loadpatents
Patent applications and USPTO patent grants for Shinoda; Kazunori.The latest application filed is for "substrate processing method and plasma processing apparatus".
Patent | Date |
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Substrate processing method and plasma processing apparatus Grant 11,276,579 - Kobayashi , et al. March 15, 2 | 2022-03-15 |
Plasma processing method and etching apparatus Grant 11,217,454 - Shinoda , et al. January 4, 2 | 2022-01-04 |
Substrate Processing Method And Plasma Processing Apparatus App 20210366721 - KOBAYASHI; Hiroyuki ;   et al. | 2021-11-25 |
Plasma Etching Method And Plasma Processing Apparatus App 20210358760 - FUJISAKI; Sumiko ;   et al. | 2021-11-18 |
Plasma Processing Method And Etching Apparatus App 20210242030 - SHINODA; Kazunori ;   et al. | 2021-08-05 |
Vacuum Processing Apparatus App 20210151298 - KOBAYASHI; Hiroyuki ;   et al. | 2021-05-20 |
Vacuum processing apparatus Grant 10,937,635 - Kobayashi , et al. March 2, 2 | 2021-03-02 |
Plasma etching method and plasma etching apparatus Grant 10,872,779 - Miyoshi , et al. December 22, 2 | 2020-12-22 |
Plasma Processing Method App 20200328099 - KOBAYASHI; Hiroyuki ;   et al. | 2020-10-15 |
Plasma Etching Method And Plasma Etching Apparatus App 20200006079 - MIYOSHI; Nobuya ;   et al. | 2020-01-02 |
Etching method and etching apparatus Grant 10,418,254 - Shinoda , et al. Sept | 2019-09-17 |
Vacuum Processing Apparatus App 20190237302 - KOBAYASHI; Hiroyuki ;   et al. | 2019-08-01 |
Etching method and etching apparatus Grant 10,325,781 - Shinoda , et al. | 2019-06-18 |
Vacuum processing apparatus Grant 10,290,472 - Kobayashi , et al. | 2019-05-14 |
Etching Method And Etching Apparatus App 20190067032 - SHINODA; Kazunori ;   et al. | 2019-02-28 |
Plasma processing apparatus Grant 10,192,720 - Kobayashi , et al. Ja | 2019-01-29 |
Plasma Processing Apparatus App 20180122665 - KOBAYASHI; Hiroyuki ;   et al. | 2018-05-03 |
Etching Method And Etching Apparatus App 20180076051 - SHINODA; Kazunori ;   et al. | 2018-03-15 |
Vacuum Processing Apparatus App 20170229290 - KOBAYASHI; Hiroyuki ;   et al. | 2017-08-10 |
Plasma Processing Apparatus App 20170018405 - KOBAYASHI; Hiroyuki ;   et al. | 2017-01-19 |
Plasma Processing Method App 20160079073 - MATSUI; Miyako ;   et al. | 2016-03-17 |
Sample Cleaning Apparatus And Sample Cleaning Method App 20160079055 - KOFUJI; Naoyuki ;   et al. | 2016-03-17 |
Etching Apparatus App 20150270148 - Shinoda; Kazunori ;   et al. | 2015-09-24 |
Optical device, modulator module, and method for manufacturing the optical device Grant 9,110,315 - Nakanishi , et al. August 18, 2 | 2015-08-18 |
Optical semiconductor device Grant 8,891,570 - Nakahara , et al. November 18, 2 | 2014-11-18 |
Horizontal-cavity surface-emitting laser Grant 8,855,160 - Adachi , et al. October 7, 2 | 2014-10-07 |
Optical device, optical module, and method for manufacturing optical device Grant 8,774,571 - Shinoda , et al. July 8, 2 | 2014-07-08 |
Optical Semiconductor Device App 20130208751 - NAKAHARA; Kouji ;   et al. | 2013-08-15 |
Semiconductor Optical Element Semiconductor Optical Module and Manufacturing Method Thereof App 20130207140 - MAKINO; Shigeki ;   et al. | 2013-08-15 |
Optical Device, Optical Module, And Method For Manufacturing Optical Device App 20130051725 - SHINODA; Kazunori ;   et al. | 2013-02-28 |
Semiconductor Laser Element, Method Of Manufacturing Semiconductor Laser Element, And Optical Module App 20120327965 - Shinoda; Kazunori ;   et al. | 2012-12-27 |
Optical Device, Modulator Module, And Method For Manufacturing The Optical Device App 20120314725 - NAKANISHI; Akira ;   et al. | 2012-12-13 |
