Patent | Date |
---|
Etching method and etching apparatus Grant 11,335,567 - Shindo , et al. May 17, 2 | 2022-05-17 |
Etching Method And Etching Apparatus App 20220020601 - TODA; Satoshi ;   et al. | 2022-01-20 |
Etching Method And Etching Apparatus App 20210090898 - SHINDO; Naoki ;   et al. | 2021-03-25 |
Etching Apparatus And Etching Method App 20210090912 - SHINDO; Naoki ;   et al. | 2021-03-25 |
Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus Grant 10,700,166 - Kai , et al. | 2020-06-30 |
Method of forming titanium oxide film and method of forming hard mask Grant 10,535,528 - Shindo , et al. Ja | 2020-01-14 |
Method Of Forming Titanium Oxide Film And Method Of Forming Hard Mask App 20180108534 - SHINDO; Naoki ;   et al. | 2018-04-19 |
Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof Grant 9,922,849 - Ido , et al. March 20, 2 | 2018-03-20 |
Liquid treatment apparatus Grant 9,768,010 - Ito , et al. September 19, 2 | 2017-09-19 |
Liquid process apparatus and liquid process method Grant 9,691,602 - Ito , et al. June 27, 2 | 2017-06-27 |
Substrate cleaning method, substrate cleaning system and program storage medium Grant 9,358,588 - Watanabe , et al. June 7, 2 | 2016-06-07 |
Method of managing clinical testing apparatus, clinical testing system, and maintenance management apparatus Grant 9,280,642 - Suga , et al. March 8, 2 | 2016-03-08 |
Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded therein Grant 9,202,731 - Kasai , et al. December 1, 2 | 2015-12-01 |
Liquid arm cleaning unit for substrate processing apparatus Grant 9,190,311 - Higashijima , et al. November 17, 2 | 2015-11-17 |
Substrate Liquid Processing Apparatus And Substrate Liquid Processing Method App 20150318183 - Ido; Yasuyuki ;   et al. | 2015-11-05 |
Liquid process apparatus and liquid process method Grant 9,177,838 - Ito , et al. November 3, 2 | 2015-11-03 |
Sample analyzing system, sample analyzer and management apparatus Grant 8,868,370 - Shindo , et al. October 21, 2 | 2014-10-21 |
Substrate Liquid Processing Method, Substrate Liquid Processing Apparatus, And Storage Medium App 20140261570 - Orii; Takehiko ;   et al. | 2014-09-18 |
Nozzle Cleaning Device, Nozzle Cleaning Method, And Substrate Processing Apparatus App 20130319470 - Kai; Yoshihiro ;   et al. | 2013-12-05 |
Liquid Treatment Apparatus App 20130180659 - Itoh; Norihiro ;   et al. | 2013-07-18 |
Substrate Cleaning Method, Substrate Cleaning System And Program Storage Medium App 20130152964 - WATANABE; Tsukasa ;   et al. | 2013-06-20 |
Substrate cleaning method, substrate cleaning system and program storage medium Grant 8,449,684 - Watanabe , et al. May 28, 2 | 2013-05-28 |
Liquid Process Apparatus And Liquid Process Method App 20130014784 - ITO; Norihiro ;   et al. | 2013-01-17 |
Liquid Process Apparatus And Liquid Process Method App 20130014786 - Ito; Norihiro ;   et al. | 2013-01-17 |
Sample Analyzer And Storage Medium App 20130011298 - Itou; Kenichi ;   et al. | 2013-01-10 |
Substrate cleaning method, substrate cleaning system and program storage medium Grant 8,347,901 - Watanabe , et al. January 8, 2 | 2013-01-08 |
Analyzing System And Method Of Managing Measurement Results App 20120321514 - ITOU; Kenichi ;   et al. | 2012-12-20 |
Method Of Managing Clinical Testing Apparatus, Clinical Testing System, And Maintenance Management Apparatus App 20120283980 - Suga; Yusuke ;   et al. | 2012-11-08 |
Substrate processing method and non-transitory storage medium for carrying out such method Grant 8,303,724 - Hiroshiro , et al. November 6, 2 | 2012-11-06 |
Liquid Processing Apparatus and Liquid Processing Method App 20120180828 - HIGASHIJIMA; Jiro ;   et al. | 2012-07-19 |
Liquid Processing Apparatus, Liquid Processing Method, and Recording Medium Having Program for Executing Liquid Processing Method Recorded Therein App 20120160274 - Kasai; Shigeru ;   et al. | 2012-06-28 |
Substrate cleaning method, substrate cleaning apparatus, control program, and computer-readable storage medium Grant 8,197,606 - Watanabe , et al. June 12, 2 | 2012-06-12 |
Substrate cleaning method, substrate cleaning system and program storage medium Grant 8,152,928 - Watanabe , et al. April 10, 2 | 2012-04-10 |
Sample Analyzing System, Sample Analyzer And Management Apparatus App 20120078514 - Shindo; Naoki ;   et al. | 2012-03-29 |
Clinical Sample Analyzing System, Clinical Sample Analyzer, Management Apparatus, And Method Of Managing Clinical Sample Analyzer App 20120029934 - Shindo; Naoki ;   et al. | 2012-02-02 |
Audio decoding device Grant 8,090,585 - Kakuno , et al. January 3, 2 | 2012-01-03 |
