Shimazu; Nobuo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shimazu; Nobuo.The latest application filed is for "electron beam proximity exposure apparatus and method".

Company Profile

0.6.4

Shimazu; Nobuo - Machida JP
Shimazu, Nobuo - Machida-city JP
Shimazu, Nobuo - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Electron beam proximity exposure apparatus and mask unit therefor Grant 6,894,295 - Shimazu , et al. May 17, 2	2005-05-17
Electron beam proximity exposure apparatus and method Grant 6,727,507 - Shimazu , et al. April 27, 2	2004-04-27
Electron beam proximity exposure apparatus Grant 6,703,623 - Shimazu , et al. March 9, 2	2004-03-09
Electron beam proximity exposure apparatus and method App 20020096646 - Shimazu, Nobuo ; et al.	2002-07-25
Electron beam proximity exposure apparatus and mask unit therefor App 20020070356 - Shimazu, Nobuo ; et al.	2002-06-13
Manufacturing method of mask for electron beam proximity exposure and mask App 20020070354 - Shimazu, Nobuo ; et al.	2002-06-13
Manufacturing method of mask for electron beam proximity exposure and mask App 20020071994 - Shimazu, Nobuo ; et al.	2002-06-13
Method and apparatus for evaluating the capacitance of an integrated electronic device using an E beam Grant 5,097,204 - Yoshizawa , et al. March 17, 1	1992-03-17
Method and apparatus for testing integrated electronic device Grant 4,980,639 - Yoshizawa , et al. December 25, 1	1990-12-25
Method and apparatus of deflection calibration for a charged particle beam exposure apparatus Grant 4,443,703 - Shimazu , et al. April 17, 1	1984-04-17

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