Shigematsu; Koji

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shigematsu; Koji.The latest application filed is for "illumination optical system, exposure apparatus and device manufacturing method".

Company Profile

2.30.30

Shigematsu; Koji - Kawasaki JP
SHIGEMATSU; Koji - Kawasaki-shi JP
Shigematsu; Koji - Fussa JP
Shigematsu; Koji - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Illumination optical system, exposure apparatus and device manufacturing method Grant 10,520,825 - Shigematsu Dec	2019-12-31
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method Grant 10,241,417 - Tanitsu , et al.	2019-03-26
Illumination Optical System, Exposure Apparatus And Device Manufacturing Method App 20190086811 - SHIGEMATSU; Koji	2019-03-21
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method Grant 10,234,770 - Tanitsu , et al.	2019-03-19
Illumination optical system, exposure apparatus and device manufacturing method Grant 10,168,620 - Shigematsu J	2019-01-01
Polarization-modulating Element, Illumination Optical Apparatus, Exposure Apparatus, And Exposure Method App 20180341185 - TANITSU; Osamu ; et al.	2018-11-29
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method Grant 10,007,194 - Tanitsu , et al. June 26, 2	2018-06-26
Polarization-modulating Element, Illumination Optical Apparatus, Exposure Apparatus, And Exposure Method App 20170227854 - TANITSU; Osamu ; et al.	2017-08-10
Illumination Optical System, Exposure Apparatus And Device Manufacturing Method App 20170108782 - SHIGEMATSU; Koji	2017-04-20
Illumination optical system, exposure apparatus and device manufacturing method Grant 9,563,130 - Shigematsu February 7, 2	2017-02-07
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method Grant 9,429,848 - Tanitsu , et al. August 30, 2	2016-08-30
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method Grant 9,423,694 - Tanitsu , et al. August 23, 2	2016-08-23
Lighting optical device, regulation method for lighting optical device, exposure system, and exposure method Grant 9,235,133 - Tanaka , et al. January 12, 2	2016-01-12
Illumination Optical System, Exposure Apparatus And Device Manufacturing Method App 20150092173 - SHIGEMATSU; Koji	2015-04-02
Illumination optical system, exposure apparatus and device manufacturing method Grant 8,934,086 - Shigematsu January 13, 2	2015-01-13
Method Of Adjusting Lighting Optical Device, Lighting Optical Device, Exposure System, And Exposure Method App 20140043594 - TANITSU; Osamu ; et al.	2014-02-13
Polarization-modulating Element, Illumination Optical Apparatus, Exposure Apparatus, And Exposure Method App 20140028990 - TANITSU; Osamu ; et al.	2014-01-30
Polarization-modulating Element, Illumination Optical Apparatus, Exposure Apparatus, And Exposure Method App 20130271945 - TANITSU; Osamu ; et al.	2013-10-17
Polarization-modulating Element, Illumination Optical Apparatus, Exposure Apparatus, And Exposure Method App 20130242527 - TANITSU; Osamu ; et al.	2013-09-19
Illuminating optical apparatus, exposure apparatus and device manufacturing method Grant 8,325,324 - Shigematsu , et al. December 4, 2	2012-12-04
Illumination Optical System, Exposure Apparatus And Device Manufacturing Method App 20110310375 - SHIGEMATSU; Koji	2011-12-22
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method App 20110273697 - Tanitsu; Osamu ; et al.	2011-11-10
Lighting optical device, exposure system, and exposure method Grant 8,004,658 - Shigematsu August 23, 2	2011-08-23
Non volatile memory Grant 7,808,828 - Sakurai , et al. October 5, 2	2010-10-05
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method App 20090316132 - Tanitsu; Osamu ; et al.	2009-12-24
Non Volatile Memory App 20090262581 - Sakurai; Ryotaro ; et al.	2009-10-22
Non volatile memory Grant 7,558,107 - Sakurai , et al. July 7, 2	2009-07-07
Illuminating Optical Apparatus, Exposure Apparatus And Device Manufacturing Method App 20090135396 - Mizuno; Yasushi ; et al.	2009-05-28
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method App 20090073441 - Tanitsu; Osamu ; et al.	2009-03-19
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method App 20090073414 - Tanitsu; Osamu ; et al.	2009-03-19
Illuminating Optical Apparatus, Exposure Apparatus And Device Manufacturing Method App 20090040490 - SHIGEMATSU; Koji ; et al.	2009-02-12
Non Volatile Memory App 20080253184 - SAKURAI; Ryotaro ; et al.	2008-10-16
Exposure apparatus, device manufacturing method and exposure method App 20080246932 - Shigematsu; Koji	2008-10-09
Non volatile memory Grant 7,426,136 - Sakurai , et al. September 16, 2	2008-09-16
Lighting Optical Device, Regulation Method for Lighting Optical Device, Exposure System, and Exposure Method App 20080030707 - Tanaka; Hirohisa ; et al.	2008-02-07
Lighting Optical Device,Exposure System,And Exposure Method App 20080030852 - Shigematsu; Koji	2008-02-07
Method of adjusting lighting optical device, lighting optical device, exposure system, and exposure method App 20070146676 - Tanitsu; Osamu ; et al.	2007-06-28
Projection optical system, exposure apparatus, and device production method Grant 7,154,585 - Shigematsu , et al. December 26, 2	2006-12-26
Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method App 20060170901 - Tanitsu; Osamu ; et al.	2006-08-03
Non volatile memory App 20050219904 - Sakurai, Ryotaro ; et al.	2005-10-06
Projection optical system, a projection exposure apparatus provided with the same, as well as a device manufacturing method Grant 6,947,121 - Shigematsu September 20, 2	2005-09-20
Projection optical system, a projection exposure apparatus, and a projection exposure method Grant 6,912,094 - Shigematsu , et al. June 28, 2	2005-06-28
Non volatile memory Grant 6,912,155 - Sakurai , et al. June 28, 2	2005-06-28
Non Volatile memory App 20040105324 - Sakurai, Ryotaro ; et al.	2004-06-03
Projection optical system and exposure apparatus and method Grant 6,700,645 - Shigematsu March 2, 2	2004-03-02
Projection optical system, exposure apparatus, and device production method App 20040009415 - Shigematsu, Koji ; et al.	2004-01-15
Projection optical system, a projection exposure apparatus provided with the same, as well as a device manufacturing method App 20030210385 - Shigematsu, Koji	2003-11-13
Exposure apparatus, a photolithography method, and a device manufactured by the same Grant 6,600,550 - Shigematsu July 29, 2	2003-07-29
Projection optical system, a projection exposure apparatus, and a projection exposure method App 20030007138 - Shigematsu, Koji ; et al.	2003-01-09
Nonvolatile semiconductor memory App 20020149974 - Sato, Hiroshi ; et al.	2002-10-17
Nonvolatile semiconductor memory Grant 6,418,065 - Sato , et al. July 9, 2	2002-07-09
Nonvolatile semiconductor memory App 20020006063 - Sato, Hiroshi ; et al.	2002-01-17
Projection optical system and exposure apparatus and method Grant 6,333,781 - Shigematsu December 25, 2	2001-12-25
Exposure apparatus Grant 6,084,723 - Matsuzawa , et al. July 4, 2	2000-07-04
Information storage apparatus and method for operating the same Grant 5,963,472 - Inada , et al. October 5, 1	1999-10-05
Information storage apparatus and method for operating the same Grant 5,848,002 - Inada , et al. December 8, 1	1998-12-08

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