Substrate cleaning method and substrate cleaning apparatus Grant 8,083,857 - Watanabe , et al. December 27, 2 | 2011-12-27 |
Substrate Processing Method And Non-transitory Storage Medium For Carrying Out Such Method App 20110290280 - HIROSHIRO; Koukichi ;   et al. | 2011-12-01 |
Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent Grant 8,015,984 - Hiroshiro , et al. September 13, 2 | 2011-09-13 |
Method for manufacturing semiconductor device Grant 7,897,498 - Gale , et al. March 1, 2 | 2011-03-01 |
Substrate processing apparatus and substrate processing method Grant 7,896,973 - Shindo , et al. March 1, 2 | 2011-03-01 |
Substrate Processing System, Substrate Processing Method, Recording Medium And Software App 20110011425 - TOSHIMA; Takayuki ;   et al. | 2011-01-20 |
Substrate processing system, substrate processing method, recording medium and software Grant 7,836,900 - Toshima , et al. November 23, 2 | 2010-11-23 |
Substrate Cleaning Method, Substrate Cleaning Apparatus, Control Program, And Computer-readable Storage Medium App 20100206329 - WATANABE; Tsukasa ;   et al. | 2010-08-19 |
Substrate drying processing apparatus, method, and program recording medium Grant 7,581,335 - Tanaka , et al. September 1, 2 | 2009-09-01 |
Substrate Processing Apparatus and Substrate Processing Method App 20090101186 - Hiroshiro; Koukichi ;   et al. | 2009-04-23 |
Substrate cleaning method and substrate cleaning apparatus App 20080308120 - Watanabe; Tsukasa ;   et al. | 2008-12-18 |
Method for Manufacturing Semiconductor Device App 20080268655 - Gale; Glenn ;   et al. | 2008-10-30 |
Substrate processing method Grant 7,410,543 - Toshima , et al. August 12, 2 | 2008-08-12 |
Audio decoding device App 20080086312 - Kakuno; Hideyuki ;   et al. | 2008-04-10 |
Substrate cleaning method, substrate cleaning system and program storage medium App 20070267040 - Watanabe; Tsukasa ;   et al. | 2007-11-22 |
Substrate cleaning method, substrate cleaning system and program storage medium App 20070240736 - Watanabe; Tsukasa ;   et al. | 2007-10-18 |
Substrate cleaning method, substrate cleaning system and program storage medium App 20070215172 - Watanabe; Tsukasa ;   et al. | 2007-09-20 |
Substrate processing system, substrate processing method, recording medium and software App 20070175062 - Toshima; Takayuki ;   et al. | 2007-08-02 |
Drying apparatus, drying method, substrate processing apparatus, substrate processing method, and program recording medium App 20070113423 - Tanaka; Hiroshi ;   et al. | 2007-05-24 |
PCB decomposition reactor Grant 6,949,231 - Yamauchi , et al. September 27, 2 | 2005-09-27 |
Substrate processing apparatus and substrate processing method App 20050087133 - Shindo, Naoki ;   et al. | 2005-04-28 |
Substrate processing method and substrate processing apparatus Grant 6,869,499 - Toshima , et al. March 22, 2 | 2005-03-22 |
Substrate processing method and substrate processing apparatus App 20050051246 - Toshima, Takayuki ;   et al. | 2005-03-10 |
Substrate processing method and substrate processing apparatus Grant 6,817,368 - Toshima , et al. November 16, 2 | 2004-11-16 |
Substrate processing apparatus and substrate processing method Grant 6,729,041 - Shindo , et al. May 4, 2 | 2004-05-04 |
Apparatus for decomposing PCB Grant 6,599,485 - Yamauchi , et al. July 29, 2 | 2003-07-29 |
Substrate processing method and substrate processing apparatus App 20020185225 - Toshima, Takayuki ;   et al. | 2002-12-12 |
Substrate processing apparatus and substrate processing method App 20020132480 - Shindo, Naoki ;   et al. | 2002-09-19 |
Substrate processing method and substrate processing apparatus App 20020045008 - Toshima, Takayuki ;   et al. | 2002-04-18 |
PCB decomposition reactor App 20020034459 - Yamauchi, Yasuhiro ;   et al. | 2002-03-21 |
Cleaning method and apparatus App 20010009156 - Shindo, Naoki ;   et al. | 2001-07-26 |
Cleaning method Grant 6,203,627 - Shindo , et al. March 20, 2 | 2001-03-20 |
Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus Grant 6,001,191 - Kamikawa , et al. December 14, 1 | 1999-12-14 |
Liquid treatment method and apparatus Grant 5,922,138 - Shindo , et al. July 13, 1 | 1999-07-13 |
Substrate cleaning method and a substrate cleaning apparatus Grant 5,862,823 - Kamikawa , et al. January 26, 1 | 1999-01-26 |
Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus Grant 5,845,660 - Shindo , et al. December 8, 1 | 1998-12-08 |
Method for washing substrates Grant 5,817,185 - Shindo , et al. October 6, 1 | 1998-10-06 |
Apparatus and method for washing substrates Grant 5,730,162 - Shindo , et al. March 24, 1 | 1998-03-24 |