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Resistance Change Memory
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Semiconductor Memory Device And Method Of Manufacturing The Same
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Semiconductor Memory Device
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Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing
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Nonvolatile Memory Device
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Nonvolatile Memory Device
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Nonvolatile Semiconductor Memory Device
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Semiconductor Memory Device
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Resistance Change Memory
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Gas switching mechanism for plasma processing apparatus
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A Processing Method For Processing A Substrate Placed On A Placement Stage In A Process Chamber
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Semiconductor Device That Is Advantageous In Microfabrication And Method Of Manufacturing The Same
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Semiconductor Memory
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Method of Forming Thin Film, Thin Film Forming Apparatus, Program and Computer-Readable Information Recording Medium
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Processing method
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Semiconductor Device That Is Advantageous In Microfabrication And Method Of Manufacturing The Same
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Processing apparatus and processing method
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Semiconductor device and its manufacturing method
App 20060091556 - Shigeoka; Takashi | 2006-05-04 |
Thin-film formation in semiconductor device fabrication process and film deposition apparatus
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Processing apparatus and processing method
App 20060027167 - Ishizaka; Tadahiro ; et al. | 2006-02-09 |
Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing
App 20050241761 - Kannan, Hiroshi ; et al. | 2005-11-03 |
Thermal processing system
Grant 6,891,131 - Sakuma , et al. May 10, 2 | 2005-05-10 |
Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment
Grant 6,876,816 - Shigeoka , et al. April 5, 2 | 2005-04-05 |
Temperature measuring method, heat treating device and method, computer program, and radiation thermometer
Grant 6,860,634 - Shigeoka March 1, 2 | 2005-03-01 |
Processing apparatus
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Lamp having a high-reflectance film for improving directivity of light and heat treatment apparatus having such a lamp
Grant 6,825,615 - Shigeoka November 30, 2 | 2004-11-30 |
Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment
App 20040112885 - Shigeoka, Takashi ; et al. | 2004-06-17 |
Substrate treatment device, substrate treatment method, and cleaning method for substrate treatment device
App 20040081757 - Ishizaka, Tadahiro ; et al. | 2004-04-29 |
Processing apparatus having a support member made of metal matrix composite between a process chamber and a title placement stage
App 20040042152 - Ishizaka, Tadahiro ; et al. | 2004-03-04 |
Thermal processing system
App 20040013419 - Sakuma, Takeshi ; et al. | 2004-01-22 |
Temperature measuring method, heat treating device and method, computer program, and radiation thermometer
App 20040004989 - Shigeoka, Takashi | 2004-01-08 |
Thermal process apparatus for a semiconductor substrate
Grant 6,641,302 - Li , et al. November 4, 2 | 2003-11-04 |
Virtual blackbody radiation system and radiation temperature measuring system
Grant 6,467,952 - Morisaki , et al. October 22, 2 | 2002-10-22 |
Heat treatment apparatus having a thin light-transmitting window
Grant 6,437,290 - Shao , et al. August 20, 2 | 2002-08-20 |
Lamp having a high-reflectance film for improving directivity of light and heat treatment apparatus having such a lamp
App 20020105275 - Shigeoka, Takashi | 2002-08-08 |
Virtual Blackbody Radiation System And Radiation Temperature Measuring System
App 20020106000 - Morisaki, Eisuke ; et al. | 2002-08-08 |
Thermal process apparatus for a semiconductor substrate
App 20020041620 - Li, Yicheng ; et al. | 2002-04-11 |
Thermal process apparatus for measuring accurate temperature by a radiation thermometer
App 20020040897 - Shigeoka, Takashi | 2002-04-11 |
Heat treatment apparatus having a thin light-transmitting window
App 20020030047 - Shao, Shouqian ; et al. | 2002-03-14 |
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