SHINMA; Kenji
Patent Applications and Registrations
Patent applications and USPTO patent grants for SHINMA; Kenji.The latest application filed is for "wafer holding body".
- SHINMA; Kenji - Itami-shi JP
- Shinma; Kenji - Itami JP
- Shinma; Kenji - Hyogo JP
| Patent | Date |
|---|---|
| Wafer Holding Body App 20210074568 - KIMURA; Koichi ; et al. | 2021-03-11 |
| Wafer holding unit Grant 10,886,157 - Kimura , et al. January 5, 2 | 2021-01-05 |
| Wafer Holding Unit App 20180174878 - KIMURA; Koichi ; et al. | 2018-06-21 |
| Wafer Holder, Manufacturing Method Thereof And Semiconductor Manufacturing Apparatus App 20090283034 - Natsuhara; Masuhiro ; et al. | 2009-11-19 |
| Wafer holder, heater unit used for wafer prober and having wafer holder, and wafer prober App 20080211526 - Shinma; Kenji ; et al. | 2008-09-04 |
| Substrate processing apparatus Grant 7,361,230 - Natsuhara , et al. April 22, 2 | 2008-04-22 |
| Wafer holder and exposure apparatus equipped with wafer holder App 20080083732 - Shinma; Kenji ; et al. | 2008-04-10 |
| Heater and heating device Grant 7,342,204 - Natsuhara , et al. March 11, 2 | 2008-03-11 |
| Aluminum nitride sintered body Grant 7,306,858 - Natsuhara , et al. December 11, 2 | 2007-12-11 |
| Semiconductor manufacturing apparatus Grant 7,279,048 - Shinma , et al. October 9, 2 | 2007-10-09 |
| Semiconductor heating apparatus Grant 7,268,322 - Kuibira , et al. September 11, 2 | 2007-09-11 |
| Wafer Holder For Semiconductor Manufacturing Device And Semiconductor Manufacturing Device Equipped With The Same App 20070173185 - Natsuhara; Masuhiro ; et al. | 2007-07-26 |
| Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit App 20070023320 - Itakura; Katsuhira ; et al. | 2007-02-01 |
| Aluminum nitride sintered body App 20060035107 - Natsuhara; Masuhiro ; et al. | 2006-02-16 |
| Semiconductor heating apparatus App 20050274325 - Kuibira, Akira ; et al. | 2005-12-15 |
| Heating device App 20050263516 - Natsuhara, Masuhiro ; et al. | 2005-12-01 |
| Supporting unit for semiconductor manufacturing device and semiconductor manufacturing device with supporting unit installed App 20050253285 - Kuibira, Akira ; et al. | 2005-11-17 |
| Heater and heating device App 20050184055 - Natsuhara, Masuhiro ; et al. | 2005-08-25 |
| Susceptor Unit and Apparatus in Which the Susceptor Is Installed App 20050178334 - Shinma, Kenji ; et al. | 2005-08-18 |
| Semiconductor manufacturing apparatus App 20050170651 - Shinma, Kenji ; et al. | 2005-08-04 |
| Semiconductor-producing apparatus App 20050160988 - Shinma, Kenji ; et al. | 2005-07-28 |
| Heater member for mounting heating object and substrate processing apparatus using the same Grant 6,653,604 - Natsuhara , et al. November 25, 2 | 2003-11-25 |
| Sealed airtight container for optical-semiconductors and optical-semiconductors module Grant 6,599,034 - Tatoh , et al. July 29, 2 | 2003-07-29 |
| Substrate processing apparatus App 20030029569 - Natsuhara, Masuhiro ; et al. | 2003-02-13 |
| Heater member for mounting heating object and substrate processing apparatus using the same App 20030015516 - Natsuhara, Masuhiro ; et al. | 2003-01-23 |
| Sealed airtight container for optical-semiconductors and optical-semiconductors module App 20020051610 - Tatoh, Nobuyoshi ; et al. | 2002-05-02 |
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