Shimizu; Akitaka
Patent Applications and Registrations
Patent applications and USPTO patent grants for Shimizu; Akitaka.The latest application filed is for "etching method and etching apparatus".
Company Profile
12.39.59
- Shimizu; Akitaka - Nirasaki JP
- SHIMIZU; Akitaka - Nirasaki City JP
- Shimizu; Akitaka - Yamanashi JP
- Shimizu; Akitaka - Miyagi JP
- Shimizu; Akitaka - Wakayama JP
- SHIMIZU; Akitaka - Wakayama-shi JP
- Shimizu; Akitaka - Nirasaki-shi JP
- Shimizu; Akitaka - Kurokawa-gun JP
- Shimizu; Akitaka - Yamanashi-Ken JP
- Shimizu; Akitaka - Osaka JP
Patent Activity
| Patent | Date |
|---|---|
| Etching method and etching device Grant 11,443,952 - Shimizu , et al. September 13, 2 | 2022-09-13 |
| Etching Method And Etching Apparatus App 20220189783 - SHIMIZU; Akitaka ; et al. | 2022-06-16 |
| Substrate processing apparatus Grant 11,328,904 - Doba , et al. May 10, 2 | 2022-05-10 |
| Etching Method, Method Of Removing Etching Residue, And Storage Medium App 20210358761 - TAKAHASHI; Nobuhiro ; et al. | 2021-11-18 |
| Etching method and etching apparatus Grant 11,024,514 - Abe , et al. June 1, 2 | 2021-06-01 |
| Etching Method and Etching Device App 20210151326 - SHIMIZU; Akitaka ; et al. | 2021-05-20 |
| Substrate processing apparatus and substrate processing method Grant 10,985,029 - Ogawa , et al. April 20, 2 | 2021-04-20 |
| Method of cleaning plasma processing apparatus Grant 10,975,468 - Kishi , et al. April 13, 2 | 2021-04-13 |
| Substrate Processing Method, Substrate Processing Apparatus And Substrate Processing System App 20210104412 - HADA; Keiko ; et al. | 2021-04-08 |
| Etching Method, Damage Layer Removal Method, And Storage Medium App 20210090896 - SHIMIZU; Akitaka | 2021-03-25 |
| Substrate processing method Grant 10,923,358 - Imai , et al. February 16, 2 | 2021-02-16 |
| Substrate processing apparatus and substrate processing method Grant 10,923,329 - Nishimura , et al. February 16, 2 | 2021-02-16 |
| Substrate processing method, substrate processing apparatus and substrate processing system Grant 10,903,083 - Hada , et al. January 26, 2 | 2021-01-26 |
| Substrate Processing Apparatus App 20200321195 - DOBA; Shigeki ; et al. | 2020-10-08 |
| Substrate processing apparatus Grant 10,734,201 - Doba , et al. | 2020-08-04 |
| Substrate Processing Apparatus And Substrate Processing Method App 20200118830 - OGAWA; Hiroyuki ; et al. | 2020-04-16 |
| Substrate Processing Apparatus And Substrate Processing Method App 20200111646 - NISHIMURA; Eiichi ; et al. | 2020-04-09 |
| Etching Method And Etching Apparatus App 20200035504 - ABE; Takuya ; et al. | 2020-01-30 |
| Substrate processing apparatus and substrate processing method Grant 10,541,145 - Ogawa , et al. Ja | 2020-01-21 |
| Substrate Processing Method App 20190109012 - IMAI; Muneyuki ; et al. | 2019-04-11 |
| Method for manufacturing toner for electrostatic image development Grant 10,254,669 - Shimizu | 2019-04-09 |
| Method Of Cleaning Plasma Processing Apparatus App 20180327901 - KISHI; Hiroki ; et al. | 2018-11-15 |
| Substrate Processing Apparatus And Substrate Processing Method App 20180286696 - OGAWA; Hiroyuki ; et al. | 2018-10-04 |
| Method of cleaning plasma processing apparatus Grant 10,053,773 - Kishi , et al. August 21, 2 | 2018-08-21 |
| Substrate Processing Apparatus And Heat Shield Plate App 20180151380 - OGAWA; Hiroyuki ; et al. | 2018-05-31 |
| Oxide film removing method, oxide film removing apparatus, contact forming method, and contact forming system Grant 9,984,892 - Kobayashi , et al. May 29, 2 | 2018-05-29 |
| Etching method and substrate processing apparatus Grant 9,882,124 - Nishimura , et al. January 30, 2 | 2018-01-30 |
