Shigyo; Yoshiharu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shigyo; Yoshiharu.The latest application filed is for "method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process".

Company Profile

0.6.3

Shigyo; Yoshiharu - Takasaki JP
Shigyo, Yoshiharu - Takasaki-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process Grant 7,177,020 - Morioka , et al. February 13, 2	2007-02-13
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process App 20050206887 - Morioka, Hiroshi ; et al.	2005-09-22
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process Grant 6,894,773 - Morioka , et al. May 17, 2	2005-05-17
Process management system Grant 6,757,621 - Mizuno , et al. June 29, 2	2004-06-29
Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system Grant 6,650,409 - Noguchi , et al. November 18, 2	2003-11-18
Process management system App 20030130806 - Mizuno, Fumio ; et al.	2003-07-10
Process control system Grant 6,542,830 - Mizuno , et al. April 1, 2	2003-04-01
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process App 20010021015 - Morioka, Hiroshi ; et al.	2001-09-13
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process Grant 5,463,459 - Morioka , et al. October 31, 1	1995-10-31

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