Surface Emission Laser App 20120230361 - Adachi; Koichiro ;   et al. | 2012-09-13 |
Horizontal Cavity Surface Emitting Laser Diodes, Vertical Illuminated Photodiodes, And Methods Of Their Fabrication App 20120183009 - ADACHI; Koichiro ;   et al. | 2012-07-19 |
Pulse Laser Apparatus App 20100215063 - GAO; Xin ;   et al. | 2010-08-26 |
Semiconductor laser device Grant 7,738,521 - Nakatsuka , et al. June 15, 2 | 2010-06-15 |
Optical Module App 20100142885 - SHINODA; Kazunori ;   et al. | 2010-06-10 |
Optical integrated device and manufacturing method thereof Grant 7,711,229 - Kitatani , et al. May 4, 2 | 2010-05-04 |
Semiconductor laser diode Grant 7,636,378 - Kitatani , et al. December 22, 2 | 2009-12-22 |
Vertical cavity surface emitting semiconductor laser device Grant 7,583,714 - Nakahara , et al. September 1, 2 | 2009-09-01 |
Semiconductor optical device and manufacturing method thereof Grant 7,577,319 - Makino , et al. August 18, 2 | 2009-08-18 |
Light collecting device and light collecting mirror Grant 7,542,208 - Gao , et al. June 2, 2 | 2009-06-02 |
Semiconductor Laser Diode App 20090129421 - Kitatani; Takeshi ;   et al. | 2009-05-21 |
Semiconductor laser and optical module Grant 7,502,403 - Shinoda , et al. March 10, 2 | 2009-03-10 |
Optical Integrated Device And Manufacturing Method Thereof App 20080317422 - KITATANI; TAKESHI ;   et al. | 2008-12-25 |
Semiconductor Laser And Optical Module App 20080266638 - Shinoda; Kazunori ;   et al. | 2008-10-30 |
Semiconductor Optical Device and Manufacturing Method Thereof App 20080219315 - MAKINO; SHIGEKI ;   et al. | 2008-09-11 |
Vertical Cavity Surface Emitting Semiconductor Laser Device App 20080144683 - NAKAHARA; Kouji ;   et al. | 2008-06-19 |
Integrated Optoelectronic Device And Method Of Fabricating The Same App 20080069493 - Shinoda; Kazunori ;   et al. | 2008-03-20 |
Integrated optoelectronic device and method of fabricating the same Grant 7,340,142 - Shinoda , et al. March 4, 2 | 2008-03-04 |
Light Collecting Device And Light Collecting Mirror App 20070279754 - Gao; Xin ;   et al. | 2007-12-06 |
Semiconductor laser device App 20070121693 - Nakatsuka; Shin'ichi ;   et al. | 2007-05-31 |
Distributed feedback semiconductor laser equipment employing a grating Grant 6,989,550 - Nakahara , et al. January 24, 2 | 2006-01-24 |
Optoelectronic waveguiding device and optical modules Grant 6,973,226 - Sato , et al. December 6, 2 | 2005-12-06 |
Laser light source and an optical system for shaping light from a laser-bar-stack Grant 6,943,957 - Gao , et al. September 13, 2 | 2005-09-13 |
Optoelectronic Waveguiding Device And Optical Modules App 20050078904 - Sato, Hiroshi ;   et al. | 2005-04-14 |
Laser light source and an optical system for shaping light from a laser-bar-stack App 20040257661 - Gao, Xin ;   et al. | 2004-12-23 |
Optical semiconductor equipment App 20040099859 - Nakahara, Kouji ;   et al. | 2004-05-27 |
Laser light source and an optical system for shaping light from a laser-bar-stack App 20030174405 - Gao, Xin ;   et al. | 2003-09-18 |
Laser light source and an optical system for shaping light from a laser-bar-stack App 20030151820 - Gao, Xin ;   et al. | 2003-08-14 |
Optoelectronic waveguiding device and optical modules App 20020158266 - Sato, Hiroshi ;   et al. | 2002-10-31 |
Vertical cavity surface emitting laser, optical transmitter-receiver module using the laser, and parallel processing system using the laser Grant 5,912,913 - Kondow , et al. June 15, 1 | 1999-06-15 |
Semiconductor laser devices Grant 5,844,931 - Sagawa , et al. December 1, 1 | 1998-12-01 |
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