| Method For Manufacturing Toner For Electrostatic Image Development App 20170371255 - SHIMIZU; Akitaka | 2017-12-28 |
| Oxide Film Removing Method, Oxide Film Removing Apparatus, Contact Forming Method, And Contact Forming System App 20170338120 - Kobayashi; Takashi ; et al. | 2017-11-23 |
| Substrate Processing Apparatus App 20170256382 - DOBA; Shigeki ; et al. | 2017-09-07 |
| Plasma Processing Apparatus App 20170243725 - YAMAZAKI; Ryoji ; et al. | 2017-08-24 |
| Substrate Processing Method, Substrate Processing Apparatus And Substrate Processing System App 20170200618 - HADA; Keiko ; et al. | 2017-07-13 |
| Plasma processing apparatus Grant 9,245,776 - Himori , et al. January 26, 2 | 2016-01-26 |
| Substrate cleaning apparatus and vacuum processing system Grant 9,214,364 - Dobashi , et al. December 15, 2 | 2015-12-15 |
| Method of etching copper layer and mask Grant 9,208,997 - Nishimura , et al. December 8, 2 | 2015-12-08 |
| Method Of Cleaning Plasma Processing Apparatus App 20150247235 - KISHI; Hiroki ; et al. | 2015-09-03 |
| Etching Method And Substrate Processing Apparatus App 20150214474 - NISHIMURA; Eiichi ; et al. | 2015-07-30 |
| Substrate Processing Apparatus And Substrate Processing Method App 20150132970 - Nishimura; Eiichi ; et al. | 2015-05-14 |
| Substrate Processing Apparatus And Substrate Processing Method App 20150132960 - Nishimura; Eiichi ; et al. | 2015-05-14 |
| Plasma Processing Method App 20150083580 - SHIMIZU; Akitaka ; et al. | 2015-03-26 |
| Plasma Etching Method And Plasma Etching Apparatus App 20140284308 - MATSUYAMA; Shoichiro ; et al. | 2014-09-25 |
| Method Of Etching Copper Layer And Mask App 20140110373 - Nishimura; Eiichi ; et al. | 2014-04-24 |
| Substrate processing method and substrate processing apparatus for performing a deposition process and calculating a termination time of the deposition process Grant 8,642,136 - Kushibiki , et al. February 4, 2 | 2014-02-04 |
| Plasma Etching Method App 20130295774 - Shimizu; Akitaka ; et al. | 2013-11-07 |
| Substrate processing method and substrate processing apparatus Grant 8,383,517 - Nishimura , et al. February 26, 2 | 2013-02-26 |
| Plasma etchimg method and plasma etching apparatus Grant 8,298,957 - Sakao , et al. October 30, 2 | 2012-10-30 |
| Substrate Cleaning Apparatus And Vacuum Processing System App 20120247670 - DOBASHI; Kazuya ; et al. | 2012-10-04 |
| Substrate processing control method and storage medium Grant RE43,652 - Saito , et al. September 11, 2 | 2012-09-11 |
| Plasma processing apparatus Grant 8,251,011 - Yamazawa , et al. August 28, 2 | 2012-08-28 |
| Component cleaning method and storage medium Grant 8,236,109 - Moriya , et al. August 7, 2 | 2012-08-07 |
| Substrate Processing Apparatus And Side Wall Component App 20120037314 - ENDOH; Shosuke ; et al. | 2012-02-16 |
| Plasma Etching Method And Plasma Etching Apparatus App 20110220609 - Yaegashi; Hidetami ; et al. | 2011-09-15 |
| Etching Method And Apparatus App 20110217796 - Saito; Susumu ; et al. | 2011-09-08 |
| Plasma Processing Apparatus App 20110155322 - HIMORI; Shinji ; et al. | 2011-06-30 |
| Method for manufacturing semiconductor device Grant 7,897,498 - Gale , et al. March 1, 2 | 2011-03-01 |
| Plasma processing method and post-processing method Grant 7,871,532 - Shimizu , et al. January 18, 2 | 2011-01-18 |
| Substrate processing control method and storage medium Grant 7,824,931 - Saito , et al. November 2, 2 | 2010-11-02 |
| Plasma etching method Grant 7,811,939 - Kushibiki , et al. October 12, 2 | 2010-10-12 |
| Substrate Processing Apparatus And Substrate Processing Method App 20100206846 - Nishimura; Eiichi ; et al. | 2010-08-19 |
