Device, And Method For Manufacturing Semiconductor Device
App 20150084163 - Shikauchi; Hiroshi ; et al. | 2015-03-26 |
Epitaxial Substrate, Semiconductor Device, And Method For Manufacturing Semiconductor Device
App 20150028457 - Shikauchi; Hiroshi ; et al. | 2015-01-29 |
Method for manufacturing silicon wafer
Grant 6,878,645 - Kobayashi , et al. April 12, 2 | 2005-04-12 |
Method for manufacturing silicon wafer
App 20040023518 - Kobayashi, Norihiro ; et al. | 2004-02-05 |
Silicon boat with protective film, method of manufacture thereof, and silicon wafer heat-treated using silicon boat
App 20030196588 - Kobayashi, Norihiro ; et al. | 2003-10-23 |
Method for producing silicon single crystal wafer and silicon single crystal wafer
Grant 6,413,310 - Tamatsuka , et al. July 2, 2 | 2002-07-02 |
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