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Semiconductor Device, Multi-charged-particle Beam Writing Apparatus, And Multi-charged-particle Beam Exposure Apparatus App 20220270850 - OBARA; Kei ;   et al. | 2022-08-25 |
Electrical device including a functional element in a cavity Grant 9,676,608 - Kojima , et al. June 13, 2 | 2017-06-13 |
Device App 20170057811 - SHIMOOKA; Yoshiaki | 2017-03-02 |
MEMS device and method of manufacturing the same Grant 9,230,744 - Watanabe , et al. January 5, 2 | 2016-01-05 |
Electronic Component And Manufacturing Method Of The Same App 20150344298 - SHIMOOKA; Yoshiaki ;   et al. | 2015-12-03 |
MEMS device and manufacturing method thereof Grant 9,202,654 - Shimooka December 1, 2 | 2015-12-01 |
Electrical component and method of manufacturing the same Grant 9,181,081 - Obara , et al. November 10, 2 | 2015-11-10 |
Mems Device And Method For Manufacturing The Same App 20150259192 - YAMAGUCHI; Hitomi ;   et al. | 2015-09-17 |
Semiconductor device Grant 8,987,829 - Shimooka , et al. March 24, 2 | 2015-03-24 |
MEMS device and manufacturing method thereof Grant 8,921,951 - Shimooka December 30, 2 | 2014-12-30 |
Electrical component and method of manufacturing the same Grant 8,921,997 - Shimooka , et al. December 30, 2 | 2014-12-30 |
Electrical Device Including A Functional Element In A Cavity App 20140353777 - KOJIMA; Akihiro ;   et al. | 2014-12-04 |
Semiconductor device using buried oxide layer as optical wave guides Grant 8,867,875 - Shimooka October 21, 2 | 2014-10-21 |
Mems Device And Manufacturing Method Thereof App 20140291136 - SHIMOOKA; Yoshiaki | 2014-10-02 |
Electrical Component And Method Of Manufacturing The Same App 20140284729 - OBARA; Kei ;   et al. | 2014-09-25 |
Electrical device including a functional element in a cavity Grant 8,829,359 - Kojima , et al. September 9, 2 | 2014-09-09 |
Stacked Package And Method Of Manufacturing Stacked Package App 20130249064 - YAMAZAKI; Hiroaki ;   et al. | 2013-09-26 |
Mems Device And Method Of Manufacturing The Same App 20130182366 - Watanabe; Kei ;   et al. | 2013-07-18 |
Electrical Device Including A Functional Element In A Cavity App 20130032386 - KOJIMA; Akihiro ;   et al. | 2013-02-07 |
Electrical device including a functional element in a cavity Grant 8,309,858 - Kojima , et al. November 13, 2 | 2012-11-13 |
Electrical Component And Method Of Manufacturing The Same App 20120049390 - Shimooka; Yoshiaki ;   et al. | 2012-03-01 |
Semiconductor Device App 20110291167 - Shimooka; Yoshiaki ;   et al. | 2011-12-01 |
Mems Element App 20110241135 - Kurui; Yoshihiko ;   et al. | 2011-10-06 |
Micro-electro-mechanical-system package and method for manufacturing the same Grant 7,972,887 - Shimooka July 5, 2 | 2011-07-05 |
Mems Device App 20110095382 - Shimooka; Yoshiaki | 2011-04-28 |
Manufacturing method of semiconductor device Grant 7,902,068 - Watanabe , et al. March 8, 2 | 2011-03-08 |
Semiconductor device having multiple wiring layers and method of producing the same Grant 7,855,141 - Shimooka , et al. December 21, 2 | 2010-12-21 |
Mems Device And Manufacturing Method Thereof App 20100308423 - Shimooka; Yoshiaki | 2010-12-09 |
Semiconductor device and method for manufacturing semiconductor device Grant 7,786,589 - Matsunaga , et al. August 31, 2 | 2010-08-31 |
Interconnect structure and method for semiconductor device Grant 7,768,134 - Shimooka , et al. August 3, 2 | 2010-08-03 |
