SHINADA; Masato

Patent Applications and Registrations

Patent applications and USPTO patent grants for SHINADA; Masato.The latest application filed is for "mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus".

Company Profile

4.1.13

SHINADA; Masato - Tokyo JP
SHINADA; Masato - Fuchu City JP
Shinada; Masato - Kawasaki JP
SHINADA; MASATO - Kawasaki-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Mounting Table Structure, Substrate Processing Apparatus, And Method Of Controlling Substrate Processing Apparatus App 20220238314 - YAMAGATA; Motoi ; et al.	2022-07-28
Film Formation Apparatus And Film Formation Method App 20220223390 - SHINADA; Masato ; et al.	2022-07-14
Sputtering Apparatus And Method Of Controlling Sputtering Apparatus App 20220208534 - SHINADA; Masato ; et al.	2022-06-30
Film Forming Apparatus, Film Forming System, And Film Forming Method App 20220081757 - Shinada; Masato ; et al.	2022-03-17
Sputtering Apparatus And Film Forming Method App 20220044920 - ABARRA; Einstein Noel ; et al.	2022-02-10
Apparatus And Method For Performing Sputtering Process App 20220025511 - SHINADA; Masato ; et al.	2022-01-27
Film Thickness Measuring Apparatus And Film Thickness Measuring Method, And Film Forming System And Film Forming Method App 20210285096 - SHINADA; Masato ; et al.	2021-09-16
Cathode Unit And Film Forming Apparatus App 20210257198 - SHINADA; Masato ; et al.	2021-08-19
Film Formation Device And Film Formation Method App 20210118653 - SHINADA; Masato ; et al.	2021-04-22
Film Forming Apparatus and Film Forming Method App 20200048759 - SHINADA; Masato ; et al.	2020-02-13
Film-forming Apparatus, Film-forming System, And Film-forming Method App 20200051796 - SHINADA; Masato ; et al.	2020-02-13
Film Forming System And Method For Forming Film On Substrate App 20190252165 - SHINADA; Masato ; et al.	2019-08-15
Sputtering apparatus Grant 9,368,331 - Shinada , et al. June 14, 2	2016-06-14
Sputtering Apparatus App 20150303042 - SHINADA; MASATO ; et al.	2015-10-22

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