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Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method Grant 8,634,121 - Shimokawa , et al. January 21, 2 | 2014-01-21 |
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Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method Grant 8,582,189 - Shimokawa , et al. November 12, 2 | 2013-11-12 |
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Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, and Mirror Substrate Manufacturing Method App 20080100899 - Shimokawa; Fusao ;   et al. | 2008-05-01 |
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