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Positive resist composition of chemical amplification type, resist coated material, method of forming resist pattern, and process for producing semiconductor device Grant 6,921,621 - Nitta , et al. July 26, 2 | 2005-07-26 |
Chemical amplification type positive resist composition, resist laminated material, resist pattern forming method and method of manufacturing semiconductor device App 20050112498 - Nitta, Kazuyuki ;   et al. | 2005-05-26 |
Positive resist composition and method of forming resist pattern using same App 20050079445 - Nitta, Kazuyuki ;   et al. | 2005-04-14 |
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Positive photoresist composition and process for synthesizing polyphenol compound Grant 6,620,978 - Shimatani , et al. September 16, 2 | 2003-09-16 |
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