Semiconductor device having multiple wiring layers and method of producing the same Grant 7,745,326 - Shimooka , et al. June 29, 2 | 2010-06-29 |
Semiconductor Device Having Multiple Wiring Layers And Method Of Producing The Same App 20090280642 - SHIMOOKA; Yoshiaki ;   et al. | 2009-11-12 |
Semiconductor Device Having Multiple Wiring Layers And Method Of Producing The Same App 20090275194 - Shimooka; Yoshiaki ;   et al. | 2009-11-05 |
Semiconductor Device Using Buried Oxide Layer As Optical Wave Guides App 20090263923 - Shimooka; Yoshiaki | 2009-10-22 |
Semiconductor device having multiple wiring layers and method of producing the same Grant 7,589,014 - Shimooka , et al. September 15, 2 | 2009-09-15 |
Semiconductor device using buried oxide layer as optical wave guides Grant 7,574,090 - Shimooka August 11, 2 | 2009-08-11 |
Electrical Device App 20090188709 - KOJIMA; Akihiro ;   et al. | 2009-07-30 |
Interconnect Structure and Method for Semiconductor Device App 20090146290 - Shimooka; Yoshiaki ;   et al. | 2009-06-11 |
Micro-electro-mechanical-system Package And Method For Manufacturing The Same App 20090107692 - SHIMOOKA; Yoshiaki | 2009-04-30 |
Interconnect structure and method for semiconductor device Grant 7,524,758 - Shimooka , et al. April 28, 2 | 2009-04-28 |
Manufacturing Method Of Semiconductor Device App 20080311742 - WATANABE; Tadayoshi ;   et al. | 2008-12-18 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20080296775 - Matsunaga; Noriaki ;   et al. | 2008-12-04 |
Semiconductor Device App 20080251854 - SHIMOOKA; Yoshiaki ;   et al. | 2008-10-16 |
Semiconductor device using buried oxide layer as optical wave guides App 20070262327 - Shimooka; Yoshiaki | 2007-11-15 |
Long-lifetime interconnect structure and method for making App 20070246830 - Shimooka; Yoshiaki | 2007-10-25 |
Interconnect structure and method for semiconductor device App 20070197024 - Shimooka; Yoshiaki ;   et al. | 2007-08-23 |
Semiconductor Device Have Multiple Wiring Layers And Method Of Producing The Same App 20070093052 - Shimooka; Yoshiaki ;   et al. | 2007-04-26 |
Semiconductor device using a multilayer wiring structure Grant 6,781,236 - Shimooka , et al. August 24, 2 | 2004-08-24 |
Semiconductor device and method for manufacturing the same App 20040157443 - Shimooka, Yoshiaki ;   et al. | 2004-08-12 |
Semiconductor device of multi-wiring structure and method of manufacturing the same Grant 6,750,138 - Matsunaga , et al. June 15, 2 | 2004-06-15 |
Semiconductor device of multi-wiring structure and method of manufacturing the same App 20030201539 - Matsunaga, Noriaki ;   et al. | 2003-10-30 |
Semiconductor device and method of manufacturing the same App 20030109084 - Shimooka, Yoshiaki ;   et al. | 2003-06-12 |
Semiconductor device of multi-wiring structure and method of manufacturing the same Grant 6,563,218 - Matsunaga , et al. May 13, 2 | 2003-05-13 |
Semiconductor Device Of Multi-wiring Structure And Method Of Manufacturing The Same App 20030057557 - Matsunaga, Noriaki ;   et al. | 2003-03-27 |
Semiconductor device have multiple wiring layers and method of producing the same App 20020187625 - Shimooka, Yoshiaki ;   et al. | 2002-12-12 |
Semiconductor device and method for manufacturing the same App 20020081839 - Shimooka, Yoshiaki ;   et al. | 2002-06-27 |