Patent | Date |
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Imprint Apparatus, Imprint Method, And Method For Manufacturing Article App 20210132492 - Hayashi; Tatsuya ;   et al. | 2021-05-06 |
Imprint apparatus, imprint method, and article manufacturing method Grant 10,859,912 - Shinoda , et al. December 8, 2 | 2020-12-08 |
Imprint Apparatus And Article Manufacturing Method App 20200319547 - Shinoda; Ken-ichiro ;   et al. | 2020-10-08 |
Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing article Grant 10,761,316 - Miyaharu , et al. Sep | 2020-09-01 |
Imprint apparatus and method for producing article Grant 10,386,737 - Shinoda , et al. A | 2019-08-20 |
Imprint Apparatus, Imprint Method, And Article Manufacturing Method App 20190033710 - Shinoda; Ken-ichiro ;   et al. | 2019-01-31 |
Imprint apparatus and article manufacturing method Grant 9,910,351 - Shinoda , et al. March 6, 2 | 2018-03-06 |
Mold, Imprinting Method, Imprint Apparatus, And Method For Manufacturing A Semiconductor Article App 20180004091 - Shinoda; Ken-ichiro | 2018-01-04 |
Illumination Apparatus, Optical Apparatus, Imprint Apparatus, Projection Apparatus, And Method Of Manufacturing Article App 20170285331 - Miyaharu; Takafumi ;   et al. | 2017-10-05 |
Imprint apparatus and method of manufacturing article Grant 9,625,837 - Shinoda April 18, 2 | 2017-04-18 |
Imprint apparatus including alignment and overlay measurement Grant 9,616,613 - Suzuki , et al. April 11, 2 | 2017-04-11 |
Imprint Apparatus And Article Manufacturing Method App 20170080633 - Shinoda; Ken-ichiro ;   et al. | 2017-03-23 |
Imprint apparatus and article manufacturing method Grant 9,541,825 - Shinoda , et al. January 10, 2 | 2017-01-10 |
Imprint Apparatus And Method For Producing Article App 20160363875 - Shinoda; Ken-ichiro ;   et al. | 2016-12-15 |
Imprint Apparatus, Imprint Method And Method Of Manufacturing An Article App 20150192515 - Iwai; Toshiki ;   et al. | 2015-07-09 |
Imprint Apparatus And Method Of Manufacturing Article App 20150014892 - SHINODA; Ken-ichiro | 2015-01-15 |
Imprint Apparatus And Method Of Manufacturing Article App 20130193602 - Suzuki; Akiyoshi ;   et al. | 2013-08-01 |
Imprint Apparatus And Article Manufacturing Method App 20130181365 - Shinoda; Ken-ichiro ;   et al. | 2013-07-18 |
Exposure apparatus and device fabrication method Grant 8,208,126 - Shinoda June 26, 2 | 2012-06-26 |
Adjustment method, exposure method, device manufacturing method, and exposure apparatus Grant 7,955,765 - Shinoda June 7, 2 | 2011-06-07 |
Adjustment Method, Exposure Method, Device Manufacturing Method, And Exposure Apparatus App 20090035671 - Shinoda; Ken-ichiro | 2009-02-05 |
Exposure Apparatus And Device Fabrication Method App 20090002673 - Shinoda; Ken-ichiro | 2009-01-01 |
Exposure apparatus and method Grant 7,385,672 - Shinoda June 10, 2 | 2008-06-10 |
Exposure apparatus and exposure method, and device manufacturing method using the same Grant 7,242,457 - Shinoda July 10, 2 | 2007-07-10 |
Exposure apparatus and method for manufacturing device using the exposure apparatus Grant 7,209,218 - Kawakami , et al. April 24, 2 | 2007-04-24 |
Exposure Apparatus And Method For Manufacturing Device Using The Exposure Apparatus App 20070024839 - Kawakami; Tomoaki ;   et al. | 2007-02-01 |
Exposure apparatus and exposure method, and device manufacturing method using the same App 20050231702 - Shinoda, Ken-ichiro | 2005-10-20 |
Exposure apparatus and method App 20050190350 - Shinoda, Ken-Ichiro | 2005-09-01 |
Illumination optical system in exposure apparatus Grant 6,674,514 - Shinoda January 6, 2 | 2004-01-06 |
Illumination optical system in exposure apparatus Grant 6,560,044 - Shinoda May 6, 2 | 2003-05-06 |
Illumination optical system in exposure apparatus App 20020001134 - Shinoda, Ken-Ichiro | 2002-01-03 |
Illumination optical system in exposure apparatus App 20010033433 - Shinoda, Ken-ichiro | 2001-10-25 |