Shima; Shohei

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shima; Shohei.The latest application filed is for "method for determining cleanliness of cleaning member, method for determining adsorption characteristics of contaminants that contaminate cleaning member, method for determining cleanliness of substrate, program for determining cleanliness of substrate, and program for determining end point of clean".

Company Profile

1.2.11

Shima; Shohei - Tokyo JP
SHIMA; SHOHEI - KANAGAWA-KEN JP
Shima, Shohei - Yokohama-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method For Determining Cleanliness Of Cleaning Member, Method For Determining Adsorption Characteristics Of Contaminants That Contaminate Cleaning Member, Method For Determining Cleanliness Of Substrate, Program For Determining Cleanliness Of Substrate, And Program For Determining End Point Of Clean App 20210384881 - Takatoh; Chikako ; et al.	2021-12-09
Substrate Cleaning Method, Substrate Cleaning Apparatus, Substrate Processing Apparatus, Substrate Processing System, Machine Le App 20200116480 - Shima; Shohei	2020-04-16
Apparatus and method for surface treatment of substrate, and substrate processing apparatus and method Grant 8,205,625 - Tateishi , et al. June 26, 2	2012-06-26
Film Thickness Measuring Method and Substrate Processing Apparatus App 20100097607 - Susaki; Akira ; et al.	2010-04-22
Substrate Processing Method App 20100043839 - HAMADA; SATOMI ; et al.	2010-02-25
Polishing method and apparatus App 20090197510 - Shima; Shohei ; et al.	2009-08-06
Apparatus and method for surface treatment of substrate, and substrate processing apparatus and method App 20080124932 - Tateishi; Hideki ; et al.	2008-05-29
Substrate Processing Apparatus App 20070289604 - Fukunaga; Yukio ; et al.	2007-12-20
Method of polishing thin film formed on substrate Grant 7,262,849 - Shima , et al. August 28, 2	2007-08-28
Method of polishing thin film formed on substrate App 20050254051 - Shima, Shohei ; et al.	2005-11-17
Substrate processing apparatus and substrate processing method App 20050026455 - Hamada, Satomi ; et al.	2005-02-03
Substrate processing method and substrate processing apparatus App 20040219298 - Fukunaga, Akira ; et al.	2004-11-04
Semiconductor device and manufacturing method thereof App 20020130415 - Hasunuma, Masahiko ; et al.	2002-09-19

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