Shimomura; Shinichiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shimomura; Shinichiro.The latest application filed is for "substrate processing method and substrate processing apparatus".

Company Profile

1.7.6

Shimomura; Shinichiro - Kumamoto JP
Shimomura; Shinichiro - Koshi JP
SHIMOMURA; Shinichiro - Koshi-Shi JP
Shimomura, Shinichiro - Tosu-shi JP
Shimomura; Shinichiro - Tosu JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing method and substrate processing apparatus Grant 11,183,396 - Shimomura November 23, 2	2021-11-23
Substrate Processing Method And Substrate Processing Apparatus App 20200335356 - Shimomura; Shinichiro	2020-10-22
Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof Grant 9,922,849 - Ido , et al. March 20, 2	2018-03-20
Substrate processing method, substrate processing apparatus, and storage medium Grant 9,362,106 - Iwamoto , et al. June 7, 2	2016-06-07
Process liquid changing method and substrate processing apparatus Grant 9,278,768 - Kasahara , et al. March 8, 2	2016-03-08
Substrate Liquid Processing Apparatus And Substrate Liquid Processing Method App 20150318183 - Ido; Yasuyuki ; et al.	2015-11-05
Substrate processing apparatus for maintaining a more uniform temperature during substrate processing Grant 9,027,573 - Hyakutake , et al. May 12, 2	2015-05-12
Substrate Processing Method, Substrate Processing Apparatus, And Storage Medium App 20140080312 - IWAMOTO; Hayato ; et al.	2014-03-20
Process Liquid Changing Method And Substrate Processing Apparatus App 20130220478 - KASAHARA; Masatoshi ; et al.	2013-08-29
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium Storing Computer Program For Performing Substrate Processing Method App 20110290279 - HYAKUTAKE; Hironobu ; et al.	2011-12-01
Cleaning apparatus and cleaning method App 20010011548 - Tanaka, Hiroshi ; et al.	2001-08-09
Method for cleaning a workpiece Grant 6,241,827 - Tanaka , et al. June 5, 2	2001-06-05

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