Shimono; Kenichi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Shimono; Kenichi.The latest application filed is for "ion beam irradiation apparatus and substrate processing apparatus".
- Shimono; Kenichi - Kyoto JP
- SHIMONO; Kenichi - Fushimi-ku JP
| Patent | Date |
|---|---|
| Gas supply mechanism and semiconductor manufacturing system Grant 10,950,467 - Hosaka , et al. March 16, 2 | 2021-03-16 |
| Gas supply mechanism and semiconductor manufacturing system Grant 10,636,683 - Hosaka , et al. | 2020-04-28 |
| Ion beam irradiation apparatus and substrate processing apparatus Grant 10,204,766 - Umezawa , et al. Feb | 2019-02-12 |
| Ion Beam Irradiation Apparatus And Substrate Processing Apparatus App 20180108516 - UMEZAWA; Yoshihiro ; et al. | 2018-04-19 |
| Gas Supply Mechanism And Semiconductor Manufacturing System App 20170301568 - HOSAKA; Yuki ; et al. | 2017-10-19 |
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