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Patent applications and USPTO patent grants for Shinohara; Kibatsu.The latest application filed is for "waveguide type power combining/dividing unit".
Patent | Date |
---|---|
Waveguide type power combining/dividing unit Grant 10,056,671 - Shinohara , et al. August 21, 2 | 2018-08-21 |
Waveguide Type Power Combining/dividing Unit App 20170222294 - Shinohara; Kibatsu ;   et al. | 2017-08-03 |
Power combiner/divider of a radial line type impedance matched between a center connector and peripheral outer connectors Grant 9,419,323 - Shinohara , et al. August 16, 2 | 2016-08-16 |
Plasma generating apparatus Grant 8,840,844 - Fujita , et al. September 23, 2 | 2014-09-23 |
Power Combiner/divider App 20140225679 - Shinohara; Kibatsu ;   et al. | 2014-08-14 |
Ferrite phase shifter and automatic matching apparatus Grant 8,779,873 - Shinohara , et al. July 15, 2 | 2014-07-15 |
Ferrite phase shifter and automatic matching apparatus Grant 8,427,254 - Shinohara , et al. April 23, 2 | 2013-04-23 |
Ferrite Phase Shifter And Automatic Matching Apparatus App 20120280764 - SHINOHARA; Kibatsu ;   et al. | 2012-11-08 |
Plasma Generating Apparatus App 20100129272 - Fujita; Hideki ;   et al. | 2010-05-27 |
Magnetron oscillator Grant 7,545,226 - Shinohara June 9, 2 | 2009-06-09 |
Ferrite phase shifter and automatic matching apparatus App 20090128257 - Shinohara; Kibatsu ;   et al. | 2009-05-21 |
Magnetron Oscillator App 20080231380 - Shinohara; Kibatsu | 2008-09-25 |
Plasma processing apparatus Grant 7,395,779 - Ishii , et al. July 8, 2 | 2008-07-08 |
Microwave-excited plasma processing apparatus Grant 7,392,760 - Taguchi , et al. July 1, 2 | 2008-07-01 |
Radial antenna and plasma device using it Grant 7,296,533 - Ishii , et al. November 20, 2 | 2007-11-20 |
Matching device and plasma processing apparatus App 20070119376 - Ishii; Nobuo ;   et al. | 2007-05-31 |
Plasma processing apparatus and method App 20070113978 - Ishii; Nobuo ;   et al. | 2007-05-24 |
Plasma processor and plasma processing method Grant 7,186,314 - Ishii , et al. March 6, 2 | 2007-03-06 |
Magnetron oscillating apparatus Grant 7,102,110 - Shinohara September 5, 2 | 2006-09-05 |
Plasma processing apparatus Grant 7,071,442 - Ishii , et al. July 4, 2 | 2006-07-04 |
Plasma processor and plasma processing method App 20060124244 - Ishii; Nobuo ;   et al. | 2006-06-15 |
Plasma processing apparatus and controlling method therefor App 20060042546 - Ishii; Nobuo ;   et al. | 2006-03-02 |
Magnetron oscillating apparatus App 20050218813 - Shinohara, Kibatsu | 2005-10-06 |
Plasma processing apparatus App 20050211382 - Ishii, Nobuo ;   et al. | 2005-09-29 |
Plasma processing apparatus App 20050173382 - Ishii, Nobuo ;   et al. | 2005-08-11 |
Microwave-excited plasma processing apparatus App 20050145178 - Taguchi, Yoji ;   et al. | 2005-07-07 |
Apparatus for plasma processing Grant 6,910,440 - Ishii , et al. June 28, 2 | 2005-06-28 |
Plasma processing apparatus Grant 6,847,003 - Ishii , et al. January 25, 2 | 2005-01-25 |
Matching device and plasma processing apparatus App 20040261717 - Ishii, Nobuo ;   et al. | 2004-12-30 |
Electromagnetic field supply apparatus and plasma processing device App 20040244693 - Ishii, Nobuo ;   et al. | 2004-12-09 |
Matching circuit and plasma processing apparatus Grant 6,707,253 - Sumida , et al. March 16, 2 | 2004-03-16 |
Radial antenna and plasma device using it App 20040045674 - Ishii, Nobuo ;   et al. | 2004-03-11 |
Plasma processing device Grant 6,657,151 - Ishii , et al. December 2, 2 | 2003-12-02 |
Plasma processing apparatus App 20030173030 - Ishii, Nobuo ;   et al. | 2003-09-18 |
Matching circuit and plasma processing apparatus App 20030136519 - Sumida, Kenji ;   et al. | 2003-07-24 |
Apparatus for plasma processing App 20020148564 - Ishii, Nobuo ;   et al. | 2002-10-17 |
Plasma processing apparatus App 20020050486 - Ishii, Nobuo ;   et al. | 2002-05-02 |
Plasma processing device App 20020036187 - Ishll, Nobuo ;   et al. | 2002-03-28 |
Plasma processing apparatus Grant 6,043,608 - Samukawa , et al. March 28, 2 | 2000-03-28 |
Microwave plasma processing apparatus using a hybrid microwave having two different modes of oscillation or branched microwaves forming a concentric electric field Grant 5,874,706 - Ishii , et al. February 23, 1 | 1999-02-23 |
Concentric rings with different RF energies applied thereto Grant 5,637,961 - Ishii , et al. June 10, 1 | 1997-06-10 |
Plasma processing apparatus which uses a uniquely shaped antenna to reduce the overall size of the apparatus with respect to the plasma chamber Grant 5,565,738 - Samukawa , et al. October 15, 1 | 1996-10-15 |
Triple-probe plasma measuring apparatus for correcting space potential errors Grant 5,448,173 - Shinohara , et al. September 5, 1 | 1995-09-05 |
Plasma stabilizing apparatus employing feedback controls Grant 5,365,147 - Shinohara , et al. November 15, 1 | 1994-11-15 |
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