Shim; Kyung-Sik

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shim; Kyung-Sik.The latest application filed is for "atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors".

Company Profile

0.6.9

Shim; Kyung-Sik - Sungnam KR
Shim; Kyung-Sik - Gyeonggi-do KR
Shim; Kyung-Sik - Sungnam-shi KR
Shim; Kyung Sik - Songnami-shi KR
Shim; Kyung Sik - Songnam-shi KR
Shim, Kyung Sik - Kyonggi-do KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus for chemical vapor deposition Grant 7,390,366 - Shim June 24, 2	2008-06-24
Apparatus of manufacturing a semiconductor device Grant 6,966,951 - Shim November 22, 2	2005-11-22
Atomic layer deposition method Grant 6,872,421 - Hwang , et al. March 29, 2	2005-03-29
Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors App 20040035362 - Hwang, Chul-Ju ; et al.	2004-02-26
Single wafer LPCVD apparatus Grant 6,660,095 - Shim December 9, 2	2003-12-09
Semiconductor device manufacturing apparatus having rotatable gas injector and thin film deposition method using the same Grant 6,656,284 - Hwang , et al. December 2, 2	2003-12-02
Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors Grant 6,634,314 - Hwang , et al. October 21, 2	2003-10-21
Apparatus for chemical vapor deposition App 20030116279 - Shim, Kyung Sik	2003-06-26
Apparatus for chemical vapor deposition App 20030084849 - Shim, Kyung-Sik	2003-05-08
HDP-CVD apparatus App 20030041804 - Shim, Kyung-Sik ; et al.	2003-03-06
Apparatus of manufacturing a semiconductor device App 20030037731 - Shim, Kyung-Sik	2003-02-27
Apparatus for fabricating a semiconductor device App 20030015292 - Hwang, Chul Ju ; et al.	2003-01-23
Apparatus for fabricating a semiconductor device App 20030015142 - Hwang, Chul Ju ; et al.	2003-01-23
Single wafer LPCVD apparatus App 20020092617 - Shim, Kyung Sik	2002-07-18
Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors App 20020043216 - Hwang, Chul-Ju ; et al.	2002-04-18

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