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Patent applications and USPTO patent grants for Shindo; Haruo.The latest application filed is for "plasma oxidation method and plasma oxidation apparatus".
Patent | Date |
---|---|
Plasma oxidation method and plasma oxidation apparatus Grant 8,404,602 - Takahashi , et al. March 26, 2 | 2013-03-26 |
Dry Etching Method And Dry Etching Apparatus App 20110247995 - TAKAHASHI; Shuji ;   et al. | 2011-10-13 |
Plasma Oxidation Method And Plasma Oxidation Apparatus App 20110250763 - TAKAHASHI; Shuji ;   et al. | 2011-10-13 |
Method of measuring electron energy distribution in plasma region and apparatus for measuring the same Grant 6,873,164 - Shindo , et al. March 29, 2 | 2005-03-29 |
Treatment apparatus and method utilizing negative hydrogen ion Grant 6,511,575 - Shindo , et al. January 28, 2 | 2003-01-28 |
Method of measuring electron energy distribution in plasma region and apparatus for measuring the same App 20020043985 - Shindo, Haruo ;   et al. | 2002-04-18 |
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