| Component Cleaning Method And Storage Medium App 20100154821 - MORIYA; TSUYOSHI ; et al. | 2010-06-24 |
| Substrate Processing Method, Substrate Processing Apparatus, And Storage Medium App 20100086670 - Kushibiki; Masato ; et al. | 2010-04-08 |
| Substrate Processing Control Method And Storage Medium App 20100029020 - SAITO; Susumu ; et al. | 2010-02-04 |
| Fine pattern forming method Grant 7,604,908 - Kushibiki , et al. October 20, 2 | 2009-10-20 |
| Plasma etchimg method and plasma etching apparatus App 20090233450 - Sakao; Yosuke ; et al. | 2009-09-17 |
| Plasma Etching Method, Plasma Etching Apparatus, Control Program And Computer-readable Storage Medium App 20090206053 - Shimizu; Akitaka ; et al. | 2009-08-20 |
| Plasma processing apparatus Grant 7,527,016 - Yamazawa , et al. May 5, 2 | 2009-05-05 |
| Etching method and apparatus Grant 7,514,277 - Saito , et al. April 7, 2 | 2009-04-07 |
| Method for Manufacturing Semiconductor Device App 20080268655 - Gale; Glenn ; et al. | 2008-10-30 |
| Plasma etching method Grant 7,432,172 - Shimizu , et al. October 7, 2 | 2008-10-07 |
| Substrate Processing Method And Substrate Processing Apparatus App 20080182421 - NISHIMURA; Eiichi ; et al. | 2008-07-31 |
| Plasma Processing Apparatus App 20070236148 - Yamazawa; Yohei ; et al. | 2007-10-11 |
| Substrate Processing Apparatus And Side Wall Component App 20070227663 - Endoh; Shosuke ; et al. | 2007-10-04 |
| Etching Method And Apparatus App 20070221258 - SAITO; Susumu ; et al. | 2007-09-27 |
| Plasma Etching Method App 20070224828 - KUSHIBIKI; Masato ; et al. | 2007-09-27 |
| Substrate Processing Apparatus And Substrate Processing Method App 20070187363 - OKA; Hiromi ; et al. | 2007-08-16 |
| Etching method and computer storage medium storing program for controlling same Grant 7,256,135 - Kushibiki , et al. August 14, 2 | 2007-08-14 |
| Optical disk apparatus Grant 7,242,643 - Shimizu July 10, 2 | 2007-07-10 |
| Travel device App 20070118288 - Tani; Takao ; et al. | 2007-05-24 |
| Dry etching method Grant 7,192,532 - Koh , et al. March 20, 2 | 2007-03-20 |
| Dry etching method Grant 7,179,752 - Shimizu , et al. February 20, 2 | 2007-02-20 |
| Atmospheric transfer chamber, processed object transfer method, program for performing the transfer method, and storage medium storing the program App 20060207971 - Moriya; Tsuyoshi ; et al. | 2006-09-21 |
| Fine pattern forming method App 20060204899 - Kushibiki; Masato ; et al. | 2006-09-14 |
| Plasma processing method and post-processing method App 20060191877 - Shimizu; Akitaka ; et al. | 2006-08-31 |
| Plasma etching method App 20060163202 - Shimizu; Akitaka ; et al. | 2006-07-27 |
| Self-propelled cleaner and self-propelled traveling apparatus App 20060132318 - Shimizu; Akitaka | 2006-06-22 |
| Cleaner with security function and travel device with security function App 20060088204 - Shimizu; Akitaka | 2006-04-27 |
| Etching method and apparatus App 20060057804 - Saito; Susumu ; et al. | 2006-03-16 |
| Self-propelling cleaner App 20060037170 - Shimizu; Akitaka | 2006-02-23 |
| Plasma processing method and post-processing method App 20060011580 - Shimizu; Akitaka | 2006-01-19 |
| Etching method and computer storage medium storing program for controlling same App 20050070111 - Kushibiki, Masato ; et al. | 2005-03-31 |
| Dry etching method App 20050045588 - Koh, Akiteru ; et al. | 2005-03-03 |
| Dry etching method App 20040214445 - Shimizu, Akitaka ; et al. | 2004-10-28 |
| Optical disk apparatus App 20040184363 - Shimizu, Akitaka | 2004-09-23 |
| Plasma processing apparatus App 20040035365 - Yamazawa, Yohei ; et al. | 2004-02-26 |
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