Shim; Jea-Eun Jess
Patent Applications and Registrations
Patent applications and USPTO patent grants for Shim; Jea-Eun Jess.The latest application filed is for "electrostatic chuck and apparatus for processing a substrate including the same".
- Shim; Jea-Eun Jess - Hwaseong-si KR
| Patent | Date |
|---|---|
| Electrostatic chuck and apparatus for processing a substrate including the same Grant 9,583,371 - Shim , et al. February 28, 2 | 2017-02-28 |
| Electrostatic Chuck And Apparatus For Processing A Substrate Including The Same App 20150170951 - Shim; Jea-Eun Jess ; et al. | 2015-06-18 |
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