loadpatents
name:-0.028817892074585
name:-0.15420508384705
name:-0.016512155532837
Shinoda; Ken-ichiro Patent Filings

Shinoda; Ken-ichiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shinoda; Ken-ichiro.The latest application filed is for "imprint apparatus, imprint method, and method for manufacturing article".

Company Profile
5.14.18
  • Shinoda; Ken-ichiro - Tochigi JP
  • Shinoda; Ken-ichiro - Utsunomiya JP
  • Shinoda; Ken-ichiro - Utsunomiya-shi JP
  • Shinoda; Ken-ichiro - Tochigi-ken JP
  • Shinoda; Ken-ichiro - Tokyo JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Imprint Apparatus, Imprint Method, And Method For Manufacturing Article
App 20210132492 - Hayashi; Tatsuya ;   et al.
2021-05-06
Imprint apparatus, imprint method, and article manufacturing method
Grant 10,859,912 - Shinoda , et al. December 8, 2
2020-12-08
Imprint Apparatus And Article Manufacturing Method
App 20200319547 - Shinoda; Ken-ichiro ;   et al.
2020-10-08
Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing article
Grant 10,761,316 - Miyaharu , et al. Sep
2020-09-01
Imprint apparatus and method for producing article
Grant 10,386,737 - Shinoda , et al. A
2019-08-20
Imprint Apparatus, Imprint Method, And Article Manufacturing Method
App 20190033710 - Shinoda; Ken-ichiro ;   et al.
2019-01-31
Imprint apparatus and article manufacturing method
Grant 9,910,351 - Shinoda , et al. March 6, 2
2018-03-06
Mold, Imprinting Method, Imprint Apparatus, And Method For Manufacturing A Semiconductor Article
App 20180004091 - Shinoda; Ken-ichiro
2018-01-04
Illumination Apparatus, Optical Apparatus, Imprint Apparatus, Projection Apparatus, And Method Of Manufacturing Article
App 20170285331 - Miyaharu; Takafumi ;   et al.
2017-10-05
Imprint apparatus and method of manufacturing article
Grant 9,625,837 - Shinoda April 18, 2
2017-04-18
Imprint apparatus including alignment and overlay measurement
Grant 9,616,613 - Suzuki , et al. April 11, 2
2017-04-11
Imprint Apparatus And Article Manufacturing Method
App 20170080633 - Shinoda; Ken-ichiro ;   et al.
2017-03-23
Imprint apparatus and article manufacturing method
Grant 9,541,825 - Shinoda , et al. January 10, 2
2017-01-10
Imprint Apparatus And Method For Producing Article
App 20160363875 - Shinoda; Ken-ichiro ;   et al.
2016-12-15
Imprint Apparatus, Imprint Method And Method Of Manufacturing An Article
App 20150192515 - Iwai; Toshiki ;   et al.
2015-07-09
Imprint Apparatus And Method Of Manufacturing Article
App 20150014892 - SHINODA; Ken-ichiro
2015-01-15
Imprint Apparatus And Method Of Manufacturing Article
App 20130193602 - Suzuki; Akiyoshi ;   et al.
2013-08-01
Imprint Apparatus And Article Manufacturing Method
App 20130181365 - Shinoda; Ken-ichiro ;   et al.
2013-07-18
Exposure apparatus and device fabrication method
Grant 8,208,126 - Shinoda June 26, 2
2012-06-26
Adjustment method, exposure method, device manufacturing method, and exposure apparatus
Grant 7,955,765 - Shinoda June 7, 2
2011-06-07
Adjustment Method, Exposure Method, Device Manufacturing Method, And Exposure Apparatus
App 20090035671 - Shinoda; Ken-ichiro
2009-02-05
Exposure Apparatus And Device Fabrication Method
App 20090002673 - Shinoda; Ken-ichiro
2009-01-01
Exposure apparatus and method
Grant 7,385,672 - Shinoda June 10, 2
2008-06-10
Exposure apparatus and exposure method, and device manufacturing method using the same
Grant 7,242,457 - Shinoda July 10, 2
2007-07-10
Exposure apparatus and method for manufacturing device using the exposure apparatus
Grant 7,209,218 - Kawakami , et al. April 24, 2
2007-04-24
Exposure Apparatus And Method For Manufacturing Device Using The Exposure Apparatus
App 20070024839 - Kawakami; Tomoaki ;   et al.
2007-02-01
Exposure apparatus and exposure method, and device manufacturing method using the same
App 20050231702 - Shinoda, Ken-ichiro
2005-10-20
Exposure apparatus and method
App 20050190350 - Shinoda, Ken-Ichiro
2005-09-01
Illumination optical system in exposure apparatus
Grant 6,674,514 - Shinoda January 6, 2
2004-01-06
Illumination optical system in exposure apparatus
Grant 6,560,044 - Shinoda May 6, 2
2003-05-06
Illumination optical system in exposure apparatus
App 20020001134 - Shinoda, Ken-Ichiro
2002-01-03
Illumination optical system in exposure apparatus
App 20010033433 - Shinoda, Ken-ichiro
2001-10-25

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